1. A mask assembly, comprising:

a mask frame; and

a mask mesh connected to the mask frame by a plurality of connection points;

wherein the mask web comprises:

the screen surface body is provided with an evaporation area positioned in the center of the screen surface body and a connecting area arranged around the evaporation area, and the screen surface body is connected with the mask frame through the connecting area;

and the blocking parts are positioned in the connecting area, are arranged on one side of the net surface body at intervals and are provided with blocking grooves for accommodating the connecting points.

2. A mask assembly according to claim 1 wherein the orthographic projection of the barrier on the mesh face body is a closed figure surrounding the attachment point.

3. A mask assembly according to claim 1, wherein the barrier portion comprises at least one retaining wall protruding from one side of the mesh surface body;

the retaining wall positioned at the innermost side defines the boundary of the blocking groove.

4. A mask assembly according to claim 3, wherein the barrier portion includes a plurality of retaining walls.

5. A mask assembly according to claim 4, wherein a plurality of said retaining walls are coaxially disposed at a spacing from each other around said connection point.

6. A mask assembly according to claim 3, wherein the orthographic projection of the retaining wall on the mesh surface body has a smooth transition between the inner contour and the outer contour.

7. A mask assembly according to claim 3, wherein the retaining wall is arched in a cross section perpendicular to the circumferential extension direction thereof.

8. A mask assembly according to claim 3, wherein the height of the retaining wall protruding from the mesh surface body is 0.11mm to 0.115 mm.

9. A mask assembly according to claim 1, wherein the connecting region includes a non-thinned region and a thinned region disposed around the non-thinned region;

in the laminating direction of the mask frame and the mask net piece, the thickness of the thinning area is smaller than that of the non-thinning area, and the blocking portion is located in the thinning area.

10. A manufacturing method of a mask assembly is characterized by comprising the following steps:

providing a mask mesh surface and a mask frame; the mask mesh surface comprises a mesh surface body and a plurality of blocking parts, and the blocking parts are provided with blocking grooves;

tensioning the mask mesh surface on the mask frame;

connecting the mask mesh surface with the mask frame; wherein the connection point formed by the connection is positioned in the blocking groove.

Background

Organic Light-Emitting diodes (OLEDs), also known as Organic electroluminescent displays or Organic Light-Emitting semiconductors, are widely used in the fields of mobile phones, watches, televisions, computers, vehicle-mounted displays, etc. because OLEDs have many characteristics of low driving voltage, active Light emission, wide viewing angle, high efficiency, fast response speed, easy realization of full-color large-area wall-mounted displays, flexible displays, etc., they gradually replace Liquid Crystal Displays (LCDs).

In the OLED manufacturing technology, a mask plate is one of the most important components used in the vacuum evaporation technology to control the position of organic materials or metals deposited on an OLED substrate, so as to form patterns of different shapes on the OLED substrate.

In order to recycle the mask, ultrasonic cleaning needs to be performed on the used mask, but it is found that in the process of cleaning the mask, the connection point at the edge of the mask is often broken, and the crack extends outwards to other areas, so that the mask cannot be fully utilized, the waste of resources is increased, and the production cost of the display panel is increased.

Disclosure of Invention

Accordingly, there is a need for a mask assembly and a method for manufacturing the same, which can effectively prevent the mask assembly from being broken during the cleaning process.

According to an aspect of the present application, there is provided a mask assembly, including:

a mask frame; and

a mask mesh connected to the mask frame by a plurality of connection points;

wherein the mask web comprises:

the screen surface body is provided with an evaporation area positioned in the center of the screen surface body and a connecting area arranged around the evaporation area, and the screen surface body is connected with the mask frame through the connecting area;

and the blocking parts are positioned in the connecting area, are arranged on one side of the net surface body at intervals and are provided with blocking grooves for accommodating the connecting points.

So, the tie point of connecting wire side body and mask frame is located the barrier groove that the barrier part formed, the barrier part of laying the wire side body is showing and has increased the lifting surface area around the tie point to reduce the pulling force value that unit area received, and then increased the climbing degree of difficulty of the crackle that the tie point department produced, effectively blocked the crackle and extended along the direction of keeping away from the tie point, finally effectively prevent the mask wire side fracture in the cleaning process, prolonged the life of mask subassembly.

In one embodiment, the orthographic projection of the blocking portion on the mesh-side body is a closed figure surrounding the connection point.

Therefore, the crack generated at the welding spot can be prevented from extending towards any direction, and a good anti-fracture effect is achieved.

In one embodiment, the blocking part comprises at least one retaining wall which is convexly arranged on one side of the net surface body;

the retaining wall positioned at the innermost side defines the boundary of the blocking groove.

So, the stress area around the tie point has been showing to set up of barricade has increased, has increased the climbing degree of difficulty of crackle, has effectively blockked the crackle and has outwards extended from the welding point, has played better fracture-preventing effect.

In one embodiment, the blocking portion includes a plurality of retaining walls.

The climbing difficulty of cracks is further increased by the arrangement of the retaining walls.

In one embodiment, a plurality of the retaining walls are coaxially arranged around the welding point at intervals.

So, the climbing degree of difficulty of crackle has further been increased in the setting of the barricade of a plurality of coaxial settings, has blockked the outside extension of crackle autogenous welding point more effectively, has played better fracture-proof effect.

In one embodiment, the orthographic projection of the retaining wall on the net surface body has smooth transition between the inner contour and the outer contour.

Therefore, no sharp corner exists in the retaining wall in the circumferential extension direction, and the stress concentration phenomenon generated at the corner is avoided.

In one embodiment, the cross section of the retaining wall perpendicular to the circumferential extension direction of the retaining wall is arched.

Therefore, the retaining wall can be firmly connected with the net surface body and is not easy to damage.

In one embodiment, the height of the retaining wall protruding from the net surface body is 0.11mm to 0.115 mm.

Therefore, the retaining wall can effectively prevent crack propagation and cannot interfere with the evaporation structure to influence the evaporation effect.

In one embodiment, the connecting region comprises a non-thinned region and a thinned region disposed around the non-thinned region;

in the laminating direction of the mask frame and the mask net piece, the thickness of the thinning area is smaller than that of the non-thinning area, and the blocking portion is located in the thinning area.

Therefore, the height of the blocking part is as large as possible on the premise of ensuring that the net surface of the mask has enough strength by arranging the thinning area, so that the effect of preventing crack propagation is improved.

According to another aspect of the present application, there is provided a method for manufacturing a mask assembly, including:

providing a mask mesh surface and a mask frame; the mask mesh surface comprises a mesh surface body and a plurality of blocking parts, and the blocking parts are provided with blocking grooves;

tensioning the mask mesh surface on the mask frame;

connecting the mask mesh surface with the mask frame; wherein the connection point formed by the connection is positioned in the blocking groove.

Above-mentioned mask wire side and mask subassembly subtract opening of heavy groove and reduced the tensile stress that the junction bore, the effect that reduces the stress of junction, prevents the crack propagation of tie point has then been played in the setting of stop part to reduced the cracked probability of mask wire side from the tie point, avoided the product that consequently causes bad jointly, prolonged the life of mask subassembly simultaneously, reduced because of the damage probability that leads to the not enough and reduction in production efficiency of quantity of mask wire side.

Drawings

Fig. 1 is a schematic structural diagram of a mask assembly according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of the mask assembly taken along the A-A direction;

FIG. 3 is a top view of a blocking portion of the mask assembly shown in FIG. 2;

FIG. 4 is a top view of a barrier portion of a mask assembly according to another embodiment;

FIG. 5 is a cross-sectional view taken in the direction B-B of the blocking portion shown in FIG. 3;

fig. 6 is a flowchart of a method for manufacturing a mask assembly according to an embodiment of the invention.

The reference numbers illustrate:

100. a mask assembly; 20. masking the screen surface; 21. a mesh surface body; 212. an evaporation area; 2121. evaporating an opening; 214. a connection region; 2141. a non-thinned region; 2141a, a weight-reducing tank; 2143. a thinning region; 23. a blocking portion; 232. retaining walls; 234. a blocking groove; 25. a connection point; 40. a frame.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

In the OLED manufacturing technology, it is necessary to utilize a vacuum evaporation technology to heat an evaporation material under a certain vacuum condition, so that the evaporation material is melted (or sublimated) into vapor composed of atoms, molecules or atomic groups, and then the vapor is condensed on the surface of a substrate to form a film, so as to form a functional layer of an OLED device.

The universal Metal Mask (CMM for short) for evaporating the functional layer mainly comprises a Frame body (Frame) and a net surface (Sheet), wherein the net surface is stretched on the Frame body through a net stretching technology, the edge of the net surface is arranged on the Frame body and then is combined with the Frame body in a welding mode and the like to form the complete Mask, and the edge of the net surface forms a connecting point for connecting the Frame body. In the vacuum evaporation process, the evaporated surface of the OLED substrate is arranged opposite to an evaporation source, and evaporation materials from the evaporation source are evaporated on the evaporated surface through a mask plate and form corresponding patterns. However, during the cleaning of the mask, the connection points may break from the cracks and extend to the web surface.

The inventor has found that the reason for the above situation is: the connecting point of the net surface and the frame body generates residual stress which cannot be eliminated in the forming process, particularly when the net surface and the frame body are connected in a laser welding mode, welding spots can be generated on the net surface as the connecting point by laser welding, and the welding spots form the residual stress which cannot be eliminated in the welding process. Because the welding adopts the laser welding technology of welding the screen surface on the frame body in a melting and solidifying mode, sputtering can occur when laser irradiates the screen surface, so that the central thickness of a welding spot is seriously reduced to form the shapes of a concave middle part and a convex periphery, the stress at the welding spot is further aggravated by the formation of the shapes, the area of the cross section perpendicular to the direction of the tension of the screen at the welding spot is smaller, and the tension born by the unit area is larger. Therefore, the mesh surface is easily broken by the ultrasonic vibration in the evaporation process and the cleaning process.

As shown in fig. 1 and 2, fig. 1 is a schematic structural diagram of a mask assembly according to an embodiment of the present invention;

fig. 2 is a sectional view taken along a-a of the mask assembly shown in fig. 2. It should be noted that the connection points in the drawings of the present application are merely schematic and do not represent specific shapes of the connection points.

For the above reasons, an embodiment of the present invention provides a mask assembly 100, and the mask assembly 100 effectively reduces unit stress applied to a connection point, and effectively prevents a mesh surface from being broken in a cleaning process, thereby prolonging a service life of the mask assembly 100.

Specifically, the mask assembly 100 includes a mask frame 40 and a mask screen 20, wherein the mask screen 20 is disposed on the mask frame 40 and is fixedly connected to the mask frame 40. In the following embodiments, the Mask assembly 100 is a Common Metal Mask (CMM) used for evaporating functional layers such as an HTL (hole transport layer), an ETL (electron transport layer), and a Cathode (Cathode), and each functional layer is sequentially evaporated and deposited on the OLED substrate through the Mask assembly 100.

The mask frame 40 has a substantially rectangular hollow frame structure, and encloses a substantially rectangular vapor deposition space. The width direction (i.e., the X direction in fig. 1) of the mask frame 40 is a first direction, the length direction (i.e., the Y direction in fig. 1) of the mask frame 40 is a second direction, the thickness direction (i.e., the Z direction in fig. 2) of the mask frame 40 is a third direction, and the first direction, the second direction and the third direction intersect with each other two by two, as a preferred embodiment, the first direction, the second direction and the third direction are perpendicular to each other. It is to be understood that the shape of the mask frame 40 is not limited thereto, and the first direction, the second direction, and the third direction may also intersect only and not be perpendicular.

The mask mesh 20 comprises a mesh body 21, the mesh body 21 is of a sheet-like structure, the cross section of the mesh body 21 perpendicular to the third direction is approximately rectangular, and the shape and the size of the mesh body 21 are matched with those of the mask frame 40. The mesh surface body 21 is supported on the mask frame 40 along the third direction and communicated with the evaporation space of the mask frame 40, the width direction of the mesh surface body 21 extends along the first direction, the length direction of the mesh surface body 21 extends along the second direction, the thickness direction of the mesh surface body 21 extends along the third direction, and the orthographic projection of the mesh surface body 21 on a plane vertical to the third direction and the orthographic projection of the mask frame 40 on a plane vertical to the third direction at least partially overlap in the third direction. As a preferred embodiment, a peripheral edge of an orthographic projection of the mesh-surface body 21 on a plane perpendicular to the third direction overlaps in the third direction with an orthographic projection of the mask frame 40 on a plane perpendicular to the third direction.

The mesh surface body 21 has a vapor deposition region 212 and a connection region 214, the vapor deposition region 212 is located at the center of the mesh surface body 20, and the connection region 214 and the vapor deposition region 212 are disposed adjacent to each other in a plane perpendicular to the third direction. The mesh surface body 21 of the vapor deposition region 212 is correspondingly communicated with the vapor deposition space, and the mesh surface body 21 of the connection region 214 is fixedly connected with the mask frame 40. In this way, the mesh surface body 21 is fixed to the mask frame 40 through the portion located in the connection region 214, and the evaporation material passes through the mesh surface body 21 in the evaporation region 212 to reach the OLED substrate.

Specifically, the cross section of the vapor deposition region 212 perpendicular to the third direction has a substantially rectangular shape, the width direction of the vapor deposition region 212 extends in the first direction, and the length direction of the vapor deposition region 212 extends in the second direction. The mesh surface body 21 of the evaporation region 212 is provided with a plurality of evaporation openings 2121, the plurality of evaporation openings 2121 are arranged in an array, each evaporation opening 2121 in each row of evaporation openings 2121 is arranged at intervals along a first direction, the plurality of rows of evaporation openings 2121 are arranged at intervals along a second direction, each evaporation opening 2121 is located in an evaporation space formed by the mask frame 40, each evaporation opening 2121 is substantially rectangular, and each evaporation opening 2121 is communicated with two opposite side surfaces of the mesh surface body 21 in a third direction along the third direction.

In this way, during vapor deposition, the vapor deposition material passes through the vapor deposition openings 2121 and reaches the OLED substrate, and a film layer pattern having the same shape as the vapor deposition openings 2121 is formed on the OLED substrate. It is understood that the shape and size of the evaporation region 212 and the number, shape and size of the evaporation openings 2121 are not limited, and may be set as required to meet different evaporation requirements.

The connection region 214 surrounds the periphery of the evaporation region 212, the connection region 214 includes two straight sides extending along the first direction and two straight sides extending along the second direction, that is, the connection region 214 is correspondingly disposed on the outer sides of the four straight sides of the evaporation region 212, the mesh surface body 21 of the connection region 214 is at least partially disposed on the mask frame 40, the mesh surface body 21 of the connection region 214 and the mask frame 40 are connected with each other through a plurality of connection points 25, the connection points 25 are arranged at intervals along the extension direction of the connection region 214 and circumferentially surround the evaporation region 212, so that the mask mesh surface 20 and the mask frame 40 are firmly connected with each other. It will be appreciated that the number and arrangement of the connection points 25 is not limited and may be configured as desired to meet different connection requirements.

In order to achieve the purpose of preventing the fracture at the connection point 25, the mesh-face body 21 of the present application further includes a plurality of blocking portions 23, the plurality of blocking portions 23 are all located in the connection region 214 of the mesh-face body 21, the plurality of blocking portions 23 are arranged at intervals on one side of the mesh-face body 21 in the third direction, and the blocking portions 23 have blocking grooves 234 for accommodating the connection points 25. Specifically, in some embodiments, the plurality of barrier sections 23 are arranged at intervals along the extending direction of the connection region 214 and circumferentially surround the evaporation region 212.

So, the tie point 25 of connecting wire side body 21 and mask frame 40 is located the barrier groove 234 that barrier portion 23 formed, the barrier portion 23 of laying wire side body 21 has shown the atress area that has increased around the tie point 25, thereby the pulling force value that the unit area received has been reduced, and then the climbing degree of difficulty of the crackle that has increased tie point 25 department and produced, effectively blocked the crackle and kept away from the tie point 25 from the direction of perpendicular to third direction from the tie point 25 and extended, finally prevent effectively that mask wire side 20 from splitting in the cleaning process, the life of mask subassembly 100 has been prolonged.

As shown in fig. 3, the orthographic projection of each blocking portion 23 on the mesh surface body 21 is a closed figure surrounding the connecting point 25, so that the cracks generated at the connecting point 25 can be blocked from extending towards any direction perpendicular to the third direction, and a good anti-fracture effect is achieved.

Further, the blocking portion 23 includes at least one wall 232 protruding from one side of the net surface body 21, and the wall 232 located at the innermost side defines a boundary of the blocking groove 234.

Specifically, in some embodiments, as shown in fig. 3, the blocking portion 23 includes only one retaining wall 232. Specifically, in other embodiments, as shown in fig. 4, the blocking portion 23 includes a plurality of retaining walls 232, the plurality of retaining walls 232 in each blocking portion 23 are coaxially disposed at intervals around the connection point 25, and the retaining wall 232 located at the innermost side defines a boundary of the blocking groove 234.

So, the climbing difficulty of crackle has further been increased in the setting of a plurality of barricades 232, has blockked the crackle more effectively and has outwards extended from tie point 25, has played better anti-fracture effect. In some embodiments, the distance between two adjacent retaining walls 232 in each barrier 23 is 1mm to 2 mm. It is to be understood that the number of the retaining walls 232 in each of the blocking portions 23 and the distance between two adjacent retaining walls 232 are not limited thereto, and may be set according to the distance between adjacent connection points 25.

Further, the orthographic projection of each retaining wall 232 on the net surface body 21 has an outer contour and an inner contour which extend smoothly. Thus, the retaining wall 232 has no sharp corner in the circumferential extension direction, thereby avoiding the stress concentration phenomenon generated at the corner. In some embodiments, the orthographic projection of the retaining wall 232 on the mesh surface body 21 is a circular ring, an elliptical ring or a polygonal ring with rounded corners. It is understood that the shape of the orthographic projection of the retaining wall 232 on the mesh surface body 21 is not limited thereto, and can be set as required to meet different requirements. For example, when the orthographic projection of the retaining wall 232 on the mesh surface body 21 is a circular ring, the orthographic projection outer contour is an outer circle of the circular ring, and the orthographic projection inner contour is an inner circle of the circular ring.

As shown in fig. 5, further, the cross section of the retaining wall 232 perpendicular to the circumferential extension direction thereof is arched, so that the size of the retaining wall 232 in any direction perpendicular to the third direction is gradually reduced from the end connected with the net surface body 21 to the end far away from the net surface body 21, so that the retaining wall can be firmly connected with the net surface body 21 and is not easily damaged.

It is to be understood that the specific shape of the retaining wall 232 is not limited thereto, and may be configured as desired to meet various requirements. In other embodiments, the shape of the cross section of the retaining wall 232 perpendicular to the circumferential extension direction thereof is not limited thereto, and may be a semicircular shape, a rectangular shape with a chamfer, or other shapes.

In some embodiments, the height of the barrier portion 23 protruding from the mesh surface body 20 (i.e. the height of the barrier portion 23 in the third direction) is 0.11mm to 0.115mm, so that the barrier portion does not interfere with the evaporation structure while effectively preventing crack propagation. It is understood that if the height of the barrier 23 in the third direction is less than 0.11mm, it does not function well to prevent crack propagation. On the other hand, if the height of the barrier 23 in the third direction is greater than 0.115mm, it is easy to interfere with the evaporation structure to affect the evaporation effect, which may cause the phenomena of abnormal alignment or too large evaporation shadow area.

In some embodiments, the retaining wall 232 has a width in the radial direction of 0.05mm to 0.1 mm. It is understood that the width of the retaining wall 232 is not limited thereto, and can be determined according to the size of the space for disposing the retaining wall 232 and is proportional to the size of the space for disposing the retaining wall 232. The width of the retaining wall 232 in the radial direction is the difference between the inner diameter and the outer diameter of the retaining wall 232 in any radial direction. For example, when the orthographic projection of the retaining wall 232 on the mesh surface body 21 is a circular ring, the width of the retaining wall 232 in the radial direction is equal to the ring width of the circular ring.

In some embodiments, in order to maximize the height of the blocking portion 23 while ensuring that the overall height of the mask assembly 100 in the third direction is within a certain range, the connection region 214 of the mesh surface body 21 includes a thinned region 2143 and a non-thinned region 2141. Specifically, the non-thinned region 2141 and the connecting region 214 are disposed adjacent to each other in a plane perpendicular to the third direction, the non-thinned region 2141 surrounds the welding region in the third direction, the thinned region 2143 is located on a side of the non-thinned region 2141 away from the connecting region 214 to surround the non-thinned region 2141, the thickness of the thinned region 2143 in the third direction is smaller than that of the non-thinned region 2141 in the third direction, the thinned region 2143 and the non-thinned region 2141 are in smooth transition, and the blocking portion 23 is located in the thinned region 2143.

In this way, the thinning region 2143 is set to have the height of the blocking portion 23 as large as possible on the premise of ensuring that the mask mesh surface 20 has sufficient strength, thereby improving the effect of preventing crack propagation.

Specifically, in one embodiment, the width of the thinned region 2143 on the non-thinned region 2143 side in the first direction or the second direction is 2mm to 3mm, thereby leaving enough space for the provision of the barrier portion 23. The difference between the thickness of the thinned region 2143 in the third direction and the thickness of the non-thinned region 2141 in the third direction is 10 μm to 15 μm, so that the mesh surface body 21 has sufficient structural strength. It is understood that the width of the thinned region 2143 in the first direction or the second direction and the thickness in the third direction are not limited, and may be set as required to meet different requirements.

In some embodiments, the non-thinned region 2141 of the connecting region 214 on a side close to the evaporation region 212 is provided with a weight-reducing groove 2141a having a bottom wall, and the weight-reducing groove 2141 extends from a side surface of the mesh surface body 21 in the third direction toward another side surface of the mesh surface body 21 in the third direction. The lightening grooves 2141a reduce the overall weight of the mask web 20, and therefore reduce the net tensioning force, and therefore the tension at the connection points 25 is reduced, thereby further preventing the connection points 25 from breaking.

It can be understood that the position, number, size and depth of the lightening grooves 2141a are not limited, and the lightening grooves 2141a may be opened on the side of the net surface body 21 where the blocking portion 23 is provided, or may be opened on the side of the net surface body 21 away from the blocking portion 23. Specifically, in one embodiment, each straight side of the connecting region 214 is provided with a plurality of lightening grooves 2141a, and the plurality of lightening grooves 2141a are arranged at intervals along the length direction of the straight side of the connecting region 214. In another embodiment, each straight side of the connecting region 214 is provided with only one lightening groove 2141a, each lightening groove 2141a extends along the length direction of the straight side and is in a long strip shape, and the depth of each lightening groove 2141a in the third direction may be greater than one half of the thickness of the net surface body 21 in the third direction or less than one half of the thickness of the net surface body 21 in the third direction.

In some embodiments, the blocking portion 23, the non-thinning region 2141, and the lightening groove 2141a may be formed by exposure development and etching on a raw material. It is to be understood that the manner of forming the blocking portion 23, the non-thinned region 2141, and the lightening groove 2141a is not limited thereto, and may be provided as needed.

In some embodiments, the mask screen 20 and the frame 20 are fixed to each other by laser welding, and the laser is irradiated on the screen body 21 of the connection region 214 to form a plurality of welding spots on the screen body 21 as the connection points 25 between the screen body 21 and the frame 20. It will be appreciated that the manner of attachment of the mask web 20 to the frame 40 is not limited thereto, and other processes may be selected to form the attachment points 25.

As shown in fig. 6, the present application further provides a manufacturing method of the mask assembly 100, including the following steps:

s110: providing a mask web 20 and a mask frame; the mask web 20 includes a web body 21 and a plurality of blocking portions 23, the blocking portions 23 having blocking grooves 243.

Specifically, the mask plate raw material is a metal substrate having a thickness of 200 μm. Partial area of one side of the mask plate raw material can be etched by adopting exposure development and etching technology, the etched area forms the mesh surface body 21, and the area which is not etched forms the barrier part 23 with the barrier groove 234. The etching of the mesh surface body 21 is then continued by using the exposure development and etching techniques to form the thinned regions 2143, the evaporation openings 2121, and the lightening grooves 2141 a.

S120: the mask web 20 is stretched over the mask frame 40.

Specifically, the tensioning mechanism clamps and tensions the mask screen surface 20 to be supported on the mask frame 40, and the evaporation region 212 of the mask screen surface 20 is correspondingly communicated with the evaporation space of the mask frame 20.

S130: the mask web 20 is attached to the mask frame 40, wherein the attachment points 25 formed by welding are located within the blocking slots 234.

Specifically, in some embodiments, the mask web 20 and the mask frame 40 are welded by laser welding, and each of the connection points 25 is located in one of the blocking slots 234.

Above-mentioned mask wire side 20 and mask subassembly 100, subtract opening of heavy groove 2141a and reduced the tensile stress that tie point 25 department bore, the setting of stop part 23 has then played the stress that reduces tie point 25 department, the effect of the crack propagation of stop tie point 25 department, thereby the cracked probability of mask wire side 20 from tie point 25 department has been reduced jointly, the product that has avoided consequently causing is bad, the life of mask subassembly 100 has been prolonged simultaneously, the probability that the quantity that leads to mask wire side 20 because of mask wire side 20 damages reduces production efficiency has been reduced.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.