Polishing device for treating metal surface of steel structure

文档序号:182 发布日期:2021-09-17 浏览:53次 中文

1. The utility model provides a burnishing device for handling steel construction metal surface, includes base (1), and the top fixed mounting of base (1) one side has headstock (2), and the top movable mounting of base (1) opposite side has feed box (3), its characterized in that: a main shaft ring (4) is movably mounted on one side, close to a feeding box (3), of the main shaft box (2), clamps (5) are uniformly and fixedly mounted on the outer side of the main shaft ring (4) in an annular shape, an annular transmission cavity (301) is formed in the feeding box (3), first sliding grooves (303) are formed in positions, located on two sides of the top and the bottom of the transmission cavity (301), in the feeding box (3), first sliding sleeves (7) are movably sleeved in the first sliding grooves (303), a rotating shaft (8) with one end extending out of the feeding box (3) is movably sleeved in the middle of each first sliding sleeve (7), a motor (17) is fixedly mounted on the front face of the middle of the feeding box (3), a driving shaft (1701) extending into the transmission cavity (301) is fixedly connected to the output end of the motor (17), and a transmission chain (19) is movably sleeved between the outer ring of the driving shaft (1701) and the outer ring of the rotating shaft (8), the polishing device is characterized in that a polishing wheel (9) is fixedly mounted on the outer ring of the extending end of the rotating shaft (8), an annular adjusting groove (201) is formed in the middle of one side, close to the feeding box (3), of the spindle box (2), a limiting sleeve (11) is movably mounted in the middle of the adjusting groove (201), an adjusting shaft (12) with one end fixedly connected with the side face of the limiting sleeve (11) is movably mounted in the middle of the spindle box (2), a sleeve groove (1101) is formed in the middle of the limiting sleeve (11), two limiting sliding strips (13) are sleeved inside the sleeve groove (1101), and a ring sleeve (14) which is movably sleeved with the rotating shaft (8) is fixedly connected to the outer end of each limiting sliding strip (13).

2. A polishing device for treating a metal surface of a steel structure according to claim 1, characterized in that: an adjusting limiting seat (6) is fixedly installed in the middle of one side, close to a spindle box (2), of the feeding box (3), a limiting groove (601) for a rotating shaft (8) to penetrate through is formed in the adjusting limiting seat (6), an adjusting head (10) is fixedly connected to the middle of the outer end of the adjusting limiting seat (6), hydraulic grooves (1001) are respectively formed in two sides of the inner portion of the adjusting head (10) and located in the middle of a polishing wheel (9), a piston sliding block (15) is movably sleeved on the outer end portion of each hydraulic groove (1001), a roller (16) is movably installed on the outer end portion of each piston sliding block (15), a hydraulic hole (302) is formed in the center of the inner portion of the feeding box (3), the bottom of a first sliding sleeve (7) is movably sleeved inside the hydraulic hole (302), a second sliding groove (304) is formed in the inner portion of the feeding box (3) and located on the back of a transmission cavity (301), the inside activity of second spout (304) has cup jointed second slip cap (18), second slip cap (18) middle part movable mounting has outer lane and driving chain (19) meshed transmission tooth axle (1801), feed box (3) inside is located hydraulic pressure hole (302) and openly offers atmospheric pressure chamber (305) rather than the intercommunication, feed box (3) inside is located hydraulic pressure hole (302) back position and has offered hydraulic pressure regulation chamber (306), the back of hydraulic pressure regulation chamber (306) and the end activity of stretching out of second slip cap (18) are cup jointed, atmospheric pressure chamber (305) and hydraulic pressure hole (302) intercommunication department activity have cup jointed pressure plug (20), one side fixed mounting at feed box (3) middle part has cylinder (21) with atmospheric pressure chamber (305) intercommunication.

3. A polishing device for treating a metal surface of a steel structure according to claim 2, characterized in that: the maximum sliding distance of the first sliding sleeve (7) in the first sliding groove (303), the maximum sliding distance of the limiting sliding strip (13) in the sleeve groove (1101) and the maximum sliding distance of the rotating shaft (8) in the limiting groove (601) are the same.

4. A polishing device for treating a metal surface of a steel structure according to claim 2, characterized in that: the hydraulic grooves (1001) are not communicated with each other in the adjusting head (10), the hydraulic adjusting cavity (306) is communicated with the two hydraulic grooves (1001) through a communicating hole, and the distance of the piston slide block (15) pushed inwards by hydraulic pressure is equal to the distance of the first sliding sleeve (7) adjusted by the second sliding sleeve (18).

5. A method of using the polishing apparatus for treating a metal surface of a steel structure according to any one of claims 1 to 4, comprising the steps of:

s1, clamping the workpiece (22), sleeving the end of the rotating shaft (8) into the ring sleeve (14), locking the adjusting shaft (12), adjusting to the required air pressure through the air cylinder (21) and enabling the air pressure cavity (305) to have the same air pressure as the air pressure cavity;

s2, the starting motor (17) drives the rotating shaft (8) to rotate through the transmission chain (19) and enables the polishing wheel (9) to polish the inner ring of the workpiece (22);

s3, rollers (16) at two ends of the adjusting head (10) are in contact with the inner ring of the workpiece (22) and adjust the second sliding sleeve (18) through internal hydraulic pressure to drive the first sliding sleeve (7) to adjust, and the rotating shaft (8) drives the polishing wheel (9) to adjust and continues to polish the workpiece (22);

and S4, polishing until the inner ring of the workpiece (22) reaches a preset diameter, enabling the first sliding sleeve (7) to be in a stable position, and stopping the machine to take down the workpiece (22) to finish polishing.

Background

Steel structure metal is required to be applied in many places in life, a metal workpiece needs to be processed before the required steel structure metal is obtained, generally, a machine tool or a machining center is adopted to carry out operations such as turning, grinding, polishing and the like on a base metal workpiece, wherein surface polishing is required to be carried out on some annular metal workpieces so as to reach the use standard, a commonly used polishing device utilizes a polishing wheel arranged at the end part of a rotating shaft to carry out polishing and polishing on the workpiece fixed on a main shaft, particularly, the polishing requirement on the inner ring of the workpiece is higher, the difficulty is higher, and although the existing polishing device and the existing polishing process are mature, certain defects still exist:

the polishing wheel for polishing is arranged at the end part of the rotating shaft, the main shaft generally drives the workpiece to rotate during polishing, and simultaneously the main shaft drives the polishing wheel to polish and polish the inner ring of the workpiece at one position, so that on one hand, deep polishing and back-and-forth movement can be finished only when the rotating shaft needs to extend to a certain length, and simultaneously, the arc degree difference of the inner surface of the workpiece is very large at the beginning of polishing, so that reaction force can be generated on the polishing wheel when the polishing wheel is in contact with the surface of the workpiece for polishing, and the polishing wheel and the rotating shaft are easy to vibrate, thus being unfavorable for polishing, the polishing speed is reduced, and the polishing effect is also reduced;

the polishing device is characterized in that the polishing device is used for polishing the inner ring of the workpiece, the polishing wheel and the rotating shaft are designed, but when polishing is started in practice, the concave-convex condition of the inner ring of the workpiece cannot be calculated, so that the polishing wheel and the inner ring of the workpiece are more protruded to generate larger conflict when polishing is performed, the polishing is a surface which needs to be formed finally by continuous slight friction, the polishing wheel can shake when the concave-convex condition is larger when polishing is performed, the polishing effect can be influenced, and meanwhile, if the feeding box is adopted, the method for adjusting the polishing wheel by moving the feeding box in the radial direction of the workpiece is more troublesome, and meanwhile, the requirement on the polishing device is higher, and the feeding box is not beneficial to use in actual production.

Disclosure of Invention

Aiming at the defects of the background technology, the invention provides the polishing device for processing the metal surface of the steel structure, which has the advantages of high working stability of the polishing wheel, good polishing effect and convenient use of equipment, and solves the problems in the background technology.

The invention provides the following technical scheme: a polishing device for processing a steel structure metal surface comprises a base, wherein a spindle box is fixedly mounted at the top of one side of the base, a feeding box is movably mounted at the top of the other side of the base, a spindle ring is movably mounted at one side of the spindle box close to the feeding box, a clamp is uniformly and fixedly mounted on the outer side of the spindle ring in an annular shape, an annular transmission cavity is formed in the feeding box, first sliding grooves are formed in the positions, located on the top and two sides of the bottom, in the feeding box, first sliding sleeves are movably sleeved in the first sliding grooves, a rotating shaft with one end extending out of the feeding box is movably sleeved in the middle of each first sliding sleeve, a motor is fixedly mounted on the front of the middle of the feeding box, a driving shaft extending into the transmission cavity is fixedly connected with the output end of the motor, and a transmission chain is movably sleeved between the outer ring of the driving shaft and the outer ring of the rotating shaft, the polishing machine is characterized in that a polishing wheel is fixedly mounted on an outer ring of an extending end of the rotating shaft, an annular adjusting groove is formed in the middle of one side, close to the feeding box, of the spindle box, a limiting sleeve is movably mounted in the middle of the adjusting groove, an adjusting shaft with one end fixedly connected with the side face of the limiting sleeve is movably mounted in the middle of the spindle box, a sleeve groove is formed in the middle of the limiting sleeve, two limiting sliding strips are sleeved in the sleeve groove, and a ring sleeve movably sleeved with the rotating shaft is fixedly connected to the outer end of each limiting sliding strip.

Preferably, an adjusting limiting seat is fixedly installed in the middle of one side, close to the spindle box, of the feeding box, a limiting groove for the rotating shaft to pass through is formed in the adjusting limiting seat, an adjusting head is fixedly connected to the middle of the outer end of the adjusting limiting seat, hydraulic grooves are respectively formed in the two sides of the inner portion of the adjusting head, the outer end of each hydraulic groove is movably sleeved with a piston slider, a roller is movably installed at the outer end of each piston slider, a hydraulic hole is formed in the center of the inner portion of the feeding box, the bottom of the first sliding sleeve is movably sleeved inside the hydraulic hole, a second sliding groove is formed in the inner portion of the feeding box, located on the back of the transmission cavity, and is movably sleeved with a second sliding sleeve, a transmission gear shaft with an outer ring meshed with the transmission chain is movably installed in the middle of the second sliding sleeve, and a pneumatic cavity communicated with the feeding box is formed in the front of the hydraulic hole in the inner portion of the feeding box, the hydraulic pressure adjusting cavity is formed in the position, located on the back face of the hydraulic pressure hole, in the feeding box, the back face of the hydraulic pressure adjusting cavity is movably sleeved with the extending end of the second sliding sleeve, the pressure plug is movably sleeved at the position where the pneumatic pressure cavity is communicated with the hydraulic pressure hole, and an air cylinder communicated with the pneumatic pressure cavity is fixedly installed on one side of the middle portion of the feeding box.

Preferably, the maximum sliding distance of the first sliding sleeve in the first sliding groove, the maximum sliding distance of the limiting sliding strip in the sleeve groove and the maximum sliding distance of the rotating shaft in the limiting groove are the same, and the maximum depth of the sleeve of the ring sleeve on the rotating shaft is larger than the thickness of the workpiece.

Preferably, the hydraulic grooves are not communicated with each other inside the adjusting head, the hydraulic adjusting cavity is communicated with the two hydraulic grooves through a communicating hole, and the distance that the piston sliding block is pushed inwards by hydraulic pressure is equal to the distance that the first sliding sleeve is adjusted to move through the second sliding sleeve.

The invention also provides a using method of the polishing device for processing the metal surface of the steel structure, which comprises the following steps:

s1, clamping a workpiece, sleeving the end part of the rotating shaft into the ring sleeve, locking the adjusting shaft, adjusting to the required air pressure through the air cylinder, and enabling the air pressure cavity to have the same air pressure as the air pressure cavity;

s2, the starting motor drives the rotating shaft to rotate through the transmission chain and enables the polishing wheel to polish the inner ring of the workpiece;

s3, rollers at two ends of the adjusting head are in contact with the inner ring of the workpiece and adjust the second sliding sleeve through internal hydraulic pressure so as to drive the first sliding sleeve to adjust, and the rotating shaft drives the polishing wheel to adjust and continuously polish the workpiece;

and S4, polishing until the inner ring of the workpiece reaches the preset diameter, enabling the first sliding sleeve to be in a stable position, and stopping the machine to take down the workpiece to finish polishing.

The invention has the following beneficial effects:

1. through setting up two axis of rotation and polishing wheel structures, and it is in relative position in the inner circle of treating the processing work piece, compare in prior art, the structure that utilizes the symmetry polishes, and still be provided with ring cover isotructure and axis of rotation cup joint together in headstock inside, just so make and all received the restriction at axis of rotation during operation both ends, can improve the stability of polishing wheel during operation effectively, even the axis of rotation has certain length also can not produce and rocks, two polishing wheels polish simultaneously and can also save time raise the efficiency, and two polishing wheels can also carry out complementally, the effect of polishing has been guaranteed to be better.

2. Through in the regulation system structure of installing the regulation head and cooperating the feeding box inside at the feeding box side, compare in prior art, when polishing the condition that the work piece inner circle is unsmooth serious, can transmit inside through gyro wheel and the piston slider on the regulation head and utilize hydraulic pressure to transmit in the feeding box, thereby the regulation of the first slip cap of later realization through hydraulic pressure continuation transmission and driving chain has realized the regulation of axis of rotation and throwing aureola, and make axis of rotation and throwing aureola can outside respray and guarantee the polishing through the atmospheric pressure effect of cylinder after the regulation, accomplish the polishing when atmospheric pressure and the pressure balance of first slip cap of atmospheric pressure intracavity portion, this in-process only need predetermine atmospheric pressure and can realize throwing aureola radial ascending removal polishing of work piece, convenient and fast more uses.

Drawings

FIG. 1 is an overall front and half sectional view of the structure of the present invention;

FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1;

FIG. 3 is a cross-sectional view taken along line B-B of FIG. 1;

FIG. 4 is a longitudinal cross-sectional view of the feed box of the present invention;

FIG. 5 is a transverse cross-sectional view of the feed box of the present invention;

fig. 6 is an enlarged view of fig. 3 at C.

In the figure: 1. a base; 2. a main spindle box; 201. an adjustment groove; 3. a feed box; 301. a transmission cavity; 302. a hydraulic bore; 303. a first chute; 304. a second chute; 305. a pneumatic chamber; 306. a hydraulic adjustment chamber; 4. a main shaft ring; 5. a clamp; 6. adjusting the limiting seat; 601. a limiting groove; 7. a first sliding sleeve; 8. a rotating shaft; 9. a polishing wheel; 10. an adjustment head; 1001. a hydraulic tank; 11. a limiting sleeve; 1101. sleeving a groove; 12. an adjustment shaft; 13. a limiting slide bar; 14. sleeving a ring; 15. a piston slide block; 16. a roller; 17. a motor; 1701. a drive shaft; 18. a second sliding sleeve; 1801. a transmission gear shaft; 19. a drive chain; 20. a pressure plug; 21. a cylinder; 22. and (5) a workpiece.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to the attached drawings 1-4, a polishing device for processing a steel structure metal surface comprises a base 1, wherein a spindle box 2 is fixedly installed at the top of one side of the base 1, a feeding box 3 is movably installed at the top of the other side of the base 1, a spindle ring 4 is movably installed at one side of the spindle box 2 close to the feeding box 3, clamps 5 are uniformly and fixedly installed outside the spindle ring 4 in an annular shape, an annular transmission cavity 301 is formed in the feeding box 3, first sliding grooves 303 are formed in positions of the top and the bottom of the transmission cavity 301 in the feeding box 3, a first sliding sleeve 7 is movably sleeved in the first sliding grooves 303, a rotating shaft 8 with one end extending out of the feeding box 3 is movably sleeved in the middle of the first sliding sleeve 7, a motor 17 is fixedly installed on the front face of the middle of the feeding box 3, a driving shaft 1701 extending into the transmission cavity 301 is fixedly connected to the output end of the motor 17, a transmission chain 19 is movably sleeved between the outer ring of the driving shaft 1701 and the outer ring of the rotating shaft 8, a polishing wheel 9 is fixedly installed on the outer ring of the extending end of the rotating shaft 8, an annular adjusting groove 201 is formed in the middle of one side, close to the feeding box 3, of the spindle box 2, a limiting sleeve 11 is movably installed in the middle of the adjusting groove 201, an adjusting shaft 12 with one end fixedly connected with the side surface of the limiting sleeve 11 is movably installed in the middle of the spindle box 2, a sleeve groove 1101 is formed in the middle of the limiting sleeve 11, two limiting sliding strips 13 are sleeved in the sleeve groove 1101, the two limiting sliding strips 13 can be used for realizing movement adjustment and limiting of the ring sleeve 14, the ring sleeve 14 movably sleeved with the rotating shaft 8 is fixedly connected to the outer end of the limiting sliding strip 13, an adjusting limiting seat 6 is fixedly installed in the middle of one side, close to the spindle box 2, of the feeding box 3, and limiting protection is performed on the rotating shaft 8 extending out of the feeding box 3, the adjusting limiting seat 6 is provided with a limiting groove 601 for the rotating shaft 8 to pass through, the middle part of the outer end of the adjusting limiting seat 6 is fixedly connected with an adjusting head 10, two sides inside the adjusting head 10 are positioned at the middle position of the polishing wheel 9 and are respectively provided with a hydraulic groove 1001, the outer end part of the hydraulic groove 1001 is movably sleeved with a piston slide block 15, the outer end part of the piston slide block 15 is movably provided with a roller 16, the center inside the feeding box 3 is provided with a hydraulic hole 302, the bottom position of the first sliding sleeve 7 is movably sleeved inside the hydraulic hole 302, so that the first sliding sleeve 7 is limited to only realize the movement of the upper and lower positions, and the movement of the first sliding sleeve 7 is controlled by hydraulic pressure in the hydraulic hole 302;

referring to fig. 5, a second sliding chute 304 is formed in the feeding box 3 at the back of the transmission cavity 301, a second sliding sleeve 18 is movably sleeved in the second sliding chute 304, a transmission toothed shaft 1801 with an outer ring meshed with the transmission chain 19 is movably installed in the middle of the second sliding sleeve 18, a transmission loop is formed by a driving shaft 1701 of the motor 17, the two rotating shafts 8 and the transmission toothed shaft 1801, and the driving shaft 1701 is limited in position, so that the distance from the rotating shaft 8 to the center position can be adjusted through the movement of the transmission toothed shaft 1801 to adjust the polishing position of the polishing wheel 9 at the inner ring position of the workpiece 22, an air pressure cavity 305 communicated with the front of the hydraulic hole 302 is formed in the feeding box 3, a hydraulic pressure adjusting cavity 306 is formed in the back of the hydraulic hole 302, and the back of the hydraulic pressure adjusting cavity 306 is movably sleeved with the extending end of the second sliding sleeve 18, the pressure plug 20 is movably sleeved at the communication part of the air pressure cavity 305 and the hydraulic hole 302, an air cylinder 21 communicated with the air pressure cavity 305 is fixedly installed at one side of the middle part of the feed box 3, and the air cylinder 21 provides stable air pressure for the air pressure cavity 305, so that the stability of the feed box can be ensured in work.

The maximum sliding distance of the first sliding sleeve 7 in the first sliding groove 303, the maximum sliding distance of the limiting slide bar 13 in the sleeve groove 1101, and the maximum sliding distance of the rotating shaft 8 in the limiting groove 601 are all the same, the maximum depth of the ring sleeve 14 sleeved on the rotating shaft 8 is greater than the thickness of the workpiece 22, when the roller 16 and the piston slider 15 move, the hydraulic pressure in the hydraulic groove 1001 is driven to move into the hydraulic pressure adjusting cavity 306 so as to drive the second sliding sleeve 18 to move, so that the first sliding sleeve 7 is moved by using the transmission chain 19, that is, the rotating shaft 8 is adjusted, so that the polishing wheel 9 can be adjusted due to the fact that the difference between the concave and convex parts of the inner ring of the workpiece 22 is large in the working process, and the adjustment of each part is the same, and the whole rotating shaft 8 can be more stable in the rotating process.

Referring to fig. 6, the hydraulic grooves 1001 are not communicated with each other inside the adjusting head 10, the hydraulic adjusting cavity 306 is communicated with the two hydraulic grooves 1001 through a communication hole, the distance that the piston slider 15 is pushed inwards by hydraulic pressure is equal to the distance that the first sliding sleeve 7 is adjusted by the second sliding sleeve 18, the concave-convex degree of the inner ring of the workpiece 22 is detected on the adjusting head 10 by using the roller 16 and the piston slider 15, and then the concave-convex degree is transmitted to the feeding box 3 through internal hydraulic adjustment to adjust the rotating shaft 8, so that a better polishing effect can be achieved, and the conditions of shaking and deflection of the rotating shaft 8 caused by too large polishing thickness are avoided.

The using method comprises the following steps:

s1, clamping the workpiece 22, sleeving the end of the rotating shaft 8 into the ring sleeve 14, locking the adjusting shaft 12, adjusting to the required air pressure through the air cylinder 21, and enabling the air pressure cavity 305 to have the same air pressure as the air pressure cavity;

s2, the starting motor 17 drives the rotating shaft 8 to rotate through the transmission chain 19, and the polishing wheel 9 polishes the inner ring of the workpiece 22;

s3, rollers 16 at two ends of the adjusting head 10 are in contact with the inner ring of the workpiece 22, the second sliding sleeve 18 is adjusted through internal hydraulic pressure, the first sliding sleeve 7 is driven to be adjusted, the rotating shaft 8 drives the polishing wheel 9 to be adjusted, and the workpiece 22 is polished continuously;

and S4, polishing until the inner ring of the workpiece 22 reaches the preset diameter, and stopping to take down the workpiece 22 to finish polishing, wherein the first sliding sleeve 7 is in a stable position.

The working principle is that a workpiece 22 to be polished is clamped on a spindle ring 4 and then clamped by a clamp 5, the air pressure of an air cylinder 21 is adjusted according to the diameter to be polished, the air pressure in an air pressure cavity 305 acts on a pressure plug 20 to drive the hydraulic pressure in a hydraulic hole 302 to jack up upwards and downwards, and acts on a first sliding sleeve 7 to jack up the upper end and the lower end of the first sliding sleeve respectively and drive a polishing wheel 9 to move outwards until the first sliding sleeve is attached to the inner ring of the workpiece 22, so that the outer end of a rotating shaft 8 is sleeved inside a ring sleeve 14, the position of a limiting sleeve 11 is locked by an adjusting shaft 12 to ensure that the limiting sleeve cannot move, then a motor 17 is started, a driving shaft 1701 rotates and drives the rotating shaft 8 and a transmission gear shaft 1801 to rotate simultaneously through a transmission chain 19, and the polishing wheel 9 on the outer ring can be driven to polish the inner ring of the workpiece 22 when the rotating shaft 8 rotates;

when the inner ring of the workpiece 22 is uneven seriously, the rollers 16 at both sides of the adjusting head 10 are subjected to pressure resistance and are transmitted to the piston slide block 15 to drive the piston slide block to contract towards the hydraulic groove 1001, hydraulic oil in the hydraulic groove 1001 moves towards the hydraulic adjusting cavity 306 along the through hole, the hydraulic pressure in the hydraulic adjusting cavity 306 pushes the second sliding sleeve 18 outwards, the second sliding sleeve 18 moves outwards along the second sliding groove 304 and pulls the transmission chain 19 simultaneously, the rotating shaft 8 is pressed towards the middle by the pulling force of the transmission chain 19, the first sliding sleeve 7 moves downwards along the first sliding groove 303 and presses the hydraulic pressure in the hydraulic hole 302 towards the pneumatic cavity 305, the air pressure in the pneumatic cavity 305 is increased and exceeds the required air pressure by the pressing force of the pressure plug 20, then the surface of the inner ring of the workpiece 22 is smooth and flat along with the polishing, and the first sliding sleeve 7 is always subjected to more than the set pressure in the process, therefore, the first sliding sleeve 7 will be pushed towards the outer ring until the air pressure inside the air pressure cavity 305 is the same as the inward pressure applied to the first sliding sleeve 7, and will be stable, at this time, the polishing position of the polishing wheel 9 also reaches the maximum position, which indicates that the polishing of the inner surface of the workpiece 22 is completed, so that the rotating shaft 8 and the polishing wheel 9 are driven to adjust through hydraulic pressure in the whole process, and the air pressure inside the air pressure cavity 305 is used for returning and balancing the polishing wheel, and when the polishing requirement is met, the pressure balance in the whole structure is achieved, and the polishing is completed.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

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