1. The real-time contact force measuring method facing the joint type coordinate measuring machine is characterized in that: using a joint type coordinate measuring machine (1) with an integrated force sensor measuring head (2) fixed on a tail end joint as a real-time contact force measuring device; the measuring method specifically comprises the following steps:

step one, starting a real-time contact force measuring device based on an articulated coordinate measuring machine to complete startup preheating;

fixing J positioning devices in a measuring space of the real-time contact force measuring device;

thirdly, operating the preheated real-time contact force measuring device, detecting the position of the positioning device by using the measuring head of the integrated force sensor, sampling each position for N times by using different postures and different contact forces, and recording the contact force f read by the measuring head of the integrated force sensor during each sampling_i＝(f_x,f_y,f_z) And the reading value theta of the circular grating angle encoder_i＝(θ₁,θ₂,θ₃,θ₄,θ₅,θ₆)；f_x,f_y,f_zRepresenting the contact forces, theta, in the x-, y-and z-axis directions, respectively₁～θ₆Respectively representing the reading values of 6 circular grating angle encoders;

step four, integrating a measuring probe deformation model on the basis of the Denavit-Hartenberg model, and constructing the following theoretical mathematical model of the real-time contact force measuring device

Wherein the content of the first and second substances,for integrating mathematical models of force-sensor probes relative to the base coordinate system, A₁～A₆Respectively homogeneous transformation matrices of adjacent coordinate systems, A₇For integrating force transducer probe with respect to A₆The coordinate transformation matrix of (2); c is an angle correction matrix, Δ A_x、ΔA_y、ΔA_zRespectively are displacement matrixes of the stress deformation of the measuring needle in the directions of an x axis, a y axis and a z axis;

obtaining the actual coordinates (x, y, z) of the measuring head of the integrated force sensor according to the model (1) as follows:

wherein, P is a kinematic parameter set,

P＝(θ_0,1,θ_0,2,θ_0,3,θ_0,4,θ_0,5,θ_0,6,α₁,α₂,α₃,α₄,α₅,α₆,a₁,a₂,a₃,a₄,a₅,a₆,d₁,d₂,d₃,d₄,d₅,d₆,l,δ,k₁,b₁,k₂,b₂,

wherein theta is_0,iIs zero offset of joint, d_iIs the length of the connecting rod, a_iLength of joint, alpha_iJoint torsion angle, i ═ 1, 2.. 6;

Q＝(θ₁,θ₂,θ₃,θ₄,θ₅,θ₆,f_x,f_y,f_z) Integrating independent variables consisting of contact force values read by a measuring head of the force sensor and reading values of a circular grating angle encoder;

step five, calculating the variance sum of the measurement result in the three directions of the x axis, the y axis and the z axis as a target function, eliminating redundant linear related parameters in the kinematic parameter set P, and then finding out a structural parameter which enables the target function to be minimum in the parameter searching range to be identified by using an intelligent algorithm to output; theoretical mathematical model for inputting identified kinematic parameter set to real-time contact force measuring deviceIn the middle, completing the calibration of the device;

step six, according to the theoretical mathematical model calibrated in the step fiveObtaining the measuring ranges [ -t ] of the real-time contact force measuring device in the three directions of the x axis, the y axis and the z axis_x,t_x],[-t_y,t_y],[-t_z,t_z]The real-time contact force measuring device is used for measuring, the integrated force sensor measuring head transmits collected contact measuring force data to the computer, whether the contact measuring force data exceed a measuring range is judged, and when the contact measuring force data exceed the measuring range, the device gives an alarm.

2. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: before starting preheating, the real-time contact force measuring device is placed in the same temperature field for not less than 4 hours, the starting preheating process is not less than 0.5 hour, and the change of the environmental temperature is not more than 1.0 ℃/h.

3. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: the positioning device is a three-ball conical nest positioning device (3) and comprises a three-ball conical nest shaft (3-1) and a calibration seat (3-2), wherein three spheres which are arranged in a regular triangle shape are arranged on the upper end face of the three-ball conical nest shaft (3-1), the three-ball conical nest shaft (3-1) is fixedly installed on the calibration seat (3-2), and threaded holes are uniformly distributed in the calibration seat (3-2) along the circumferential direction and used for fixing the three-ball conical nest positioning device (3).

4. A real-time contact force measuring method for an articulated coordinate measuring machine according to claim 1 or 3, characterized in that: the number of the three-ball cone nest positioning devices (3) is 3, the three-ball cone nest positioning devices (3) are separated by 120 degrees, the distances from the joint type coordinate measuring machine (1) are respectively 20% R, 60% R and 80% R, and R is the measuring radius of the joint type coordinate measuring machine (1).

5. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: the real-time contact force measuring device performs no less than 50 sampling measurements for each position.

6. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: the fifth step specifically comprises the following steps:

step 5.1, determining the objective function

Calculating the variance sum of the results of N times of measurement sampling of the jth three-ball cone fossa positioning device in the three directions of the x axis, the y axis and the z axis:

wherein (x)_n，y_n，z_n) Actual coordinates of an integrated force sensor measuring head for the nth measurement(x, y, z) is the average of the N measurements as a precise coordinate result;

the following objective function is established:

step 5.2, eliminating redundant linear correlation parameter joint torsion angle alpha in kinematic parameter set P₆And joint angle theta_0,6And the independent parameter joint angle theta_0,1And link length d₁；

Step 5.3, substituting the data acquired in the step three, and identifying the structural parameters of the real-time contact force measuring device by using an intelligent algorithm; inputting the identified kinematic parameter set into a theoretical mathematical model of a real-time contact force measuring deviceIn the middle, the calibration of the device is completed.

7. The real-time contact force measurement method for an articulated coordinate measuring machine according to claim 1 or 6, characterized in that: and the intelligent algorithm selected in the fifth step is a genetic algorithm, a particle swarm algorithm or a differential evolution algorithm.

8. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: the method further comprises the following steps:

step seven, calculating the standard degree of operation;

defining a parameter Q_F：

Q_F＝Error_DH/Error_F-DH (5)

Wherein, Error_DHAnd Error_F-DHRespectively represent the results of one measurement by means of the Denavit-Hartenberg model andgeometric error obtained by model calculation; when Q is_FThe closer to 1 the absolute value of (A) represents the more standard the measurement operation at this time, and conversely, Q_FThe more the absolute value of (a) deviates from 1, the less standard the measurement operation at this time becomes.

9. The articulated coordinate measuring machine-oriented real-time contact force measurement method of claim 1, wherein: the used real-time contact force measuring device comprises an articulated coordinate measuring machine (1), an integrated force sensor measuring head (2) and a computer (4);

the joint type coordinate measuring machine (1) comprises six joints, a circular grating angle encoder (1-10) is arranged in each joint, an indicator lamp (1-8) and a buzzing alarm device (1-9) are arranged on a tail end swinging joint (1-7), and the joint type coordinate measuring machine (1) is connected with a computer (4) through a cable;

the integrated force sensor measuring head (2) comprises a measuring head threaded connecting piece (2-1), a three-dimensional force sensor (2-2), a connecting bottom plate (2-3) and a measuring needle (2-4); one end of the three-dimensional force sensor (2-2) is fixedly connected with the measuring head threaded connecting piece (2-1), the other end of the three-dimensional force sensor is fixedly connected with the connecting bottom plate (2-3), and a threaded hole is formed in the center of the connecting bottom plate (2-3) and used for fixedly mounting the measuring needle (2-4); the integrated force sensor measuring head (2) is fixedly connected with the tail end of the joint type coordinate measuring machine (1);

and the computer (4) comprises a three-dimensional force sensor signal collector and a circular grating angle coding acquisition card.

10. The real-time contact force measurement method for an articulated coordinate measuring machine according to claim 1 or 8, characterized in that: the articulated coordinate measuring machine (1) selects Haekang RA-7125, and comprises a base (1-1), three rotary joints (1-2), (1-4), (1-6), three swing joints (1-3), (1-5), (1-7) and circular grating angle encoders (1-10) inside six joints; the base (1-1) and six joints (1-2), (1-3), (1-4), (1-5), (1-6) and (1-7) are sequentially connected in series to form a space open chain structure.

Background

An Articulated Coordinate Measuring Machine (AACMM) is a non-orthogonal coordinate measuring machine with multiple degrees of freedom, an open-chain structure is formed by connecting a measuring arm and a rotary joint in series, a length measuring reference is replaced by an angle measuring reference, and the articulated coordinate measuring machine has the advantages of simple structure, small volume, large measuring range, convenience in field use and the like, and is widely applied to the fields of industrial production and scientific research. However, due to the serial open chain structure, errors of the measuring machine can be accumulated and amplified, and compared with a traditional orthogonal coordinate measuring machine, the overall measuring precision is different greatly. In order to expand the application field of the articulated coordinate measuring machine, it is very important to improve the accuracy of the articulated coordinate measuring machine.

Currently, means for improving the precision of an articulated coordinate measuring machine mainly focus on hardware aspects of the measuring machine, such as calibration of structural parameters, preference of measurement pose and measurement area, compensation of temperature errors and the like, and these means can better eliminate system errors existing in the measuring machine, but cannot better control random errors brought by an operator, such as contact force, optimal motion track, stable contact direction and the like. The contact force is one of main parameters measured by an operator, and due to the existence of the contact measurement force, the actual geometric shape of a measuring head of the coordinate measuring machine is different from a theoretical kinematic model, so that measurement errors are caused. The existing articulated coordinate measuring machine can calibrate the structural parameters through regular calibration so as to improve the precision, but the influence of the contact force which is a factor is usually ignored in the calibration and measurement processes, and the calibration error and the measurement error caused by the contact force in the process cannot be compensated. In addition, the measurement habit of the operator has a decisive influence on the measurement parameters such as the contact force, the measurement stability and the probe direction, so that different operators use the same articulated coordinate measuring machine to cause different final measurement accuracies. In order to reduce the influence of human factors on the measurement accuracy and maintain the measurement accuracy of the articulated coordinate measuring machine, the contact measurement force error needs to be compensated.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides a using method of a real-time contact force measuring device for an articulated coordinate measuring machine.

The real-time contact force measuring device based on the articulated coordinate measuring machine comprises the articulated coordinate measuring machine, an integrated force sensor measuring head and a computer.

The joint type coordinate measuring machine comprises six joints, a circular grating angle encoder is arranged in each joint, an indicator lamp and a buzzing alarm device are arranged on a tail end swinging joint, and the joint type coordinate measuring machine is connected with a computer through a cable.

The integrated force sensor measuring head comprises a measuring head threaded connecting piece, a three-dimensional force sensor, a connecting bottom plate and a measuring needle. The upper end of the three-dimensional force sensor is fixedly connected with the measuring head threaded connecting piece, the lower end of the three-dimensional force sensor is fixedly connected with the connecting bottom plate, and a threaded hole is formed in the center of the connecting bottom plate and used for fixedly mounting the measuring needle. And the integrated force sensor measuring head is fixedly connected with the tail end of the joint type coordinate measuring machine.

The computer comprises a three-dimensional force sensor signal collector and a circular grating angle coding acquisition card.

Preferably, Haekington RA-7125 is selected as the articulated coordinate measuring machine.

Preferably, the range of the three-dimensional force sensor is 0-10N.

The use method of the real-time contact force measuring device facing the articulated coordinate measuring machine specifically comprises the following steps:

step one, starting a real-time contact force measuring device based on an articulated coordinate measuring machine, and operating for a period of time at a stable temperature to finish startup preheating.

Preferably, before starting preheating, the real-time contact force measuring device is placed in the same temperature field for not less than 4 hours, the starting preheating process is not less than 0.5 hour, and the change of the environmental temperature is not more than 1.0 ℃/h.

And step two, fixing the J three-ball conical socket positioning devices in a measurement space of the real-time contact force measurement device.

The three-ball conical nest positioning device comprises a three-ball conical nest shaft and a calibration seat, wherein three balls which are arranged in a regular triangle shape are arranged on the upper end face of the three-ball conical nest shaft, the three-ball conical nest shaft is fixedly installed on the calibration seat, and four countersunk threaded holes are uniformly distributed on the calibration seat along the circumferential direction and used for fixing the three-ball conical nest positioning device.

Step three, operating the preheated real-time contact force measuring device, placing the integrated force sensor measuring head in a triangular-conical-socket shaft of the triangular-conical-socket positioning device, sampling each position for N times with different postures and different contact forces, and recording the contact force f read by the integrated force sensor measuring head during each sampling_i＝(f_x,f_y,f_z) And the reading value theta of the circular grating angle encoder is (theta)₁,θ₂,θ₃,θ₄,θ₅,θ₆)；f_x,f_y,f_zRepresenting the contact forces, theta, in the x-, y-and z-axis directions, respectively₁～θ₆Respectively, the read values of 6 circular grating angle encoders.

Step four, in order to compensate the contact measurement force error, a measuring needle deformation model is integrated on the basis of a D-H (Denavit-Hartenberg) model, and the following theoretical mathematical model of the real-time contact force measuring device is constructed

Wherein the content of the first and second substances,for integrating mathematical models of force-sensor probes relative to the base coordinate system, A₁～A₆Respectively homogeneous transformation matrices of adjacent coordinate systems, A₇For integrating force transducer probe with respect to A₆The coordinate transformation matrix of (2); c is an angle correction matrix, Δ A_xIs a displacement matrix of the stress deformation of the measuring needle in the x direction, delta A_yIs a displacement matrix of the stress deformation of the measuring needle in the y direction, delta A_zIs a displacement matrix of the stress deformation of the measuring needle in the z direction.

Obtaining the actual coordinates (x, y, z) of the measuring head of the integrated force sensor according to the model (1) as follows:

x＝F_x(P,Q)

y＝F_y(P,Q)

z＝F_z(P,Q) (2)

wherein P is a kinematic parameter set consisting of 31 kinematic parameters of the real-time contact force measuring device,

P＝(θ_0,1,θ_0,2,θ_0,3,θ_0,4,θ_0,5,θ_0,6,α₁,α₂,α₃,α₄,α₅,α₆,a₁,a₂,a₃,a₄,a₅,a₆,d₁,d₂,d₃,d₄,d₅,d₆,l,δ,k₁,b₁,k₂,b₂,k₃)

wherein theta is_0,iIs zero offset of joint, d_iIs the length of the connecting rod, a_iLength of joint, alpha_iJoint torsion angle, i ═ 1, 2.. 6. Q ═ θ₁,θ₂,θ₃,θ₄,θ₅,θ₆,f_x,f_y,f_z) Contact force value read for integrated force sensor measuring head and read value composition of circular grating angle encoderIs used as the argument of (1).

And fifthly, identifying the structural parameters of the real-time contact force measuring device by using an intelligent algorithm, and calibrating the parameters in the kinematic parameter set P. The method specifically comprises the following steps:

step 5.1, determining the objective function

Calculating the variance sum of N times of measurement sampling results of the jth three-ball cone fossa positioning device in the three directions of the x axis, the y axis and the z axis:

wherein (x)_n，y_n，z_n) For the actual coordinates of the integrated force sensor probe measured the nth time,and the average value of the N times of measurement results is used as an accurate coordinate result.

The following objective function is established:

step 5.2, eliminating redundant linear correlation parameter joint torsion angle alpha in kinematic parameter set P₆And joint angle theta_0,6And the independent parameter joint angle theta_0,1And link length d₁。

And 5.3, substituting the data acquired in the third step, and identifying the structural parameters of the real-time contact force measuring device by using an intelligent algorithm. Inputting the identified kinematic parameter set into a theoretical mathematical model of a real-time contact force measuring deviceIn the middle, the calibration of the device is completed.

Preferably, the selected intelligent algorithm is a genetic algorithm, a particle swarm algorithm or a differential evolution algorithm.

Step six, marking according to step 5.3Definite theoretical mathematical modelObtaining the measuring ranges [ -t ] of the real-time contact force measuring device in the three directions of the x axis, the y axis and the z axis_x,t_x],[-t_y,t_y],[-t_z,t_z]The real-time contact force measuring device is used for measuring, the integrated force sensor measuring head transmits collected contact measurement force data to the computer, whether the data exceed a measurement range is judged, and when the data exceed the measurement range, the indicator lamp flickers and the buzzing alarm device gives a sound alarm.

And step seven, calculating the standard degree of operation.

Defining a parameter Q_F：

Q_F＝Error_DH/Error_F-DH (5)

Wherein, Error_DHAnd Error_F-DHRespectively represent the results of one measurement by means of the Denavit-Hartenberg model andgeometric error obtained by model calculation; when Q is_FThe closer to 1 the absolute value of (A) represents the more standard the measurement operation at this time, and conversely, Q_FThe more the absolute value of (a) deviates from 1, the less standard the measurement operation at this time becomes.

In the prior art, no label is used for guiding the measurement process of operators, each operator follows own measurement standard and strategy, and the average Q of the operators is measured if the operation standard degree of one operator measured for multiple times is calculated_FIf the value is closer to 1, the standard of the operation process of the operator is indicated, and the measurement technology level is higher, otherwise, the nonstandard behavior exists in the operation process of the operator, training is required, and the measurement technology is improved.

The invention has the following beneficial effects:

1. the stylus deformation model is integrated into a kinematic model, 25 error parameters of the original articulated coordinate measuring machine are expanded into 31 error parameters, contact measuring force data can be substituted, coordinates of points are modified, error compensation of contact measuring force is achieved, influences of human factors on the precision of the articulated coordinate measuring machine are reduced, and the precision of the articulated coordinate measuring machine is maintained.

2. The joint type coordinate measuring machine integrated with the force measuring module can evaluate the measurement technology of an operator and evaluate the measurement technology level of the operator by measuring the contact force, and can also be used as a training tool of the operator to standardize the measurement of the operator, so that the detection technology of the operator is improved, and the influence of human factors on the precision of the joint type coordinate measuring machine is reduced.

3. The structure parameter calibration and the measuring head deflection parameter calibration of the articulated coordinate measuring machine can be completed by one-time calibration, the measuring head deflection parameter does not need to be independently identified to compensate the contact measuring force error, the calibration workload is reduced, and the operation is simple and convenient.

4. The tail end joint is provided with the indicating lamp and the buzzing alarm device, so that an operator can obtain feedback during measurement, the occurrence of gross errors is avoided, and the influence of human factors is reduced.

Drawings

FIG. 1 is a schematic view showing the overall structure of a measuring apparatus according to an embodiment;

FIG. 2 is a schematic diagram of an embodiment of an articulated coordinate measuring machine;

FIG. 3 is a perspective view of an integrated force transducer probe structure in an embodiment;

FIG. 4 shows the placement of the device according to the embodiment;

FIG. 5 is a perspective view of the structure of the three ball socket positioning device in the embodiment;

FIG. 6 is a schematic view of the probe undergoing a bending deformation under force;

FIG. 7 is a schematic flow chart of the identification parameters of the intelligent algorithm in the embodiment;

FIG. 8 is a comparison graph of the model contact measurement force error compensation in the examples.

Detailed Description

The invention is further explained below with reference to the drawings;

as shown in fig. 1, the real-time contact force measuring apparatus facing an articulated coordinate measuring machine includes an articulated coordinate measuring machine 1, an integrated force sensor probe 2, and a computer 4.

As shown in figure 2, the articulated coordinate measuring machine adopts Haekuss RA-7125, which comprises a base 1-1, three rotary joints 1-2, 1-4 and 1-6, three swing joints 1-3, 1-5 and 1-7 and circular grating angle encoders 1-10 in six joints. From a base 1-1, three rotary joints 1-2, 1-4 and 1-6 and three swing joints 1-3, 1-5 and 1-7 are connected in series to form a space open chain structure. An indicator light 1-8 and a buzzer alarm device 1-9 are arranged on the tail end swing joint 1-7 and used for feeding back the working state of the joint type coordinate measuring machine. The articulated coordinate measuring machine 1 is connected to the computer 4 by a cable. The computer 4 comprises a three-dimensional force sensor signal collector and a circular grating angle coding acquisition card.

As shown in fig. 3, the integrated force sensor measuring head 2 comprises a measuring head threaded connector 2-1, a three-dimensional force sensor 2-2, a connecting bottom plate 2-3 and a measuring needle 2-4. The upper end of the three-dimensional force sensor 2-2 is fixedly connected with the measuring head threaded connecting piece 2-1, the lower end of the three-dimensional force sensor is fixedly connected with the connecting bottom plate 2-3, and a threaded hole is formed in the center of the connecting bottom plate 2-3 and used for fixedly mounting the measuring needle 2-4. The integrated force sensor measuring head 2 is fixedly connected with the tail end of the joint type coordinate measuring machine 1. The range of the three-dimensional force sensor 2-2 is selected in relation to the measuring radius of the articulated coordinate measuring machine 1, and the larger the measuring radius is, the larger the range of the corresponding three-dimensional force sensor 2-2 used in cooperation should be. In the embodiment, the measuring range of the three-dimensional force sensor 2-2 is 0-10N.

The use method of the real-time contact force measuring device facing the articulated coordinate measuring machine specifically comprises the following steps:

step one, placing a real-time contact force measuring device based on an articulated coordinate measuring machine in the same temperature field for 4 hours, and then operating for 0.5 hour under the condition that the temperature change does not exceed 1.0 ℃/h to complete startup preheating.

Step two, in order to enable all the circular grating angle encoders of the articulated coordinate measuring machine 1 to achieve maximum steering, the three spherical-cone-socket positioning devices 3 need to be placed at least at three positions in a fixed plane of a base of the articulated coordinate measuring machine 1, and the three positions are uniformly distributed in a 360-degree range, so that the 3 spherical-cone-socket positioning devices are fixed at the positions shown in fig. 4, wherein the distances from the 3 spherical-cone-socket positioning devices 3 to the articulated coordinate measuring machine 1 are respectively 20% R, 60% R and 80% R, and R is the measuring radius of the articulated coordinate measuring machine.

As shown in fig. 5, the three-ball conical socket positioning device 3 comprises a three-ball conical socket shaft 3-1 and a calibration base 3-2, wherein three spheres arranged in a regular triangle are arranged on the upper end surface of the three-ball conical socket shaft 3-1, the three-ball conical socket shaft 3-1 is fixedly mounted on the calibration base 3-2 through bolts, and four countersunk head threads 3-3 holes are uniformly distributed on the calibration base 3-2 along the circumferential direction and used for fixing the three-ball conical socket positioning device 3. The three-ball conical nest positioning device 3 is used as a calibration piece, and physical constraints are added to the integrated force sensor measuring head 2, so that the posture of the articulated coordinate measuring machine 1 is constantly changed in the measuring process, and the measuring needle 2-4 of the integrated force sensor measuring head 2 can be always kept at one point.

Step three, operating the preheated real-time contact force measuring device, placing the integrated force sensor measuring head 2 in a triangular pyramid socket shaft 3-1 of a triangular pyramid socket positioning device 3, sampling each position for 50 times with different postures and different contact forces, increasing the angle information acquisition of each joint as much as possible in the data acquisition process, covering the size range of the common contact measuring force by the acquired contact force, recording the contact force sampling range [ -t ] of each direction_x,t_x],[-t_y,t_y],[-t_z,t_z]. Recording the contact force f read by the integrated force sensor probe 2 at each sampling_i＝(f_x,f_y,f_z) And the reading value theta of the circular grating angle encoder is (theta)₁,θ₂,θ₃,θ₄,θ₅,θ₆)；f_x,f_y,f_zRepresenting the contact forces, theta, in the x-, y-and z-axis directions, respectively₁～θ₆Respectively, the read values of 6 circular grating angle encoders.

Step four, establishing a mathematical model of the joint type coordinate measuring machine terminal measuring head relative to the base coordinate system based on a D-H (Denavit-Hartenberg) model:

wherein θ_0,iIs zero offset of joint, d_iIs the length of the connecting rod, a_iLength of joint, alpha_iJoint torsion angle, i ═ 1, 2.. 6.

As shown in fig. 6, during the use of the articulated coordinate measuring machine, the stylus is deformed due to the application of the contact operation force, so that the actual coordinate point deviates from the kinematic model calculation point. In order to compensate the contact measurement force error, a measuring needle deformation model is integrated on the basis of a D-H (Denavit-Hartenberg) model, and the following theoretical mathematical model of the real-time contact force measuring device is constructed

Wherein, δ, k₁,b₁,k₂,b₂,k₃In order to introduce kinematic parameters of the joint type coordinate measuring machine newly added after the measuring pin deformation model, delta is an installation deflection angle and is used for compensating installation deviation of a force coordinate system of the three-dimensional force sensor and a 6 th joint coordinate system. b₁,b₂The initial runout of the measuring needle in the directions of the x axis and the y axis is respectively. k is a radical of₁,k₂,k₃The deflection deformation coefficients in the x-axis direction and the y-axis direction and the compression deformation coefficient in the z-axis direction are respectively as follows:

wherein, L is the effective length of the measuring needle, D is the diameter of the measuring needle, E is the elastic modulus of the measuring needle, and M is the inertia moment of the section of the measuring needle.

And step five, the actual kinematic parameters of the measuring machine deviate from theoretical design values due to machining errors, assembly errors and the like, so that the precision of the articulated coordinate measuring machine is influenced. And the actual kinematic parameters and the theoretical kinematic parameters of the articulated coordinate measuring machine have deviation, so that the point coordinates obtained by calculation are different when the measuring machine measures the same point at different postures every time. In order to improve the measurement precision of the measuring machine, algorithm identification is needed to obtain more accurate structural parameters so as to ensure that the measurement precision of the articulated coordinate measuring machine is within a design precision range, the structural parameters of the real-time contact force measuring device are identified by using a differential evolution-simplex intelligent algorithm which has strong global search capability and high search speed, and the parameters in the kinematic parameter set P are calibrated. The method specifically comprises the following steps:

and 5.1, for the articulated coordinate measuring machine, the importance of the measurement precision in the three directions of the x axis, the y axis and the z axis is consistent. The sum of the variances of the measurement results in the three directions x, y, z is thus calculated as the objective function.

Firstly, calculating the variance sum of the sampling results of the jth three-ball cone fossa positioning device in the three directions of the x axis, the y axis and the z axis for 50 times:

wherein, N is 50, (x)_n，y_n，z_n) For the actual coordinates of the integrated force sensor probe measured the nth time,and the average value of the N times of measurement results is used as an accurate coordinate result.

The following objective function is established:

and 5.2, in the 31 parameters to be calibrated obtained by the joint type coordinate measuring machine, the algorithm cannot accurately identify some linear related parameters. The redundant linear correlation parameters need to be eliminated before parameter identification. Due to the length d of the connecting rod₆And joint torsion angle alpha₆Linear dependence, joint length a₆And joint angle theta_0,6Linearly related and therefore will not twist the joint by an angle alpha₆And joint angle theta_0,6And (5) performing identification. Other joint angle theta_0,1Length d of connecting rod₁The error of (2) does not affect the accuracy of the measuring machine, and therefore the two independent parameters are not identified^[1]. So that the final structural parameter to be identified is

P_actual＝(θ_0,2,θ_0,3,θ_0,4,θ_0,5,α₁,α₂,α₃,α₄,α₅,a₁,a₂,a₃,a₄,a₅,a₆,d₂,d₃,d₄,d₅,d₆,l,δ,k₁,b₁,k₂,b₂,k₃)，

And 5.3, substituting the data acquired in the third step into the data acquired in the third step as shown in fig. 7, and finding out a structural parameter which enables the target function to be minimum within a proper parameter searching range to be identified by using an intelligent algorithm to output. Inputting the identified kinematic parameter set into the theoretical mathematical model of the real-time contact force measuring deviceIn the middle, the calibration of the device is completed.

Step six, according to the theoretical mathematical model calibrated in the step 5.3Obtaining the measuring ranges [ -t ] of the real-time contact force measuring device in the three directions of the x axis, the y axis and the z axis_x,t_x],[-t_y,t_y],[-t_z,t_z]The real-time contact force measuring device is used for measuring, the integrated force sensor measuring head 2 transmits collected contact measuring force data to the computer 4, whether the contact measuring force data exceed a measuring range is judged, and when the contact measuring force data exceed the measuring range, the indicator lamps 1-8 flicker and the buzzing alarm devices 1-9 buzze to give an alarm.

And step seven, in order to realize the calculation of the standard degree of the operation process of the operator and further realize the evaluation of the measurement technology, starting from the measurement result of the AACMM, a new parameter is provided for calculating the standard degree of the operation process.

Defining a parameter Q_F：

Q_F＝Error_DH/Error_F-DH (6)

Wherein, Error_DHAnd Error_F-DHRespectively represent the results of one measurement by means of the Denavit-Hartenberg model andgeometric error obtained by model calculation;

assuming a fixed rod, the length after calibration by a three-coordinate measuring machine (the measuring precision is one order of magnitude higher than that of the existing articulated coordinate measuring machine) is L_cal. The two end points of the rod piece are measured by the device, and the two measured angle encoder values theta are substituted into (theta)₁,θ₂,θ₃,θ₄,θ₅,θ₆) Calculating to obtain the length L by using a D-H model and a two-point distance formula_DHThe two angle encoder values and the measurement force value Q of the measurement are substituted by (θ)₁,θ₂,θ₃,θ₄,θ₅,θ₆,f_x,f_y,f_z) Use ofThe length L is obtained by calculating a model and a two-point distance formula_F-DH. Then Q of this measurement_FThe values are:

from the definition of the formula, Q_FThe closer to 1 the absolute value of (A) is, the smaller the error caused by the contact force in the measurement process is, the more standard the measurement operation is, the higher the measurement quality is, and Q_FThe more deviated the absolute value of1, it means that the error caused by the contact force in the measurement process is large, which reflects that there is abnormal operation in the measurement process, and the measurement quality is low. In multiple measurements by one measurement operator, if Q_FIf the average absolute value of the absolute value is closer to 1, the operation of the measurement operator in the measurement process is more standard, and the technical level is higher, otherwise, the operation of the operator in the measurement process is nonstandard, training is needed, and the measurement technology is improved.

Based on the use method, the assessment of the measurement technology of the AACMM measurement operator can be realized, or the AACMM measurement operator can be used as a training tool to standardize the measurement technology of the measurement operator, so that the proficiency of the measurement operator is improved.

The present embodiment is a front-to-back pair of touch measurement force error compensation as shown in fig. 8. The result shows that the measuring device and the method based on the embodiment effectively improve the influence of the contact measuring force on the precision of the articulated coordinate measuring machine.