1. The vacuum suspension coating equipment is characterized by comprising an outer shell (1), an inner shell (2) arranged in the outer shell (1) and a workpiece carrier (3) placed in the inner shell (2), wherein an air exhaust interface (4) connected with an air exhaust system is arranged at the closed end of the inner shell (2), an opening for the workpiece carrier (3) to pass in and out is formed in the open end of the inner shell (2), a sealing door (5) is arranged at the open end of the outer shell (1), a cover plate (6) is arranged on the inner side of the sealing door (5), a flow equalizing plate assembly (7) is arranged on the inner side of the cover plate (6), the opening is sealed by the cover plate (6) when the sealing door (5) is closed, the flow equalizing plate assembly (7) extends into the inner shell (2) from the opening, and a space interval is formed between the cover plate (6) and the flow equalizing plate assembly (7), the flow homogenizing plate assembly (7) is provided with air holes for communicating the space interval with the inner space of the inner shell (2), and further comprises a plurality of types of source bottles (8), wherein the source bottles are communicated with the space interval through a plurality of process gas channels (9) and are used for conveying a plurality of types of gases to the space interval.

2. The vacuum suspension plating apparatus according to claim 1, wherein the flow distribution plate assembly (7) comprises a first flow distribution plate (71), a second flow distribution plate (72) and a third flow distribution plate (73) which are sequentially arranged at intervals along the horizontal direction, and the first flow distribution plate (71) and the cover plate (6) form the space interval.

3. The vacuum suspension plating apparatus according to claim 2, wherein the first flow distribution plate (71) is provided with a plurality of circular holes arranged in an array, the second flow distribution plate (72) is provided with a plurality of horizontal long holes arranged in an array, the horizontal long holes extend in a horizontal direction, and the third flow distribution plate (73) is provided with a plurality of vertical long holes arranged in an array, the vertical long holes extend in a vertical direction.

4. The vacuum suspension plating apparatus according to claim 3, wherein the circular holes have the same diameter, the elongated holes have the same width, and the elongated holes in the middle have a width smaller than the elongated holes in the upper and lower sides.

5. The vacuum suspension plating equipment according to claim 4, characterized in that the first flow equalizing plate (71), the second flow equalizing plate (72) and the third flow equalizing plate (73) are provided with connecting holes at corresponding positions, and the cover plate (6) is connected through a connecting rod (74) which penetrates horizontally.

6. The vacuum suspension plating equipment according to claim 1, characterized in that the sealing door (5) is connected with the cover plate (6) through a support column (10), a spring for pressing the cover plate (6) is installed on the support column (10), and a double-layer heat insulation plate (11) is arranged between the sealing door (5) and the cover plate (6).

7. The vacuum suspension plating apparatus according to claim 1, characterized in that the outer shell (1) is a cylindrical sleeve, the inner shell (2) is a square sleeve, the closed end of the inner shell (2) is a conical structure, and the tip of the conical structure is the air suction port (4).

8. The vacuum suspension plating equipment according to claim 1, characterized in that four pipe joints (12) are uniformly arranged on the peripheral edge of the open end of the inner shell (2), and the pipe joints (12) are connected with the process gas channel (9).

9. The vacuum suspension plating equipment according to any one of claims 1 to 8, characterized in that a flange plate (13) is connected to the closed end of the shell (1), and a through hole through which the air suction port (4) passes is arranged in the middle of the flange plate (13).

10. The vacuum suspension plating apparatus according to claim 9, wherein a plurality of inner heaters (14) surrounding the inner casing (2) are provided in the outer casing (1), ends of the inner heaters (14) are connected to the inside of the flange plate (13), and an outer heater (15) is installed outside the flange plate (13).

Background

ALD coating equipment in the market at present mainly aims at crystalline silicon chips, and is used for manufacturing nano laminated and composite materials of Al203, SiNX and the like by using Atomic Layer Deposition (ALD) and plasma atomic layer deposition (PEALD), and passivation layer coating treatment is simultaneously carried out on the front side and the back side of the crystalline silicon, so that the service life of the crystalline silicon is prolonged.

However, the working target of the method is mainly directed at the coating of the crystal silicon wafer, so that the size of the sealed process cavity is small, the workpiece with a large size cannot be coated, and the MO source is easy to condense, thereby affecting the coating effect.

Therefore, how to provide a vacuum suspension coating device suitable for more situation demands is a technical problem to be solved by those skilled in the art.

Disclosure of Invention

The invention aims to provide vacuum suspension coating equipment which is large in size, is suitable for vacuum coating of various parts, can be used for manufacturing films of different materials, and has a special net-shaped crossed design of flow equalizing plates, so that a flow passage is shortened, and condensation of an MO source can be effectively prevented.

In order to solve the technical problems, the invention provides vacuum suspension coating equipment, which comprises an outer shell, an inner shell arranged in the outer shell and a workpiece carrier arranged in the inner shell, wherein the closed end of the inner shell is provided with an air exhaust interface connected with an air exhaust system, the open end of the inner shell is provided with an opening for the workpiece carrier to pass in and out, the open end of the outer shell is provided with a sealing door, the inner side of the sealing door is provided with a cover plate, the inner side of the cover plate is provided with a flow equalizing plate assembly, when the sealing door is closed, the cover plate seals the opening, the flow equalizing plate assembly extends into the inner shell from the opening, a space interval is arranged between the cover plate and the flow equalizing plate assembly, the flow equalizing plate assembly is provided with air holes communicating the space interval and the inner space of the inner shell, the vacuum suspension coating equipment also comprises various types of source bottles, the space interval is communicated through a plurality of process gas channels, for delivering a plurality of types of gas to the spaced apart space.

Preferably, the flow equalizing plate assembly comprises a first flow equalizing plate, a second flow equalizing plate and a third flow equalizing plate which are sequentially arranged at intervals along the horizontal direction, and the first flow equalizing plate and the cover plate form the space interval.

Preferably, a plurality of round holes are arranged in an array on the first flow equalizing plate, a plurality of transverse long holes are arranged in an array on the second flow equalizing plate, the transverse long holes extend in the horizontal direction, a plurality of longitudinal long holes are arranged in an array on the third flow equalizing plate, and the longitudinal long holes extend in the vertical direction.

Preferably, the diameters of the round holes are equal, the widths of the longitudinal holes are equal, and the width of the transverse long hole in the middle is smaller than the widths of the transverse long holes in the upper and lower sides.

Preferably, the first flow equalizing plate, the second flow equalizing plate and the third flow equalizing plate are provided with connecting holes at corresponding positions, and the cover plate is connected through a connecting rod which penetrates horizontally.

Preferably, the sealing door is connected with the cover plate through a support column, a spring used for pressing the cover plate is installed on the support column, and a double-layer heat insulation plate is arranged between the sealing door and the cover plate.

Preferably, the outer shell is a cylindrical sleeve, the inner shell is a square sleeve, the closed end of the inner shell is a conical structure, and the tip of the conical structure is the air suction port.

Preferably, four pipeline interfaces are uniformly arranged on the peripheral edge of the open end of the inner shell and are connected with the process gas channel.

Preferably, the closed end of the shell is connected with a flange plate, and the middle part of the flange plate is provided with a through hole through which the air suction interface passes.

Preferably, a plurality of inner heaters surrounding the inner shell are arranged in the outer shell, the end parts of the inner heaters are connected with the inner side of the flange plate, and the outer heater is arranged on the outer side of the flange plate.

The invention provides vacuum suspension coating equipment which comprises an outer shell, an inner shell arranged in the outer shell and a workpiece carrier arranged in the inner shell, wherein the closed end of the inner shell is provided with an air exhaust interface connected with an air exhaust system, the open end of the inner shell is provided with an opening used for the workpiece carrier to enter and exit, the open end of the outer shell is provided with a sealing door, the inner side of the sealing door is provided with a cover plate, the inner side of the cover plate is provided with a flow equalizing plate assembly, the cover plate seals the opening when the sealing door is closed, the flow equalizing plate assembly extends into the inner shell from the opening, a space interval is arranged between the cover plate and the flow equalizing plate assembly, the flow equalizing plate assembly is provided with air holes communicated with the space interval and the inner space of the inner shell, and the vacuum suspension coating equipment also comprises various types of source bottles, the space interval is communicated through a plurality of process gas channels, and the various types of gas are conveyed to the space interval.

In the working process, a workpiece to be coated is placed on the workpiece carrier, the workpiece carrier is placed into the inner shell from the opening of the inner shell, the sealing door is closed, the cover plate is made to seal the opening of the inner shell, the air exhaust system is started to form a vacuum process environment, the flow equalizing plate assembly extends into the inner shell, process gas is conveyed to a space interval from the source bottle through the process gas channel and then enters the inner space of the inner shell through the flow equalizing plate assembly, the process gas is guaranteed to uniformly flow on the surface of the workpiece, and then a uniform film coating is formed on the surface of the workpiece after reaction.

The uniform flow plate assembly replaces the traditional spray plate structure, so that the process gas components flow more uniformly, the flow channel inside the cavity is short, the MO source can be effectively prevented from being condensed, the size of the process cavity which can be used by the equipment is larger, the coating film can be performed on various workpieces such as large-size plates and pipeline parts, and the reliability and the applicability of the equipment are improved. Meanwhile, various types of gas can be conveyed to the inside of the inner shell, various combination ratios are realized, and the applicability is further improved.

Drawings

FIG. 1 is a schematic front view of a vacuum suspension coating apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic side view of one embodiment of a vacuum suspension coating apparatus provided in the present invention;

FIG. 3 is a partially enlarged view of a pipe joint in an embodiment of the vacuum suspension coating apparatus provided in the present invention;

FIG. 4 is a partially enlarged view of a flow equalizing plate assembly in an embodiment of the vacuum suspension coating apparatus of the present invention;

FIG. 5 is a schematic structural diagram of a first flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention;

FIG. 6 is a schematic structural view of a second flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention;

FIG. 7 is a schematic structural view of a third flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention;

FIG. 8 is a schematic connection diagram of a source bottle in an embodiment of the vacuum suspension coating apparatus provided in the present invention;

FIG. 9 is a side view of the source bottle in one embodiment of the vacuum suspension coating apparatus of the present invention.

The device comprises a shell 1, an outer shell 2, an inner shell 3, a workpiece carrier 4, an air suction interface 5, a sealing door 6, a cover plate 7, a flow equalizing plate assembly 71, a first flow equalizing plate 72, a second flow equalizing plate 73, a third flow equalizing plate 74, a connecting rod 8, a source bottle 9, a process gas channel 10, a supporting column 11, a heat insulation plate 12, a pipeline interface 13, a flange plate 14, an inner heater 15 and an outer heater.

Detailed Description

The core of the invention is to provide a vacuum suspension coating device, which is suitable for vacuum coating of various parts and can manufacture films of different materials, and the special net-shaped cross design of the uniform flow plate shortens the flow passage and effectively prevents the condensation of an MO source.

In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1 to 3, fig. 1 is a schematic front view of a vacuum suspension coating apparatus according to an embodiment of the present invention; FIG. 2 is a schematic side view of one embodiment of a vacuum suspension coating apparatus provided in the present invention; fig. 3 is a partially enlarged view of a pipe joint in an embodiment of the vacuum suspension plating apparatus provided in the present invention.

The invention provides vacuum suspension coating equipment, which comprises an outer shell 1, an inner shell 2 and a workpiece carrier 3, wherein the inner shell 2 is arranged inside the outer shell 1, the workpiece carrier 3 is placed inside the inner shell 2, the outer shell 1 and the inner shell 2 are horizontally placed, one end of the outer shell is a closed end, and the other end of the outer shell is an open end. The closed end of the inner shell 2 is provided with an air exhaust interface 4 connected with an air exhaust system, the open end of the inner shell 2 is provided with an opening for the inlet and outlet of a workpiece carrier 3, the closed end of the outer shell 1 is also closed, the open end of the outer shell 1 is provided with a sealing door 5 capable of being opened and closed, a cover plate 6 is installed on the inner side of the sealing door 5, a flow equalizing plate assembly 7 is installed on the inner side of the cover plate 6, the outer shell 1 can be closed when the sealing door 5 is closed, meanwhile, the cover plate 6 seals the opening of the inner shell 2, and meanwhile, the flow equalizing plate assembly 7 extends into the inner shell 2 from the opening.

A space interval is arranged between the cover plate 6 and the flow equalizing plate assembly 7, air holes are arranged on the flow equalizing plate assembly 7 and are communicated with the space interval and the inner space of the inner shell 2, and meanwhile, a plurality of types of source bottles 8 are arranged and are communicated with the space interval through a plurality of process gas channels 9 and are used for conveying a plurality of types of gases to the space interval.

In the course of the work, sealing door 5 is the open mode initially, the work piece that will treat the coating film is placed on work piece carrier 3, put work piece carrier 3 into inner shell 2 inside by the opening of inner shell 2, close sealing door 5, and then make apron 6 seal the opening of inner shell 2, air exhaust system starts, the vacuum pump work, make the inner space of inner shell 2 form vacuum process environment, and flow equalizing plate assembly 7 stretches into inner shell 2, process gas is carried to the space interval through process gas passageway 9 by each source bottle 8, then the gas pocket through flow equalizing plate assembly 7 gets into the inner space of inner shell 2, realize gaseous water conservancy diversion, guarantee process gas evenly flows across the work piece surface, then form even film coating on the work piece surface after the reaction.

Further, the sealing door 5 is connected with the cover plate 6 through a plurality of horizontal support columns 10, and springs used for pressing the cover plate 6 are installed on the support columns 10, so that the cover plate 6 is pressed through the springs after the sealing door 5 is closed, and the sealing effect is guaranteed. Still can set up the support at inner shell 2 downside to stably support inner shell 2, stably place at shell 1, the 2 downside of shell sets up the support simultaneously. A double-layer heat insulation plate 11 is arranged between the sealing door 5 and the cover plate 6, so that the heat insulation effect is improved.

The outer shell 1 and the inner shell 2 may be in various shapes and structures, for example, the outer shell 1 is a cylindrical sleeve, the inner shell 2 is a square sleeve with a smaller size, the closed end of the inner shell 2 is a conical structure, the tip of the conical structure is the air suction port 4, or a shell with other structures is adopted, and it is within the protection scope of the present invention.

The uniform flow plate assembly 7 is used for replacing the traditional spray plate structure, so that the process gas components flow more uniformly, the flow channel inside the cavity is short, the MO source can be effectively prevented from being condensed, the size of the process cavity which can be used by the equipment is larger, the coating film can be performed on various workpieces such as large-size plates and pipeline parts, and the reliability and the applicability of the equipment are improved. Utilize multiple source bottle 8 simultaneously, can realize multiple combination ratio with inside multiple type gas transportation to inner shell 2, realize the multilayer coating, further promote the suitability.

Referring to fig. 4 to 7, fig. 4 is a partially enlarged view of a flow equalizing plate assembly in an embodiment of a vacuum suspension coating apparatus according to the present invention; FIG. 5 is a schematic structural diagram of a first flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention; FIG. 6 is a schematic structural view of a second flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention; fig. 7 is a schematic structural view of a third flow equalizing plate in an embodiment of the vacuum suspension plating apparatus provided in the present invention.

In the vacuum suspension coating apparatus provided by the embodiment of the invention, the flow distribution plate assembly 7 comprises a first flow distribution plate 71, a second flow distribution plate 72 and a third flow distribution plate 73 which are sequentially arranged at intervals along the horizontal direction, and the first flow distribution plate 71 is close to the cover plate 6 and forms a space interval with the cover plate 6.

Specifically, a plurality of circular holes arranged in an array are provided on the first flow equalizing plate 71, a plurality of transverse long holes arranged in an array are provided on the second flow equalizing plate 72, the transverse long holes extend in the horizontal direction, and a plurality of longitudinal long holes arranged in an array are provided on the third flow equalizing plate 73, and the longitudinal long holes extend in the vertical direction. Preferably, the diameters of the round holes are equal, the widths of the longitudinal holes are equal, and the width of the transverse long hole in the middle is smaller than the width of the transverse long holes in the upper and lower sides. Through the air holes which are arranged in a staggered mode, the best uniform flow effect is achieved, or the arrangement mode of the holes is adjusted according to the situation.

Further, in order to stably connect the flow equalizing plates, the first flow equalizing plate 71, the second flow equalizing plate 72, and the third flow equalizing plate 73 are provided with connecting holes at corresponding positions, and are connected to the cover plate 6 by a connecting rod 74 that horizontally penetrates.

Referring to fig. 8 and 9, fig. 8 is a schematic connection diagram of a source bottle in an embodiment of a vacuum suspension coating apparatus provided in the present invention; FIG. 9 is a side view of the source bottle in one embodiment of the vacuum suspension coating apparatus of the present invention.

The peripheral edge of the open end of the inner shell 2 is uniformly provided with four pipeline interfaces 12 which are respectively arranged at the upper side, the lower side, the left side and the right side, and then the pipeline interfaces 12 are connected with the process gas channel 9. Namely, the four source bottles 8 communicate with four cavity passages a1, a2, A3 and a4, which are arranged in four directions as shown in the drawing. At the same time, the source bottle 8 and the process gas channel 9 are heated to the required temperature.

On the basis of the vacuum suspension coating equipment provided by each embodiment, the periphery of the closed end of the shell 1 is provided with a flange platform which is connected with a flange plate 13 through a bolt, and the middle part of the flange plate 13 is provided with a through hole through which the air suction port 4 penetrates.

Further, a plurality of inner heaters 14 are arranged in the outer shell 1, the inner heaters 14 are arranged around the periphery of the inner shell 2, the inner heaters 14 extend horizontally, the end portions of the inner heaters 14 are connected with the inner side of the flange plate 13 and can be connected through bolts or in other connection modes, specifically, the four inner heaters 14 are plate-shaped and surround the periphery of the square sleeve, and the inner heaters 14 are parallel to the outer wall of the inner shell 2. Meanwhile, an external heater 15 is installed outside the flange plate 13 to heat the gas inside the inner shell 2 together.

The vacuum suspension coating equipment provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.