1. A movable temperature control sand bath beam source furnace is characterized by comprising beam source furnace bottom support legs (1), a beam source furnace body (3), a beam source furnace body cover plate (6), filling sand (8), a vacuum heat insulation inner container (10), a heating ring (11), a temperature probe (12), a high temperature resistant ceramic plate (14), an electrode binding post insulating ceramic protective cover (16), a temperature controller (17) and a voltage regulator (18);

wherein, the side surface of the beam source furnace body (3) is provided with an opening, and the opening is provided with a clamping groove (2);

the vacuum heat insulation inner container (10) is embedded in the beam source furnace body (3), the vacuum heat insulation inner container (10) is contacted with the beam source furnace body (3) and is also provided with an opening at the corresponding position;

the high-temperature-resistant ceramic plate (14) is embedded into the clamping groove (2) at the opening of the beam source furnace body, one surface of the high-temperature-resistant ceramic plate is attached with an aerogel heat-insulation composite material, and the other surface of the high-temperature-resistant ceramic plate is cast with an elliptic cylindrical electrode binding post insulating ceramic protective cover (16);

a heating ring (11) and a temperature probe (12) are arranged on the side where the aerogel heat insulation composite material is attached;

the wall top of the beam source furnace body (3) is provided with a threaded hole (4); the beam source furnace body cover plate (6) is arranged at the top of the beam source furnace body (3), the center of the beam source furnace body cover plate (6) is provided with a central through hole, and the edge is provided with a furnace body cover plate fixing through hole (5); the beam source furnace body cover plate is characterized in that a central through hole of the beam source furnace body cover plate is used for placing a crucible (9), the position of a furnace body cover plate fixing through hole (5) corresponds to the position and the size of a threaded hole at the top of a beam source furnace body wall, the furnace body cover plate fixing through hole (5) is used for a screw to pass through, and the beam source furnace body cover plate (6) is fixed to a threaded hole (4) at the top of the beam source furnace body wall;

the rest part in the beam source furnace body is filled with filling sand (8) and supports and fixes the temperature probe (12) and the crucible (9), so that the temperature probe (12) is contacted with the crucible (9);

the beam source furnace body support legs (1), the beam source furnace body (3), the vacuum heat insulation inner container (10), the heating ring (11), the high temperature resistant ceramic plate (14), the electrode binding post insulating ceramic protective cover (16), the filling sand (8), the crucible (9), the temperature probe (12) and the beam source furnace body cover plate (6) are all placed in a vacuum cavity (19) to work;

the temperature controller (17) is arranged outside the vacuum cavity (19), and is connected with a heating ring (11) and a temperature probe (12) in the vacuum cavity by using a lead through an inner terminal and an outer terminal (20) of the vacuum cavity, wherein the terminals corresponding to the heating ring (11) are connected with the voltage regulator (18) through the outer sides of the inner terminal and the outer terminal (20) of the vacuum cavity and then are connected with the temperature controller (17).

2. The movable temperature-controlled sand bath cluster source furnace according to claim 1, characterized in that the beam source furnace body (3) is a cylinder cast from high temperature resistant ceramics.

3. The movable temperature-controlled sand bath beam source furnace as claimed in claim 2, wherein the vacuum heat-insulating inner container (10) is a high-temperature-resistant glass vacuum sealed cavity, the shape of the vacuum heat-insulating inner container is similar to the shape of the upper part of the beam source furnace body support leg (1), the vacuum heat-insulating inner container is provided with an opening but no clamping groove, and the outer diameter of the vacuum heat-insulating inner container is smaller than the inner diameter of the beam source furnace body (3).

4. The movable sand bath cluster source furnace as claimed in claim 1, characterized in that the filling sand (8) is silicon carbide spherical particles with a diameter between 2mm and 3mm which are cleaned after polishing.

5. The movable temperature-controlled sand bath beam source furnace according to any one of claims 1 to 4, characterized in that the beam source furnace body cover plate (6) is made of high-temperature-resistant alloy materials and is respectively two symmetrical semi-cylindrical plates, the total area of the two semi-cylindrical plates is consistent with the top of the beam source furnace body (3), semicircular through holes are formed in the center of the circle, and the diameter of the circular cross section of the combination of the through holes of the two symmetrical semi-cylindrical plates is larger than that of the crucible (9).

6. A method of installing a movable temperature controlled sand bath cluster source furnace, wherein the method of installing the movable temperature controlled sand bath cluster source furnace of claim 5 comprises the steps of:

s1, dipping the dust-free wiping cloth into absolute ethyl alcohol to clean the working parts in the vacuum cavity (19); immersing the filling sand (8) in absolute ethyl alcohol for ultrasonic cleaning, then placing the filling sand in a vessel (7) for containing the filling sand, and then placing the cleaned parts on a workbench in a fume hood;

s2, installing the glass vacuum heat insulation inner container (10) in the beam source furnace body (3), wherein the openings of the glass vacuum heat insulation inner container and the beam source furnace body are overlapped;

s3, fixing the heating ring (11) and the temperature probe (12) on the side, attached with the aerogel heat insulation composite material, of the high-temperature resistant ceramic plate (14) through clamps respectively;

s4, mounting the fixed high-temperature resistant ceramic plate (14) into the clamping groove (2) at the opening of the beam source furnace body,

s5, fixing a beam source furnace body cover plate (6) on the beam source furnace body (3) by using screws,

s6, fixing the empty crucible (9) at the semicircular through hole of the beam source furnace body cover plate (6), adjusting the position of the temperature probe (12) to be close to the crucible (9), scooping out the filling sand (8) to be filled on the glass vacuum heat insulation inner container (10) in the beam source furnace body (3) until the beam source furnace body cover plate (6) is filled and the positions of the temperature probe (12) and the crucible (9) are supported and fixed;

s7, fixing the other beam source furnace body cover plate on the beam source furnace body (3) by using screws;

s8, putting all the components inside the beam source furnace which is assembled into a vacuum cavity (19) together, and connecting the temperature probe (12) and the positive and negative terminals of the heating ring (11) to the inner sides of the internal and external lead terminals (20) of the vacuum cavity through leads;

s9, connecting a binding post corresponding to the temperature probe (12) with a temperature controller (17) through a lead wire outside the inner and outer lead binding posts (20) of the vacuum cavity, connecting a binding post corresponding to the heating ring (11) with a voltage regulator (18) through a lead wire outside the inner and outer lead binding posts (20) of the vacuum cavity, and connecting the temperature controller (17) with a power supply to finish installation.

7. An evaporation coating method, characterized in that the coating is carried out by using the movable temperature-controlled sand bath beam source furnace according to any one of claims 1 to 4, comprising the following steps:

s10, pumping the vacuum cavity (19) to the vacuum degree of 1.5 multiplied by 10^-4The temperature controller (17) is set to be 1200 ℃ at the maximum temperature in the Pa magnitude, the voltage of the voltage regulator (18) is increased to 80% of the rated voltage of the heating ring (11), and when the crucible is used for the first time, no deposition material is added into the crucible (9) in the vacuum cavity (19) for idle burning for 2 hours, and when the crucible is used again, the crucible is idle burned for 30 minutes;

s11, naturally cooling after empty burning, deflating the vacuum cavity (19), taking out the crucible (9), loading the target material medicine subjected to thermal evaporation deposition, setting the maximum temperature of the temperature controller (17) as the evaporation temperature of the medicine, and increasing the voltage of the voltage regulator (18) from zero to drive the heating ring (11) to reach the target temperature to control the evaporation rate of the sample, thereby realizing the evaporation coating of the product to be coated.

Background

In the evaporation coating equipment, a beam source furnace is an important component in the evaporation coating equipment. The temperature is required to be accurately controllable in the working process of the beam source furnace, the distance between the beam source furnace and a sample subjected to thermal vacuum evaporation deposition is required to be adjustable, and impurity gas cannot be generated to pollute a cavity and evaporate the sample. The existing thermal evaporation beam source furnace mostly adopts resistance wires or lamp tubes to heat a crucible, and because the crucible is not contacted, the heat transfer mode between a heat source and the crucible is only thermal radiation, which is not beneficial to accurate temperature control. If the heating wire contacts with the crucible, the heating unevenness may be caused to affect the effective use of the medicine. In addition, in order to improve the integration level, the conventional thermal evaporation beam source furnace generally requires a flange to fix the whole beam source furnace on the vacuum chamber, so that the requirements on the position and the interface of the beam source furnace in the vacuum chamber are strict, and the compatibility and the universality of the beam source furnace in different vacuum chambers are not facilitated.

Disclosure of Invention

In view of the above, the invention provides a movable temperature-controlled sand bath beam source furnace and an installation and coating method thereof, which can enable heat transfer to be faster and temperature control to be more accurate and rapid through filling sand, and are beneficial to use compatibility and universality of different vacuum cavities because the structure is designed to be movable.

In order to achieve the purpose, the technical scheme of the invention is as follows:

the invention discloses a movable temperature-control sand bath beam source furnace, which comprises beam source furnace bottom support legs, a beam source furnace body cover plate, filling sand, a vacuum heat-insulating inner container, a heating ring, a temperature probe, a high-temperature-resistant ceramic plate, an electrode binding post insulating ceramic protective cover, a temperature controller and a voltage regulator, wherein the beam source furnace body is arranged on the bottom of the beam source furnace body;

wherein, the side surface of the beam source furnace body is provided with an opening, and the opening is provided with a clamping groove;

the vacuum heat insulation inner container is embedded in the beam source furnace body, is contacted with the beam source furnace body and is also provided with an opening at the corresponding position;

the high-temperature-resistant ceramic plate is embedded into a clamping groove at the opening of the beam source furnace body, one surface of the high-temperature-resistant ceramic plate is attached with an aerogel heat-insulation composite material, and the other surface of the high-temperature-resistant ceramic plate is cast with an elliptic cylindrical electrode binding post insulating ceramic protective cover;

a heating ring and a temperature probe are arranged on the side where the aerogel heat insulation composite material is attached;

the top of the beam source furnace body wall is provided with a threaded hole; the beam source furnace body cover plate is arranged at the top of the beam source furnace body, the center of the beam source furnace body cover plate is provided with a central through hole, and the edge of the beam source furnace body cover plate is provided with a furnace body cover plate fixing through hole; the device comprises a beam source furnace body cover plate, a furnace body cover plate fixing through hole, a crucible, a beam source furnace body cover plate and a crucible, wherein the central through hole of the beam source furnace body cover plate is used for placing the crucible, the position of the furnace body cover plate fixing through hole corresponds to the position and the size of a threaded hole at the wall top of the beam source furnace body, and the furnace body cover plate fixing through hole is used for a screw to pass through and is used for fixing the beam source furnace body cover plate to the threaded hole at the wall top of the beam source furnace body;

filling the rest part in the beam source furnace body with filling sand, supporting and fixing the temperature probe and the crucible, and enabling the temperature probe to be in contact with the crucible;

the beam source furnace body stand bar, the beam source furnace body, the vacuum heat insulation inner container, the heating ring, the high temperature resistant ceramic plate, the electrode binding post insulating ceramic protective cover, the filling sand, the crucible, the temperature probe and the beam source furnace body cover plate are all placed in the vacuum cavity to work;

the temperature controller is placed outside the vacuum cavity, and the heating ring and the temperature probe in the vacuum cavity are connected through the inner terminal and the outer terminal of the vacuum cavity by using a lead, wherein the terminal corresponding to the heating ring is connected with the voltage regulator through the outer sides of the inner terminal and the outer terminal of the lead of the vacuum cavity and then connected with the temperature controller.

Wherein, the beam source furnace body is a cylinder cast by high-temperature resistant ceramics.

The vacuum heat insulation inner container is a high-temperature-resistant glass vacuum sealed cavity, the shape of the vacuum heat insulation inner container is similar to that of the beam source furnace body above the support legs, the vacuum heat insulation inner container is provided with an opening but no clamping groove, and the outer diameter of the vacuum heat insulation inner container is smaller than the inner diameter of the beam source furnace body.

Wherein the filling sand is silicon carbide spherical particles which are cleaned after polishing treatment and have the diameter of 2mm to 3 mm.

The beam source furnace body cover plate is made of high-temperature-resistant alloy materials and is respectively provided with two symmetrical semi-cylindrical plates, the total area of the beam source furnace body cover plate is consistent with that of the top of the beam source furnace body, semicircular through holes are formed in the circle center positions of the beam source furnace body cover plate and the beam source furnace body cover plate, and the circular diameter of the cross section of the through hole combination of the two symmetrical semi-cylindrical plates is larger than that of the.

The invention also provides an installation method of the movable temperature-control sand bath beam source furnace, which is used for installing the movable temperature-control sand bath beam source furnace and comprises the following steps:

s1, dipping the dust-free wiping cloth into absolute ethyl alcohol to clean the working parts in the vacuum cavity; immersing the filling sand in absolute ethyl alcohol, carrying out ultrasonic cleaning, then placing the filling sand in a vessel for containing the filling sand, and then placing the cleaned parts on a workbench in a fume hood;

s2, mounting the glass vacuum heat-insulating inner container in a beam source furnace body, wherein the openings of the glass vacuum heat-insulating inner container and the beam source furnace body are overlapped;

s3, fixing the heating ring and the temperature probe on the side of the high-temperature-resistant ceramic plate, which is attached with the aerogel heat-insulation composite material, through a clamp respectively;

s4, mounting the fixed high-temperature resistant ceramic plate into a clamping groove at the opening of the beam source furnace body,

s5, fixing a beam source furnace body cover plate on the beam source furnace body by screws,

s6, fixing the empty crucible to the semicircular through hole of the beam source furnace body cover plate, adjusting the position of the temperature probe to be close to the crucible, scooping out the filled sand and filling the sand on the glass vacuum heat insulation inner container in the beam source furnace body until the beam source furnace body cover plate is filled with the filled sand and the positions of the temperature probe and the crucible are supported and fixed;

s7, fixing the other beam source furnace body cover plate on the beam source furnace body by using screws;

s8, putting all the components inside the beam source furnace which is assembled into a vacuum cavity together, and connecting the temperature probe and the positive and negative wiring terminals of the heating ring to the inner sides of the internal and external wiring terminals of the vacuum cavity through leads;

s9, connecting the binding post corresponding to the temperature probe with a temperature controller through a wire outside the inner and outer lead binding posts of the vacuum cavity, connecting the binding post corresponding to the heating ring with a voltage regulator through a wire outside the inner and outer lead binding posts of the vacuum cavity, connecting the temperature controller with the temperature controller, and connecting the temperature controller with a power supply to finish installation.

The invention also provides an evaporation coating method, which is used for coating by using the movable temperature-control sand bath beam source furnace and comprises the following steps:

s10, pumping the vacuum cavity to the vacuum degree of 1.5 multiplied by 10^-4The temperature controller is set to be 1200 ℃ at the maximum temperature in the magnitude of Pa, the voltage of the voltage regulator is increased to 80% of the rated voltage of the heating ring, and when the vacuum crucible is used for the first time, no deposition material is added into the crucible in the vacuum cavity and the vacuum crucible is used for empty burning for 2 hours and 30 minutes when the vacuum crucible is used again;

s11, naturally cooling after empty burning, taking out the crucible after air is discharged from the vacuum cavity, loading target material drugs for thermal evaporation deposition, setting the maximum temperature of the temperature controller to be the evaporation temperature of the drugs, and increasing the voltage of the voltage regulator from zero to drive the heating ring to reach the target temperature to control the evaporation rate of the sample so as to realize the evaporation coating of the product to be coated.

Has the advantages that:

the movable temperature-control sand bath beam source furnace realizes heating in a sand bath heating mode by filling sand, so that a heat transfer mode is changed from single heat radiation transfer into two heat transfer modes of heat conduction and heat radiation, the heat transfer is faster, and the temperature control is more accurate and faster; meanwhile, the movable temperature-controlled sand bath beam source furnace has the advantages of simple structure and mobility, is favorable for adjusting the position of the beam source furnace in the vacuum evaporation cavity and the position relative to a sample, and is also favorable for wide compatibility of the beam source furnace to vacuum evaporation cavities with different structures.

The movable temperature-controlled sand bath beam source furnace can accurately and rapidly control the temperature of the beam source furnace, so that the rate of thermal evaporation and deposition can be accurately controlled to influence the film forming quality, and the evaporation temperature can reach 1200 ℃.

The mounting method of the movable temperature-controlled sand bath beam source furnace is simple, convenient and fast, and high in mounting efficiency.

The film coating method adopts the movable temperature-controlled sand bath beam source furnace, the temperature of the beam source furnace can be accurately and rapidly controlled in the film coating process, so that the rate of thermal evaporation and deposition can be accurately controlled to influence the film forming quality, the evaporation temperature can reach the high temperature of 1200 ℃, and the rapid and good film coating can be realized.

Drawings

FIG. 1 is a schematic diagram of the components of an embodiment of the present application.

3 fig. 3 2 3 is 3 a 3 cross 3- 3 sectional 3 view 3 a 3- 3 a 3 of 3 fig. 3 1 3 in 3 accordance 3 with 3 an 3 embodiment 3 of 3 the 3 present 3 application 3. 3

Fig. 3 is a schematic view of the assembly process of the working parts in the vacuum chamber according to the present application.

FIG. 4 is a schematic view of the present application after the vacuum chamber inner workings have been assembled.

Fig. 5 is a schematic view of the connection of the inner and outer parts of the vacuum chamber of the present application.

Fig. 6 is a schematic diagram of temperature control according to the present application.

The device comprises a beam source furnace body, a beam source furnace body, a beam source.

Detailed Description

The invention is described in detail below by way of example with reference to the accompanying drawings.

The invention provides a movable temperature-controlled sand bath beam source furnace, which comprises beam source furnace bottom support legs 1, a beam source furnace body 3, a beam source furnace body cover plate 6, a vessel 7 for containing filled sand, filled sand 8, a crucible 9, a vacuum heat-insulating inner container 10, a heating ring 11, a temperature probe 12, a high-temperature-resistant ceramic plate 14, an electrode binding post insulating ceramic protective cover 16, a temperature controller 17 and a voltage regulator 18.

Wherein, the number of the beam source furnace bottom support feet 1 is 3, and 3 beam source furnace body support feet are distributed at the bottom of the beam source furnace body 3 in a triangular mode.

In this embodiment, the beam source furnace body 3 is a cylinder cast by high temperature resistant ceramics. The side surface of the beam source furnace body 3 is provided with an opening, and the opening is provided with a clamping groove 2.

The vacuum heat insulation inner container 10 is embedded in the beam source furnace body 3, the vacuum heat insulation inner container 10 is contacted with the beam source furnace body 3, and the corresponding position is also provided with an opening. The vacuum heat insulation inner container 10 is a high temperature resistant glass vacuum seal cavity, the shape of the vacuum heat insulation inner container is similar to the part above the beam source furnace body support leg 1, the vacuum heat insulation inner container is provided with an opening but no clamping groove, and the outer diameter of the vacuum heat insulation inner container is slightly smaller than the inner diameter of the beam source furnace body 3.

The high-temperature-resistant ceramic plate 14 can be embedded into the neck 2 at the opening of the beam source furnace body, one surface is attached with aerogel heat-insulating composite material, the side is defined as the inner side relative to the beam source furnace body, the heating ring 11 and the temperature probe 12 can be installed at the inner side, the other surface is cast with an elliptic cylindrical electrode terminal insulating ceramic protective cover 16, and the side is defined as the outer side relative to the beam source furnace body 3. The inner side of the high-temperature resistant ceramic plate 14 is provided with a temperature probe mounting hole 13 and a heating ring wiring column hole 15. Specifically, the heating ring 11 is a ring-shaped silicon carbide heating rod, and the ring-shaped silicon carbide heating rod is fixed to a heating ring terminal post hole 15 inside the high-temperature-resistant ceramic plate 14 by a fixture. The temperature probe 12 is fixed to a temperature probe mounting hole 13 inside a high temperature resistant ceramic plate 14 by a jig.

The temperature probe 12 and the positive and negative terminals of the heating ring 11 are connected to the inner sides of the inner and outer lead terminals 20 of the vacuum chamber through wires. The temperature controller 17 is connected with the heating ring 11 and the temperature probe 12 through the inner and outer binding posts 20 of the vacuum cavity by leads. Specifically, the binding post corresponding to the temperature probe 12 is connected with the temperature controller 17 through the outer sides of the inner and outer lead binding posts 20 of the vacuum cavity, the binding post corresponding to the heating ring 11 is connected with the voltage regulator 18 through the outer sides of the inner and outer lead binding posts 20 of the vacuum cavity and then connected with the temperature controller 17, and the temperature controller 17 is powered on.

The wall top of the beam source furnace body 3 is provided with threaded holes 4, in the embodiment, the threaded holes 4 are 6 symmetrically distributed threaded holes of M2; the beam source furnace body cover plate 6 is arranged at the top of the beam source furnace body 3, the center of the beam source furnace body cover plate 6 is provided with a central through hole, the edge is provided with furnace body cover plate fixing through holes 5, the furnace body cover plate fixing through holes 5 are M2 through holes in the embodiment, and the number is 6. A through hole in the center of the beam source furnace body cover plate is used for placing a crucible 9, and the crucible 9 is a transparent high-purity quartz crucible; the furnace cover fixing through holes 5 at the edge of the beam source furnace cover 6 are used for passing through screws, in the embodiment, the beam source furnace cover 6 is fixed at the M2 threaded hole at the wall top of the beam source furnace through 6M 2 multiplied by 10mm screws passing through the M2 through holes at the edge. Specifically, the beam source furnace body cover plate 6 is made of high-temperature-resistant alloy materials and is respectively two symmetrical semi-cylindrical plates, the total area of the beam source furnace body cover plate is consistent with that of the top of the beam source furnace body 3, semicircular through holes are formed in the circle center positions, the circular diameter of the cross section of the through hole combination of the two symmetrical semi-cylindrical plates is slightly larger than that of the crucible 9, and the position of the furnace body cover plate fixing through hole 5 corresponds to the position and the size of a threaded hole in the wall top of the beam source furnace body.

The rest part in the furnace body of the beam source is filled with filling sand 8 and supports and fixes the temperature probe 12 and the crucible 9, and the temperature probe 12 is contacted with the crucible 9. The filling sand 8 is silicon carbide spherical particles which are cleaned after polishing treatment and have the diameter of 2mm to 3 mm.

When the whole set of equipment normally works, the beam source furnace body support legs 1, the beam source furnace body 3, the vacuum heat insulation inner container 10, the heating ring 11, the high-temperature resistant ceramic plate 14, the electrode wiring terminal insulating ceramic protective cover 16, the filling sand 8, the crucible 9, the temperature probe 12 and the beam source furnace body cover plate 6 are all placed in the vacuum cavity 19 for working. The temperature controller 17 is arranged at a proper position outside the vacuum cavity 19, a lead is connected with the heating ring 11 and the temperature probe 12 in the vacuum cavity through the inner and outer binding posts 20 of the vacuum cavity, and the vessel 7 for filling sand is arranged at a proper position outside the vacuum cavity. The vessel 7 for containing the filling sand 8 is a plastic container, and the capacity is larger than that of the beam source furnace body 3.

The invention also provides an installation method of the movable temperature-controlled sand bath beam source furnace, which comprises the following steps:

s1, dipping the dust-free wiping cloth into absolute ethyl alcohol to clean the working parts in the vacuum cavity 19; soaking the filling sand 8 in a big beaker filled with clean absolute ethyl alcohol, carrying out ultrasonic cleaning for 3 times in batch, then loading the cleaned filling sand in a clean vessel 7 filled with the filling sand, and then placing the cleaned parts on a clean workbench in a fume hood;

s2, installing the glass vacuum heat insulation liner 10 in the beam source furnace body 3, wherein the openings of the glass vacuum heat insulation liner and the beam source furnace body are overlapped;

s3, fixing the heating ring 11 and the temperature probe 12 on the inner side of the high-temperature-resistant ceramic plate 14 through fixtures respectively;

s4, mounting the fixed high-temperature-resistant ceramic plate 14 into the neck 2 at the opening of the beam source furnace body,

s5, fixing a beam source furnace body cover plate 6 on the beam source furnace body 3 by using 3M 2 multiplied by 10mm screws,

s6, clamping and fixing the empty crucible 9 to a semicircular through hole of the beam source furnace body cover plate 6 by using clean tweezers, adjusting the position of the temperature probe 12 to be close to the crucible 9, scooping the filling sand 8 out by using a clean spoon and filling the filling sand on the glass vacuum heat insulation inner container 10 in the beam source furnace body 3 until the beam source furnace body cover plate 6 is filled with the filling sand and the positions of the temperature probe 12 and the crucible 9 are supported and fixed;

s7, fixing the other beam source furnace body cover plate 6 on the beam source furnace body 3 by using 3M 2 multiplied by 10mm screws;

s8, putting all the components inside the beam source furnace which is assembled together into a proper position in the vacuum cavity 19, and connecting the temperature probe 12 and the positive and negative terminals of the heating ring 11 to the inner sides of the internal and external lead terminals 20 of the vacuum cavity through leads;

s9, connecting the binding post corresponding to the temperature probe 12 with the temperature controller 17 through the outer sides of the inner and outer lead binding posts 20 of the vacuum cavity, connecting the binding post corresponding to the heating ring 11 with the voltage regulator 18 through the outer sides of the inner and outer lead binding posts 20 of the vacuum cavity, connecting the binding post with the temperature controller 17 through a wire, and connecting the temperature controller 17 with a power supply to finish installation.

The invention also provides an evaporation coating method, and the movable temperature-controlled sand bath beam source furnace comprises the following steps:

s10, pumping the vacuum chamber 19 to a higher vacuum degree of 1.5 multiplied by 10^-4Pa, the maximum temperature of the temperature controller 17 is 1200 ℃, the voltage of the voltage regulator 18 is increased to 80 percent of the rated voltage of the heating ring 11, and the temperature controller is firstly enabled to be at the maximum temperatureWhen the crucible is used, the deposition material is not added into the crucible 9 in the vacuum cavity 19, and the crucible is subjected to idle burning for 2 hours, and only needs to be subjected to idle burning for 30 minutes when the crucible is used again.

S11, naturally cooling after empty burning, deflating the vacuum cavity 19, taking out the crucible 9 by using clean tweezers, filling a proper amount of target material medicine subjected to thermal evaporation deposition, wherein the filling amount of the medicine does not exceed 2/3 of the volume of the crucible 9, setting the maximum temperature of the temperature control instrument 17 as the evaporation temperature of the medicine, and slowly increasing the voltage of the voltage regulator 18 from zero to drive the heating ring 11 to reach the target temperature to control the evaporation rate of the sample, thereby realizing the evaporation coating of the product to be coated.

In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.