1. A miniature glass tube check out test set, its characterized in that, it includes:

a base plate (1);

the feeding assembly (2) is fixed to the top of the bottom plate (1), and the feeding assembly (2) comprises a vibration plate (23), a feeding plate (24) connected with the vibration plate (23) and a jig plate (25) arranged on one side of the feeding plate (24);

the light source assembly (3), the said light source assembly (3) includes the light source one (33) that the angle adjustable type sets up above the said tool disc (25);

the positioning assembly (4) comprises a CCD positioning camera (42) which is arranged above the jig disc (25) and faces the jig disc (25) and a light-gathering cover (43) which is fixed on the CCD positioning camera (42);

a conveying assembly (5), wherein the conveying assembly (5) comprises a suction nozzle (59) which is movably arranged above the jig disc (25) in a three-axis mode;

the detection assembly (6) comprises a detection disc (62) rotatably arranged at the top of the bottom plate (1), an inner detection unit (63) which is circumferentially arranged on the bottom plate (1) and is used for detecting the inner side, the outer side and the top of the glass tube, an outer detection unit (64) and a top detection unit (65), and a driving unit for driving the detection disc (62) to rotate;

the blanking assembly (7) is fixed on the bottom plate (1) and comprises a nozzle (74) arranged above the detection plate (62).

2. The miniature glass tube inspection apparatus of claim 1, wherein: light source subassembly (3) are still including fixing support column (31), setting on bottom plate (1) are in angle modulation board (32) at support column (31) top and offer regulation groove (321) on angle modulation board (32), light source spare (33) are fixed on angle modulation board (33).

3. The miniature glass tube inspection apparatus of claim 1, wherein: conveying unit (5) are still including fixing portal frame (50), the setting at bottom plate (1) top are in X axle straight line slip table (51) of portal frame (50) one side, fix X axle movable plate (52), setting on X axle straight line slip table (51) are in Z axle straight line slip table (53) on X axle movable plate (52), fix Z axle movable plate (54) on Z axle straight line slip table (53), set up and be in Y axle straight line slip table (55) on Z axle movable plate (54), fix Y axle movable plate (56) on Y axle straight line slip table (55) and liftable ground set up lifter plate (58) on one side of Y axle movable plate (56), suction nozzle (59) are fixed on lifter plate (58).

4. The miniature glass tube inspection apparatus of claim 1, wherein: the internal detection unit (63) comprises a first vertical plate (631) fixed on the bottom plate (1), an extension plate (632) fixed on the top of the first vertical plate (631) and extending towards the inside of the detection plate (62), and a first CCD camera (633) fixed on one side of the extension plate (632) and facing towards the inner side of the glass tube.

5. The miniature glass tube inspection apparatus of claim 4, wherein: the external detection unit (64) comprises a second vertical plate (641) fixed on the bottom plate (1) and a second CCD camera (643) movably arranged on one side of the second vertical plate (641) and facing the outer side of the glass tube.

6. The miniature glass tube inspection apparatus of claim 5, wherein: the top detection unit (65) comprises a third vertical plate (651) fixed on the bottom plate (1), a light gathering piece (654) fixed on the third vertical plate (651) and located above the glass tube, and a third CCD camera (653) arranged on one side of the third vertical plate (651) in a lifting manner and facing the top of the light gathering piece (654).

7. The miniature glass tube inspection apparatus of claim 1, wherein: the blanking assembly (7) further comprises a fourth vertical plate (71) fixed on the bottom plate (1), a connecting plate (72) fixed at the top of the fourth vertical plate (71) and mounting plates (73) arranged at two ends of the connecting plate (72), and the nozzles (74) are fixed on the mounting plates (73).

8. The miniature glass tube inspection apparatus of claim 2, wherein: the central angle of the adjusting groove (321) is 90 degrees.

9. The miniature glass tube inspection apparatus of claim 6, wherein: the height of the third vertical plate (651) is higher than that of the first vertical plate (631) and the second vertical plate (641).

10. The miniature glass tube inspection apparatus of claim 1, wherein: the driving unit is a servo motor (61).

Background

Within the semiconductor industry, micro glass tubes are commonly used for packaging semiconductors, and therefore have corresponding specification requirements for their size and surface smoothness.

In the prior art, the size is measured by manually using a measuring tool, whether the workpiece is a qualified product is determined by observing the appearance flaw of the workpiece, the technical requirement on workers is high, the labor intensity is high, the workpiece is easy to fatigue, and the production cost of the workpiece is increased.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a miniature glass tube detection device.

In order to achieve the purpose, the invention adopts the technical scheme that: a miniature glass tube inspection apparatus comprising:

a base plate;

the feeding assembly is fixed on the top of the bottom plate and comprises a vibration plate, a feeding plate connected with the vibration plate and a jig plate arranged on one side of the feeding plate;

the light source assembly comprises a light source piece which is arranged above the jig disc in an angle-adjustable manner;

the positioning assembly comprises a CCD positioning camera arranged above the jig disc and facing the jig disc and a light-gathering cover fixed on the CCD positioning camera;

the conveying assembly comprises a suction nozzle which is movably arranged above the jig disc in a three-axis mode;

the detection assembly comprises a detection disc, an inner detection unit, an outer detection unit, a top detection unit and a driving unit, wherein the detection disc is rotatably arranged at the top of the bottom plate, the inner detection unit, the outer detection unit and the top detection unit are circumferentially arranged on the bottom plate and are used for detecting the inner side, the outer side and the top of the glass tube, and the driving unit drives the detection disc to rotate;

the blanking assembly is fixed on the bottom plate and comprises a nozzle arranged above the detection plate.

Optimally, the light source subassembly is still including fixing support column on the bottom plate, setting are in the angle adjusting plate at support column top and offer the adjustment tank on the angle adjusting plate, the light source spare is fixed on the angle adjusting plate.

Optimally, the conveying assembly is still including fixing portal frame, the setting at bottom plate top are in the X axle sharp slip table of portal frame one side, fix X axle movable plate on the X axle sharp slip table, set up and be in Z axle sharp slip table on the X axle movable plate, fix Z axle movable plate on the Z axle sharp slip table, set up and be in Y axle sharp slip table on the Z axle movable plate, fix Y axle movable plate and liftable ground on the Y axle sharp slip table set up the lifter plate of Y axle movable plate one side, the suction nozzle is fixed on the lifter plate.

Preferably, the internal detection unit comprises a first vertical plate fixed on the bottom plate, an extension plate fixed at the top of the first vertical plate and extending towards the inside of the detection plate, and a first CCD camera fixed on one side of the extension plate and facing towards the inner side of the glass tube.

Preferably, the external detection unit comprises a second vertical plate fixed on the bottom plate and a second CCD camera movably arranged on one side of the second vertical plate and facing the outer side of the glass tube.

Preferably, the top detection unit comprises a third vertical plate fixed on the bottom plate, a light gathering part fixed on the third vertical plate and located above the glass tube, and a third CCD camera arranged on one side of the third vertical plate and facing the top of the light gathering part in a liftable manner.

Preferably, the blanking assembly further comprises a fourth vertical plate fixed on the bottom plate, a connecting plate fixed at the top of the fourth vertical plate and mounting plates arranged at two ends of the connecting plate, and the nozzles are fixed on the mounting plates.

Optimally, the central angle of the adjusting groove is 90 degrees.

Optimally, the height of the third vertical plate is higher than the heights of the first vertical plate and the second vertical plate.

Preferably, the drive unit is a servo motor.

Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:

the miniature glass tube detection equipment has high automation degree, adopts the vibration disc for automatic feeding, automatically completes accurate positioning through the CCD positioning camera, and is provided with the nozzle for blowing and automatic discharging; the labor intensity of workers is reduced, the working efficiency is improved, the detection yield is ensured, and the production cost is reduced.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a top view of the present invention;

FIG. 3 is a schematic structural view of a loading assembly according to the present invention;

FIG. 4 is a schematic view of a light source module according to the present invention;

FIG. 5 is a schematic view of an angle adjustment plate according to the present invention;

FIG. 6 is a schematic view of the position relationship between the feeding assembly and the light source assembly according to the present invention;

FIG. 7 is a schematic view of a positioning assembly according to the present invention;

FIG. 8 is a schematic structural view of a delivery assembly of the present invention;

FIG. 9 is a schematic view of another angle of the transfer assembly of the present invention;

FIG. 10 is a schematic structural view of a detecting unit according to the present invention;

FIG. 11 is a schematic view of another angle of the detecting assembly of the present invention;

FIG. 12 is a front view of the detection assembly of the present invention;

FIG. 13 is a top view of a detection assembly of the present invention;

FIG. 14 is a schematic structural view of a blanking assembly of the present invention;

FIG. 15 is a top view of the blanking assembly of the present invention;

description of reference numerals:

1. a base plate;

2. a feeding assembly; 21. a fixing plate; 22. a vibration box; 23. a vibrating pan; 24. a feeding plate; 25. a jig plate;

3. a light source assembly; 31. a support pillar; 32. an angle adjusting plate; 321. an adjustment groove; 33. a light source element;

4. a positioning assembly; 41. a positioning frame; 42. a CCD positioning camera; 43. a light-gathering cover;

5. a delivery assembly; 50. a gantry; 51. an X-axis linear sliding table; 52. moving the plate along the X axis; 53. a Z-axis linear sliding table; 54. moving the plate along the Z axis; 55. a Y-axis linear sliding table; 56. moving the plate along the Y axis; 57. a first lifting cylinder; 58. a lifting plate; 59. a suction nozzle;

6. a detection component; 61. a servo motor; 62. detecting a disc; 63. an internal detection unit; 631. a first vertical plate; 632. an extension plate; 633. a first CCD camera; 64. an external detection unit; 641. a second vertical plate; 642. a moving cylinder; 643. a second CCD camera; 65. a top detection unit; 651. a third vertical plate; 652. a second lifting cylinder; 653. a third CCD camera; 654. a light gathering member;

7. a blanking assembly; 71. a fourth vertical plate; 72. a connecting plate; 73. mounting a plate; 74. and (4) a nozzle.

Detailed Description

The invention will be further described with reference to examples of embodiments shown in the drawings to which the invention is attached.

As shown in fig. 1 to 15, the micro glass tube inspection apparatus of the present invention is generally used for inspecting the size and flaw of a micro glass tube used in the semiconductor industry, and includes a base plate 1, a feeding assembly 2, a light source assembly 3, a positioning assembly 4, a conveying assembly 5, an inspection assembly 6, and a blanking assembly 7.

Wherein, bottom plate 1 is fixed on the processing board, and bottom plate 1 is the rectangle form metal sheet, and the material is the stainless steel, realizes fixedly through bolt and nut complex mode.

As shown in fig. 3, the structure of the feeding assembly 2 is schematically illustrated, and the feeding assembly includes a fixing plate 21, a vibration box 22, a vibration tray 23, a feeding plate 24, and a jig tray 25. The fixing plate 21 is fixed on the upper surface of the base plate 1 by means of screw fastening. Vibration box 22 sets up on fixed plate 21, and vibration dish 23 sets up at vibration box 22 top (install vibrating motor in vibration box 22 for drive vibration dish 23 vibration, vibration dish 23 is lou hopper-shaped, is used for arranging the unordered glass pipe of disorder that the external world drops into in order). The feeding plate 24 is arranged at the bottom of the vibration plate 23 and used for conveying orderly arranged glass tubes. The jig tray 25 is fixed on one side of the feeding plate 24 and is used for receiving the glass tube transferred by the feeding plate 24.

The light source assembly 3 is fixed on the bottom plate 1 and located at one side of the feeding assembly 2, and is used for providing enough light sources for the glass tubes on the jig tray 25, as shown in fig. 4 and 5, and includes a supporting column 31, an angle adjusting plate 32, an adjusting groove 321, and a light source 33. Four support columns 31 are fixed to both sides of the fixed plate 21. The angle adjusting plate 32 has four pieces, which are fixed on the top of the supporting column 31 (the angle adjusting plate 32 is a corner plate with three perpendicular sides, wherein two sides are provided with adjusting grooves 321, and the central angle of the adjusting groove 321 is 90 °). Four light source parts 33 are fixed on the angle adjusting plate 32 (the light source parts 33 can be turned over along the adjusting grooves 321 by 90 degrees, so that four corners of the glass tube on the jig disc 25 can be illuminated, and subsequent positioning of the glass tube is facilitated; in the embodiment, the light source parts 33 are higher than the jig disc 25).

The positioning assembly 4 is fixed on the bottom plate 1 and used for positioning the glass tubes on the jig tray 25, and as shown in fig. 7, the positioning assembly includes a positioning frame 41, a CCD positioning camera 42 and a light-gathering cover 43. The positioning frame 41 is fixed on the bottom plate 1 (fixed by screw fastening). The CCD positioning camera 42 is fixed on the positioning frame 41 and faces the jig plate 25 (the light source 33 provides enough light source for the glass tube on the jig plate 25, so that the positioning accuracy of the CCD positioning camera 42 for the glass tube is improved). The light-collecting cover 43 is sleeved on the CCD positioning camera 42 to prevent the scattering of light from influencing the positioning.

The conveying assembly 5 is arranged on the bottom plate 1 and used for conveying the positioned glass tubes, and as shown in fig. 8 and 9, the conveying assembly comprises a portal frame 50, an X-axis linear sliding table 51, an X-axis moving plate 52, a Z-axis linear sliding table 53, a Z-axis moving plate 54, a Y-axis linear sliding table 55, a Y-axis moving plate 56, a first lifting cylinder 57, a lifting plate 58 and a suction nozzle 59. The portal frame 50 is fixed on the bottom plate 1 (the fixation is realized by the way of matching bolts and nuts). An X-axis linear sliding table 51 is fixed on one side of the gantry 50, and an X-axis moving plate 52 is mounted on the X-axis linear sliding table 51. The Z-axis linear slide table 53 is fixed to the X-axis moving plate 52, and the Z-axis moving plate 54 is fixed to the Z-axis linear slide table 53. The Y-axis linear slide table 55 is fixed to the Z-axis moving plate 54, and the Y-axis moving plate 56 is fixed to the Y-axis linear slide table 55. A first elevation cylinder 57 is fixed to the Y-axis moving plate 56, and an elevation plate 58 is fixed to a guide bar of the first elevation cylinder 57. Suction nozzle 59 is fixed on lifting plate 58 (suction nozzle 59 is used for sucking glass tube on jig disc 25; in this embodiment, suction nozzle 59 can move three-axis above jig disc 25).

The inspection unit 6 is provided on the base plate 1 for inspecting the conveyed glass tube, and as shown in fig. 10 to 13, includes a servo motor 61, an inspection plate 62, an inner inspection unit 63, an outer inspection unit 64, and a top inspection unit 65. The detection disc 62 is rotatably arranged on the bottom plate 1 (the conveying assembly 5 places the conveyed glass tube on the detection disc 62, the detection disc 62 is driven by the driving unit to rotate, the driving unit is a servo motor 61, the servo motor 61 is fixed on the bottom plate 1, and the detection disc 62 is connected with a rotating shaft of the servo motor 61).

The internal detection unit 63 is for detecting the inside of the glass tube, and includes a first vertical plate 631, an extension plate 632, and a first CCD camera 633. First vertical plate 631 is fixed on bottom plate 1, and extension plate 632 is fixed at the top of first vertical plate 631 and extends to the inside of detection dish 62, and first CCD camera 633 is installed in the inboard of extension plate 632 and is used for detecting the inboard of glass pipe.

The external detection unit 64 is for detecting the outside of the glass tube, and includes a second vertical plate 641, a moving cylinder 642, and a second CCD camera 643. The second vertical plate 641 is fixed on the bottom plate 1, and the second CCD camera 643 is movably disposed on one side of the second vertical plate 641 (the second CCD camera 643 is driven by a moving cylinder 642 to move, the moving cylinder 642 is fixed on one side of the second vertical plate 641, and the second CCD camera 643 is connected to a guide rod of the moving cylinder 642).

The top detection unit 65 is used for detecting the top of the glass tube, and includes a third vertical plate 651, a second lifting cylinder 652, a third CCD camera 653, and a light collector 654. The third vertical plate 651 is fixed on the base plate 1 (the height of the third vertical plate 651 is higher than the height of the first vertical plate 631 and the second vertical plate 641). The light gathering piece 654 is fixed on one side of the third vertical plate 651 and is located above the glass tube. The third CCD camera 653 is arranged above the light gathering part 654 in a liftable manner (the third CCD camera 653 is driven by the second lifting cylinder 652 to lift, the second lifting cylinder 652 is fixed on one side of the third vertical plate 651, and the third CCD camera 653 is connected to the guide rod of the second lifting cylinder 652; in this embodiment, the light of the third CCD camera 653 shines on the top of the glass light through the light gathering part 654).

The blanking assembly 7 is fixed on the bottom plate 1 and used for separating qualified products from unqualified products in the glass tubes detected by the detection assembly 6, as shown in fig. 14 and 15, the blanking assembly comprises a fourth vertical plate 71, a connecting plate 72, a mounting plate 73 and a nozzle 74. The fourth vertical plate 71 is fixed on the bottom plate 1 (the fourth vertical plate is fixed by means of matching of bolts and nuts). The connecting plate 72 is fixed to the fourth vertical plate 71 (the connecting plate 72 is in a splayed shape and fixed by a screw fastening mode). The mounting plate 73 has two pieces, which are fixed to both ends of the connecting plate 72, respectively. Two nozzles 74 are provided, which are fixed to the mounting plate 73 (after completion of the inspection, one nozzle 74 is used to eject an unqualified glass tube, and the other nozzle 74 is used to eject a qualified glass tube).

The working principle of the miniature glass tube detection equipment is as follows:

manually placing the glass tubes in the vibration disc 23, driving the vibration disc 23 to vibrate by a vibration motor, and feeding the orderly arranged glass tubes to the jig disc 25 through the feeding plate 24; the light source part 33 provides illumination for the glass tubes on the jig disc 25, and then the CCD positioning camera 42 positions the glass tubes on the jig disc 25; the suction nozzle 59 sucks the positioned glass tube and places the glass tube on the detection disc 62, the servo motor 61 drives the detection disc 62 to rotate, the glass tube on the detection disc 62 sequentially passes through the internal detection unit 63, the external detection unit 64 and the top detection unit 64, and then the qualified product and the unqualified product are sprayed by the two nozzles 74 to be collected.

The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.