1. A vibration mode-based electrochemical detection device control system is characterized in that: the device comprises a detection device (1), a Z-direction displacement platform (2), an X-Y two-dimensional air-floating platform (3), a three-dimensional piezoelectric displacement platform (4), an upper computer (5), a UMAC controller (6), a signal generator (7), a charge amplifier (8), a phase-locked amplifier (9) and a PID controller (10), wherein the detection device (1) comprises a chute fixing seat (1-1) and a sliding block (1-3) which can be tightly fixed with the chute fixing seat through a fastening bolt (1-2), the piezoelectric actuator (1-4) is fixed on the sliding block (1-3), a capacitor fixing device (1-5) is fixed at the bottom of the piezoelectric actuator (1-4), the lower end of the capacitor fixing device (1-5) is in threaded connection with a distance adjusting ring (1-7) and is inserted with a capacitive displacement sensor (1-8), the capacitance type displacement sensor (1-8) can be locked and positioned through a locking screw (1-6), an excitation piezoelectric ceramic ring (1-9) is fixed at the bottom of a distance adjusting ring (1-7), an upper fixing ring (1-10) is fixed at the bottom of the excitation piezoelectric ceramic ring (1-9), a lower fixing ring (1-13) is fixed at the bottom of the upper fixing ring (1-10), a flexible hinge (1-12) is clamped between the excitation piezoelectric ceramic ring and the upper fixing ring, a conducting strip (1-14) is fixed at the edge of the flexible hinge (1-12) and is connected with an external lead (1-15), a nano electrode probe (1-18) is installed at the center of the flexible hinge (1-12) through a positioning screw (1-11) and a nut joint (1-16), and a detection device (1) is fixed on the Z-direction displacement table (2) through a chute fixing seat (1-1), the X-Y two-dimensional air-floating platform (3) is fixedly provided with the three-dimensional piezoelectric displacement table (4) and is positioned below the detection device (1), the signal generator (7) is connected with the excitation PZT driver (11) to control the vibration of the excitation piezoelectric ceramic rings (1-9), the capacitance displacement sensor (1-8) detects the displacement change of the excitation piezoelectric ceramic rings (1-9), the displacement change is transmitted to the phase-locked amplifier (9) after being processed by the charge amplifier (8), the phase-locked amplifier (9) extracts the voltage amplitude signal of the charge amplifier (8) with the same frequency according to the signal frequency generated by the signal generator (7), the PID controller (10) controls the piezoelectric actuators (1-4) through the piezoelectric ceramic controller (12) after carrying out operation processing on the voltage amplitude signal of the phase-locked amplifier (9), the Z-direction closed loop feedback of the detection device (1) is completed, the piezoelectric actuators (1-4), the X-Y two-dimensional air flotation platform (3) and the three-dimensional piezoelectric displacement platform (4) respectively provide real-time signals for the upper computer (5), and the upper computer (5) controls the displacement of the Z-direction displacement platform (2), the X-Y two-dimensional air flotation platform (3) and the three-dimensional piezoelectric displacement platform (4) through the UMAC controller (6).

2. The vibration mode-based control system for an electrochemical detection device according to claim 1, wherein: the root parts of the nano electrode probes (1-18) are fixedly bonded with protective sleeves (1-17), and the nut joints (1-16) are correspondingly provided with at least one group of clamping screws along the radial direction to clamp and fix the protective sleeves (1-17).

3. The vibration mode-based control system for an electrochemical detection device according to claim 1, wherein: the piezoelectric actuators (1-4) are hollow packaged cylindrical piezoelectric ceramics.

4. The vibration mode-based control system for an electrochemical detection device according to claim 1, wherein: the flexible hinges (1-12) are crisscross flexible hinges or annular inner single-arm flexible hinges.

5. A method of testing a vibration mode based electrochemical test device control system according to claim 1, wherein: the detection method comprises the following steps:

the method comprises the following steps: electrode approximation

The Z-direction displacement table (2) is controlled to move and the positioning slide blocks (1-3) are adjusted by combining with the fastening bolts (1-2)For the height position of a sliding groove fixing seat (1-1), a nano electrode probe (1-18) is enabled to move downwards preliminarily to approach a tested sample, an external lead (1-15) is connected with an electrochemical workstation to represent the electrochemical characteristics of the surface of the tested sample, the height position of a capacitive displacement sensor (1-8) relative to a capacitive fixer (1-5) is adjusted and positioned preliminarily through a locking screw (1-6), a distance adjusting ring (1-7) is rotated to further adjust the distance between a positioning screw (1-11) and the capacitive displacement sensor (1-8), the capacitive displacement sensor (1-8) meets the service performance, and in the approaching process, an excitation piezoelectric ceramic ring (1-9) acts to enable a flexible hinge (1-12) to be kept at the inherent frequency of the flexible hinge and with the initial amplitude A₀Vibrating, then the piezoelectric actuator (1-4) acts to make the nano electrode probe (1-18) move downwards with micron or nano precision until contacting with the tested sample, and the amplitude of the flexible hinge (1-12) is less than the initial amplitude A₀And gradually decreases with the downward stepping of the amplitude of the flexible hinges (1-12) until a preset amplitude A is reached, previously set by a PID controller (10)₁Completing the electrode approaching process;

step two: electrochemical detection

The X-Y two-dimensional air-floating platform (3) and the three-dimensional piezoelectric displacement platform (4) act to drive a sample to be detected on the X-Y two-dimensional air-floating platform to move in the horizontal direction, the phase-locked amplifier (9) acquires the real-time amplitude of the flexible hinge (1-12), and the flexible hinge (1-12) drives the nano-electrode probe (1-18) to maintain the preset amplitude A₁Vibrating, and under the action of Z-direction closed loop feedback, when the concave surface of the tested sample moves to the position of the nano electrode probe (1-18), the distance between the nano electrode probe (1-18) and the surface of the tested sample is increased, so that the amplitude is increased to be expanded amplitude A₂In order to achieve constant amplitude, the control system is adapted to detect an extended amplitude A₂The corresponding voltage signal adjusts the piezoelectric actuator (1-4) to extend downwards, thereby intensifying the extrusion of the nano-electrode probe (1-18) and the surface of the tested sample until the amplitude is reduced to the preset amplitude A₁When the convex surface of the tested sample moves to the position of the nano electrode probe (1-18), the distance between the nano electrode probe (1-18) and the surface of the tested sample is reduced, and the amplitude is reduced to reduce the amplitude A₃To achieveThe amplitude is constant, and the control system is responsive to the detected reduced amplitude A₃The corresponding voltage signal adjusts the piezoelectric actuator (1-4) to contract upwards, thereby reducing the extrusion of the nano-electrode probe (1-18) and the surface of the tested sample until the amplitude is increased to the preset amplitude A₁And convex feedback of the detected sample is completed, the piezoelectric actuators (1-4), the X-Y two-dimensional air flotation platform (3) and the three-dimensional piezoelectric displacement platform (4) transmit position information to the upper computer (5) in real time, and the electrochemical information of the detected sample detected by the nano electrode probes (1-18) is connected into the electrochemical workstation through external leads (1-15) until the detection of the detected sample is completed.

6. The detection method according to claim 5, characterized in that: presetting the amplitude A in the step one₁Is an initial amplitude A₀1/4-3/4.

Background

The electrochemical of the nano material effectively promotes the progress of electrochemical energy, however, the 'intrinsic' electrochemical property of the nano crystal is researched on the nano scale, the architecture relation of the electrocatalyst is revealed, and a great exploration space is still left for providing theoretical support for the interface construction of an energy device. Compared with classical electrochemistry, nanoscale electrochemical systems exhibit new nanoscale characteristics: (1) linkage effects of scale changes: the diameter of the electrode with the nanometer scale, the working distance and the like ensure that the theory of substance transfer, charge transfer and multi-phase chemical reaction in the classical electrochemistry is not suitable for the electrochemistry with the nanometer scale any more; (2) synergistic effects of external field: physical field electrical effects, such as photoelectric effects, piezoelectric effects, electric field induction and the like, highlight some non-obvious effects and processes in classical macro-electrochemistry, and further influence interface charge transfer, electrochemical kinetics and the like. How to detect the reaction process and the interface microstructure of nanoscale electrochemistry becomes a difficult problem to be solved by researchers. Therefore, the development of an electrochemical detection device which has high electrode resolution, reliable performance and easy operation and can realize repeated detection under in-situ working conditions is imperative.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides a vibration mode-based electrochemical detection device control system and a detection method, a nano electrode probe of the electrochemical detection device is close to the surface of a detected sample in a vibration mode, the interaction force is reduced, the electrochemical detection device is not easy to damage, the Z-direction closed loop feedback function ensures constant distance, and the detection is more accurate.

In order to achieve the purpose, the invention adopts the following technical scheme: a vibration mode-based electrochemical detection device control system comprises a detection device, a Z-direction displacement table, an X-Y two-dimensional air floating platform, a three-dimensional piezoelectric displacement table, an upper computer, a UMAC controller, a signal generator, a charge amplifier, a phase-locked amplifier and a PID controller, wherein the detection device comprises a chute fixing seat and a sliding block which can be tightly fixed with the chute fixing seat through a fastening bolt, a piezoelectric actuator is fixed on the sliding block, a capacitor fixing device is fixed at the bottom of the piezoelectric actuator, the lower end of the capacitor fixing device is in threaded connection with a distance adjusting ring, a capacitive displacement sensor is inserted and installed in the distance adjusting ring, the capacitive displacement sensor can be locked and positioned through a locking screw, an excitation piezoelectric ceramic ring is fixed at the bottom of the distance adjusting ring, an upper fixing ring is fixed at the bottom of the excitation piezoelectric ceramic ring, a lower fixing ring, the edge of the flexible hinge is fixed with a conducting strip and connected with an external lead, the center of the flexible hinge is provided with a nano electrode probe through a positioning screw and a nut joint, a detection device is fixed on the Z-directional displacement table through the chute fixing seat, the X-Y two-dimensional air-floating platform is fixedly provided with the three-dimensional piezoelectric displacement table and is positioned below the detection device, the signal generator is connected with an excitation PZT driver to control the vibration of the excitation piezoelectric ceramic ring, a capacitance displacement sensor detects the displacement change of the excitation piezoelectric ceramic ring and transmits the displacement change to a phase-locked amplifier after being processed by a charge amplifier, the phase-locked amplifier extracts the voltage amplitude signal of the charge amplifier with the same frequency according to the signal frequency generated by the signal generator, the PID controller performs operation processing on the voltage amplitude signal of the phase-locked amplifier and then controls the piezoelectric actuator through the piezoelectric ceramic controller, and the piezoelectric actuator, the X-Y two-dimensional air flotation platform and the three-dimensional piezoelectric displacement platform respectively provide real-time signals for an upper computer, and the upper computer controls the displacement of the Z-directional displacement platform, the X-Y two-dimensional air flotation platform and the three-dimensional piezoelectric displacement platform through the UMAC controller.

A detection method of a vibration mode-based electrochemical detection device control system comprises the following steps:

the method comprises the following steps: electrode approximation

Controlling a Z-direction displacement table to move and adjusting the height position of a positioning sliding block relative to a sliding chute fixing seat by combining a fastening bolt, enabling a nano electrode probe to preliminarily move downwards to approach a tested sample, connecting an external lead with an electrochemical workstation to represent the electrochemical characteristic of the surface of the tested sample, preliminarily adjusting and positioning the height position of a capacitive displacement sensor relative to a capacitive fixer by a locking screw, further adjusting the distance between the positioning screw and the capacitive displacement sensor by rotating a distance adjusting ring, enabling the capacitive displacement sensor to meet the use performance, and enabling a flexible hinge to be kept at the inherent frequency of the flexible hinge by the action of an excitation piezoelectric ceramic ring in the approaching process and keeping the original amplitude A of the flexible hinge at the original frequency₀Vibrating, then the piezoelectric actuator acts to make the nano electrode probe move downwards with micron or nanometer precision until contacting with the tested sample, and the amplitude of the flexible hinge is less than the initial amplitude A₀And gradually decreases with the downward stepping of the amplitude of the flexible hinge until a preset amplitude A is reached, which is preset by a PID controller₁Completing the electrode approaching process;

step two: electrochemical detection

The X-Y two-dimensional air-floating platform and the three-dimensional piezoelectric displacement platform act to drive a sample to be detected on the X-Y two-dimensional air-floating platform to move in the horizontal direction, the phase-locked amplifier obtains the real-time amplitude of the flexible hinge, and the flexible hinge drives the nano-electrode probe to maintain the preset amplitude A₁Vibrating, and under the action of Z-direction closed loop feedback, when the concave surface of the tested sample moves to the position of the nano electrode probe, the distance between the nano electrode probe and the surface of the tested sample is increased, and the amplitude is increased to be expanded amplitude A₂In order to achieve constant amplitude, the control system is adapted to detect an extended amplitude A₂The corresponding voltage signal adjusts the piezoelectric actuator to extend downwards, so that the extrusion of the nano-electrode probe and the surface of the tested sample is increased until the amplitude is reduced to a preset amplitude A₁The concave feedback of the detected sample is completed, when the convex surface of the detected sample surface moves to the position of the nano electrode probe, the nano electrode probe and the detected sample are connectedThe distance between the surfaces of the samples is reduced, the amplitude is reduced to a reduced amplitude A₃In order to achieve constant amplitude, the control system is adapted to detect a reduced amplitude A₃The corresponding voltage signal adjusts the piezoelectric actuator to enable the piezoelectric actuator to contract upwards, so that the extrusion of the nano-electrode probe and the surface of the tested sample is reduced until the amplitude is increased to be the preset amplitude A₁And finishing convex feedback of the detected sample detection, transmitting position information to an upper computer in real time by the piezoelectric actuator, the X-Y two-dimensional air flotation platform and the three-dimensional piezoelectric displacement platform, and connecting electrochemical information of the detected sample detected by the nano electrode probe into an electrochemical workstation through an external lead until the detection of the detected sample is finished.

Compared with the prior art, the invention has the beneficial effects that:

1. the nano electrode probe of the detection device approaches the surface of a detected sample in a vibration mode, the contact between the tip of the electrode and the detected sample in the vibration mode is a quasi-contact mode, and compared with the traditional contact mode, the contact mode can reduce the interaction force between the tip of the electrode and the detected sample, thereby ensuring that the damage of the nano electrode probe is reduced to the minimum when approaching the detected sample;

2. when electrochemical detection is carried out, the Z-direction closed loop feedback function of the control system can ensure that the distance between the nano-electrode probe and the surface of the detected sample is constant, so that the electrochemical property of the surface of the detected sample is more accurate to detect;

3. the whole assembly and debugging is convenient and easy, the automation degree is high, the operation is simple, the practicability is strong, and the popularization and application value is good.

Drawings

FIG. 1 is an isometric view of an assembled structure of the test device of the present invention;

FIG. 2 is a schematic diagram of the control system of the present invention;

FIG. 3 is a schematic diagram of the Z-directed closed loop feedback of the control system of the present invention;

FIG. 4 is a schematic diagram of the electrode approximation process in the detection method of the present invention;

FIG. 5 is a schematic diagram of the process of concave feedback in the detection method of the present invention;

FIG. 6 is a schematic diagram illustrating a convex feedback process in the detection method of the present invention.

Detailed Description

The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the invention, rather than all embodiments, and all other embodiments obtained by those skilled in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.

As shown in fig. 1 to 3, a vibration mode-based electrochemical detection device control system includes a detection device 1, a Z-directional displacement stage 2, an X-Y two-dimensional air-bearing platform 3, a three-dimensional piezoelectric displacement stage 4, an upper computer 5, a UMAC controller 6, a signal generator 7, a charge amplifier 8, a lock-in amplifier 9, and a PID controller 10.

Referring to fig. 1, the detection device 1 includes a chute fixing seat 1-1, a slider 1-3, a piezoelectric actuator 1-4, a capacitor fixer 1-5, a distance adjusting ring 1-7, a capacitance displacement sensor 1-8, an excitation piezoelectric ceramic ring 1-9, an upper fixing ring 1-10, a positioning screw 1-11, a flexible hinge 1-12, a lower fixing ring 1-13 and a nano electrode probe 1-18, the chute fixing seat 1-1 is vertically and slidably provided with the slider 1-3, the chute fixing seat 1-1 is provided with a fastening bolt 1-2 capable of fastening and fixing the slider 1-3, the piezoelectric actuator 1-4 is vertically fixed on the slider 1-3, and the piezoelectric actuator 1-4 adopts hollow encapsulated cylindrical piezoelectric ceramics, the upper end of the capacitor fixer 1-5 is fixed at the bottom of the piezoelectric actuator 1-4 in a threaded manner, the lower end of the capacitor fixer 1-5 is of a hollow structure and is provided with an internal thread, the upper end of the distance adjusting ring 1-7 is provided with an external thread which is matched with the lower end of the capacitor fixer 1-5 in a screwed manner, the capacitor displacement sensor 1-8 is of a rod shape, the upper end of the capacitor displacement sensor passes through the distance adjusting ring 1-7 and is vertically inserted into the capacitor fixer 1-5, the capacitor fixer 1-5 is provided with a locking screw 1-6 which can lock and position the capacitor displacement sensor 1-8, the excitation piezoelectric ceramic ring 1-9 is fixedly bonded at the bottom of the distance adjusting ring 1-7, the flexible hinge 1-12 is clamped and fixed between the upper fixing ring 1-10 and the lower fixing ring 1-13, and the flexible hinge 1-12 adopts a cross flexible hinge or an annular inner single-arm flexible hinge, the edge of a flexible hinge 1-12 is fixed with a conducting strip 1-14 and connected with an external lead 1-15, an upper fixing ring 1-10 is fixedly bonded at the bottom of an excitation piezoelectric ceramic ring 1-9, the upper end of a positioning screw 1-11 is clamped at a perforation arranged at the center of the flexible hinge 1-12, the lower end of the positioning screw 1-11 is provided with a nut joint 1-16 which is tightly fixed with the flexible hinge 1-12, a nano electrode probe 1-18 is detachably fixed at the bottom of the nut joint 1-16, the root of the nano electrode probe 1-18 is fixedly bonded with a protective sleeve 1-17, and the nut joint 1-16 is correspondingly provided with at least one group of clamping screws along the radial direction to clamp and fix the protective sleeve 1-17.

Referring to fig. 3, the signal generator 7 is connected to the excitation PZT driver 11 to control the vibration of the excitation piezoelectric ceramic rings 1 to 9, the capacitance displacement sensors 1 to 8 measure the displacement change of the excitation piezoelectric ceramic rings 1 to 9, the displacement change is processed by the charge amplifier 8 and then transmitted to the phase-locked amplifier 9, the phase-locked amplifier 9 extracts the voltage amplitude signal of the charge amplifier 8 with the same frequency according to the signal frequency generated by the signal generator 7, and the PID controller 10 performs operation processing on the voltage amplitude signal of the phase-locked amplifier 9 and then controls the piezoelectric actuators 1 to 4 through the piezoelectric ceramic controller 12 to complete the Z-direction closed loop feedback of the detection device 1.

Referring to fig. 2, the detection device 1 is fixed on the Z-directional displacement table 2 through the chute fixing seat 1-1, the three-dimensional piezoelectric displacement table 4 is fixedly installed on the X-Y two-dimensional air floating platform 3 and is located below the detection device 1, the piezoelectric actuators 1-4, the X-Y two-dimensional air floating platform 3 and the three-dimensional piezoelectric displacement table 4 respectively provide real-time signals for the upper computer 5, and the upper computer 5 controls the displacement of the Z-directional displacement table 2, the X-Y two-dimensional air floating platform 3 and the three-dimensional piezoelectric displacement table 4 through the UMAC controller 6.

A detection method of a vibration mode-based electrochemical detection device control system comprises the following steps:

the method comprises the following steps: electrode approximation

The Z-direction displacement table 2 is controlled to move, the height position of the positioning slide block 1-3 relative to the sliding chute fixing seat 1-1 is adjusted by combining the fastening bolt 1-2, the nano electrode probe 1-18 is enabled to move downwards preliminarily to approach to a tested sample, and the external lead 1-15 is connected with the electrochemical workstation to represent a table of the tested sampleThe electrochemical characteristics of the surface are that the height position of a positioning capacitance type displacement sensor 1-8 relative to a capacitance fixer 1-5 is preliminarily adjusted through a locking screw 1-6, and a distance adjusting ring 1-7 is rotated to further adjust the distance between a positioning screw 1-11 and the capacitance type displacement sensor 1-8, so that the capacitance type displacement sensor 1-8 meets the service performance, and in the approaching process, a vibration exciting piezoelectric ceramic ring 1-9 acts to keep a flexible hinge 1-12 at the inherent frequency thereof to have an initial amplitude A in combination with the graph shown in figure 4₀Vibrating, then the piezoelectric actuator 1-4 acts to make the nano electrode probe 1-18 move downwards with micron or nano precision until contacting with the tested sample, and the amplitude of the flexible hinge 1-12 is less than the initial amplitude A₀And gradually decreases as the amplitude of the flexible hinges 1-12 is stepped down until a preset amplitude a, set in advance by the PID controller 10, is reached₁A predetermined amplitude A₁Is preferably set to the initial amplitude A₀1/4-3/4, completing the electrode approaching process;

step two: electrochemical detection

The X-Y two-dimensional air-floating platform 3 and the three-dimensional piezoelectric displacement platform 4 act to drive a sample to be detected thereon to move in the horizontal direction, the lock-in amplifier 9 obtains the real-time amplitude of the flexible hinges 1-12, the flexible hinges 1-12 drive the nano-electrode probes 1-18 to maintain the preset amplitude A₁Vibrating, and under the action of Z-direction closed loop feedback, when the concave surface of the tested sample moves to the positions of the nano-electrode probes 1-18 as shown in figure 5, the distance between the nano-electrode probes 1-18 and the surface of the tested sample is increased, so that the amplitude is increased to be expanded amplitude A₂In order to achieve constant amplitude, the control system is adapted to detect an extended amplitude A₂The corresponding voltage signal adjusts the piezoelectric actuator 1-4 to extend downwards, thereby intensifying the extrusion of the nano-electrode probe 1-18 and the surface of the tested sample until the amplitude is reduced to the preset amplitude A₁And the concave feedback of the detected sample is completed, and as shown in fig. 6, when the convex surface of the detected sample surface moves to the position of the nano-electrode probe 1-18, the distance between the nano-electrode probe 1-18 and the detected sample surface is reduced, and the amplitude is reduced to reduce the amplitude a₃In order to achieve constant amplitude, the control system is adapted to detect a reduced amplitude A₃Corresponding toThe voltage signal adjusts the piezoelectric actuator 1-4 to contract upwards, so that the extrusion of the nano-electrode probe 1-18 and the surface of the tested sample is reduced until the amplitude is increased to a preset amplitude A₁And finishing convex feedback of the detected sample detection, wherein the piezoelectric actuators 1-4, the X-Y two-dimensional air flotation platform 3 and the three-dimensional piezoelectric displacement platform 4 transmit position information to the upper computer 5 in real time, and the electrochemical information of the detected sample detected by the nano electrode probes 1-18 is connected into the electrochemical workstation through external leads 1-15 until the detection of the detected sample is finished.

The signal generator 7 generates a sinusoidal input voltage signal with a certain frequency, the excitation PZT driver 11 enables the excitation piezoelectric ceramic rings 1-9 to vibrate with a constant amplitude under the natural frequency, the displacement change generated by the vibration is measured by the capacitance type displacement sensors 1-8 and processed by the charge amplifier 8, the processed voltage signal is transmitted into the phase-locked amplifier 9, the phase-locked amplifier 9 locks the amplitude value of the charge amplifier 8 under the output certain frequency according to the amplitude and the frequency of the reference signal input by the signal generator 7, and then the PID controller 10 controls the piezoelectric actuators 1-4 according to the amplitude signal input by the phase-locked amplifier 9, so that the Z-direction closed loop feedback of the detection device 1 is completed.

After the signal generator 7 gives a sine signal of an excitation PZT driver 11, the capacitance displacement sensors 1-8 measure the position change of the nano-electrode probes 1-18 and the positioning screws 1-11 during vibration, the value of the position change changes in a stable interval, then the amplitude of the vibration is locked by the phase-locked amplifier 9 according to the frequency of a reference signal, the amplitude is a no-load amplitude, and a proper initial amplitude A is set in the PID controller 10 according to the magnitude of the no-load amplitude₀And starting to regulate parameters of the PID controller 10, enabling the X-Y two-dimensional air floating platform 3 and the three-dimensional piezoelectric displacement platform 4 to start to horizontally move in a preset mode after P, I, D three parameters of the PID controller 10 are modulated to meet the required values, carrying out electrochemical detection, obtaining the amplitude in real time by the phase-locked amplifier 9, and maintaining the amplitudes of the flexible hinges 1-12 and the nano-electrode probes 1-18 at a preset amplitude A when the system stably works₁The tested sample moves continuously in the horizontal direction, and when the concave surface of the tested sample moves to the position of the nano electrode probe 1-18, the nano electrode probe is used for detecting the position of the concave surface of the tested sampleThe electrode probes 1-18 increase in amplitude to an expanded amplitude A₂In order to reach constant amplitude, the control system adjusts the piezoelectric actuator 1-4 according to the voltage signal corresponding to the detected vibration amplitude to enable the piezoelectric actuator to move downwards, so that the nano electrode probe 1-18 and the surface of the detected sample are squeezed, and the amplitude is reduced to be a preset amplitude A₁Thereby completing the concave surface feedback of the detection of the detected sample; when the convex surface of the tested sample moves to the position of the nano electrode probe 1-18, the distance between the nano electrode probe 1-18 and the surface of the tested sample is reduced to form extrusion, and the amplitude of the nano electrode probe 1-18 is reduced to a reduced amplitude A₃In order to reach constant amplitude, the control system adjusts the piezoelectric actuator 1-4 to move upwards according to the voltage signal corresponding to the detected vibration amplitude, so that the extrusion of the nano-electrode probe 1-18 and the surface of the detected sample is reduced, and the amplitude is increased to be a preset amplitude A₁Thereby completing the convex feedback of the detection of the detected sample. In the detection process, the piezoelectric actuators 1-4, the X-Y two-dimensional air flotation platform 3 and the three-dimensional piezoelectric displacement platform 4 transmit position information to the upper computer 5 in real time, electrochemical information of a detected sample detected by the nano electrode probes 1-18 is connected to the electrochemical workstation through external leads 1-15, wherein Z-direction displacement of the three-dimensional piezoelectric displacement platform 4 can be linked with the X, Y direction, and a control algorithm is set in the upper computer 5 by utilizing the prior art, so that the effect of compensating the inclination of the detected sample can be realized.

When the motion range of the three-dimensional piezoelectric displacement table 4 does not meet the use requirement, the X-Y two-dimensional air floating platform 3 is controlled by adopting the same control mode, the motion range of the X-Y two-dimensional air floating platform 3 is generally 100 multiplied by 100mm, and the detection area of most detected samples is met.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.