1. An integrated monitoring system for a lithography machine peripheral, comprising: a monitoring PLC, a network connecting device, a workshop air conditioning system, an air compressor, a UPS, a communication module, a touch screen and a remote terminal, wherein,

the monitoring PLC collects the operation parameters of the workshop air conditioning system, the air compressor and the UPS and monitors the operation state;

the monitoring PLC, the communication module and the touch screen are communicated through the network connecting device;

the remote terminal communicates with the communication module through the internet.

2. The integrated monitoring system for a peripheral device of a lithography machine according to claim 1, wherein the network connection device is a router or a switch;

the remote terminal is a computer or a mobile phone.

3. The integrated monitoring system for lithography peripherals according to claim 1, wherein the monitoring PLC transmits various collected operating parameters to the remote terminal through the communication module for display, and simultaneously transmits alarm information to the remote terminal in case of emergency.

4. The integrated lithography peripheral device monitoring system according to claim 1, wherein the operating parameters of the shop air conditioning system include: the system comprises a factory temperature, a factory humidity, an air outlet pressure, an atmospheric temperature, compressed air, an air inlet and outlet pressure difference, an air outlet temperature, an air inlet temperature, a condensing fan state, a power supply state, a compressor working condition, an electric heating working condition and a circulating fan state;

the operation parameters of the air compressor comprise: compressed air pressure, air compressor state.

5. The integrated monitoring system for lithography peripherals according to claim 4, wherein the factory temperature signal and the factory humidity signal of the workshop air conditioning system are divided into two parts by an isolator, one part is continuously used by the workshop air conditioning system, and the other part is input into the analog input module of the monitoring PLC;

when the monitoring PLC monitors the abnormal state of the power supply, the monitoring PLC outputs signals to cut off a front-section alternating current contactor of a hollow pressure regulating compressor and a fan of the workshop air conditioning system;

the monitoring PLC monitors the air inlet and outlet pressure difference, and when the air inlet and outlet pressure difference is greater than a preset value, an output signal cuts off an alternating current contactor of an electric heater and a compressor in the workshop air conditioning system;

when the atmospheric temperature is higher than the preset temperature, the monitoring PLC outputs a signal to control the sprayer to intermittently spray on a condenser in the workshop air conditioning system;

the monitoring PLC outputs a signal to control a sprayer to spray a condenser in the workshop air-conditioning system within a preset time before a compressor in the workshop air-conditioning system is started;

and a pressure transmitter is arranged at the air using end of the air compressor, and a current signal representing the pressure of the compressed air is input to an analog quantity input module of the monitoring PLC.

6. The integrated monitoring system for a lithography peripheral according to claim 1, further comprising: the system comprises an air conditioning PLC of a precision air conditioner special for the photoetching machine and a second air compressor which performs polling work together with the air compressor under the control of the monitoring PLC;

and the air conditioner PLC reads the operation data of the precision air conditioner and transmits the operation data to the monitoring PLC through the network connection device.

7. A monitoring method of the integrated monitoring system of the peripheral equipment of the lithography machine according to claim 6, comprising:

step S1, setting up communication network, adjusting to positive half period every 0.5 seconds;

step S2, calling a workshop air conditioning program to monitor a workshop air conditioning system;

step S3, calling a precision air-conditioning program to monitor the air-conditioning PLC;

step S4, adjusting to negative half period every 0.5 seconds;

step S5, calling a UPS program to monitor the UPS;

step S6, calling an air compressor program and monitoring the air compressor;

step S7, checking whether the air compressor works, and accumulating the working times of the air compressor in the touch screen when the air compressor works;

and step S8, checking whether the alarm condition is met, and outputting sound and light alarm when the alarm condition is met.

8. The monitoring method of the integrated monitoring system for lithography peripherals according to claim 7, wherein the step S2 includes:

sequentially reading the temperature analog quantity of a central air conditioner, the temperature of an air inlet of a transmitter, the temperature of an air return inlet of the transmitter, the air pressure value of an air outlet, the pressure difference of an air outlet and an air inlet, the temperature of an outdoor environment, the running state of a digital quantity compressor, the running state of a digital quantity electric heating fan, the running state of a digital quantity condensing fan and the state of a digital quantity power supply detector in a workshop air conditioning system;

judging whether the temperature of the transmitter is normal or not and whether the read value is reasonable or not, and if not, setting an alarm flag bit to indicate that the temperature transmitter has errors; if yes, entering the next step;

judging whether the wind pressure of the transmitter is normal or not and whether the read value is reasonable or not, if not, setting an alarm flag bit to be wrong with the wind pressure transmitter, and if so, entering the next step;

judging whether the temperature of the transmitter is lower than a set value, if so, setting the temperature of an alarm flag bit to be low; if not, stopping the operation of the compressor;

judging whether the temperature of the transmitter is greater than a set value, if so, setting the temperature of an alarm flag bit to be high; if not, entering the next step;

judging whether the wind pressure of the transmitter is lower than a normal value by 90%, if so, setting an alarm flag bit, and displaying related information by a touch screen; if not, entering the next step;

judging whether the air pressure of the transmitter is lower than 80% of a normal value, if so, setting an alarm flag bit, stopping electric heating, and stopping the compressor; if not, entering the next step;

checking whether the power supply is normal, if not, setting a power supply alarm flag bit, and stopping the machine; if yes, entering the next step;

judging whether the outdoor temperature is greater than 30 ℃, if so, judging whether a condensing fan operates, and if so, opening an electromagnetic valve and continuously spraying by a condenser;

judging whether the outdoor temperature is higher than 35 ℃, if so, judging whether a condensing fan operates, if so, opening an electromagnetic valve, continuously spraying by a condenser, and if not, opening the electromagnetic valve, and intermittently spraying by the condenser;

step S3 includes:

reading the operation parameters of the precision air conditioner from the designated storage space;

converting the temperature corresponding value from double precision to real number, and converting the humidity corresponding value from double precision to real number;

judging whether the temperature exceeds an upper limit value, if so, setting an alarm flag bit, and if so, exceeding the upper limit value; if not, entering the next step;

judging whether the temperature exceeds a lower limit value, if so, setting an alarm flag bit, and exceeding the lower limit value; if not, ending;

step S6 includes:

reading the operating parameters of the second air compressor from the designated storage space;

inputting the digital quantity into a first air compressor to judge the running condition of the first air compressor;

reading analog quantity input to obtain a compressed air pressure value;

setting a starting marker bit when starting up for the first time;

judging whether the machine is started for the first time, if not, keeping the original working right; if so, setting the working right, and giving the working right to the first air compressor;

whether the first air compressor works for 1.5 hours or not, if not, the original working right is kept; if yes, switching the work right, stopping the first air compressor, and working the second air compressor;

when the first air compressor works for full 30 minutes and the pressure is lower than the lower limit, an alarm flag bit is set, and the current working right corresponds to insufficient work of the air compressor or a gas leakage point exists; the two air compressors work together.

9. The monitoring method of the integrated monitoring system for lithography peripherals according to claim 7, wherein the step S7 includes:

checking whether the first air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the first air compressor;

judging whether the value in the corresponding memory of the first air compressor reaches the maximum value, if so, resetting the value in the corresponding memory of the first air compressor;

checking whether the second air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the second air compressor;

and judging whether the value in the corresponding storage of the second air compressor reaches the maximum value, and if so, resetting the value in the corresponding storage of the second air compressor.

Background

Peripheral auxiliary equipment of the photoetching machine comprises a workshop air conditioner, an air compressor and the like. To date, several problems have been discovered. For example: the constant temperature and humidity air conditioner in the workshop alarms and displays that the humidity is insufficient to heat, so that the final temperature of heating is displayed as 42 ℃; under the working condition of electric heating, the fan can not radiate heat in time due to the reduction of the rotating speed of the fan, and the electrically heated support plastic frame is burnt to deform; when the outdoor unit of the air conditioner has loud sound, the detection shows that one of the three phases of electricity at the corresponding open position has a voltage which is changed from 200 to 300V instead of 380V for other phases; the operating conditions of other devices, such as air compressors, precision air conditioners, etc., cannot be known in time and therefore cannot be dealt with at the first time in the event of a fault.

Therefore, it is necessary to design a system that integrates peripheral devices of the lithography machine as a whole, so as to not only display the whole but also prevent accidents preventively, and take corresponding measures in advance.

Disclosure of Invention

The invention aims to provide an integrated monitoring system for the peripheral equipment of a photoetching machine, which is used for collecting and monitoring the running state of each equipment and displaying the running state in real time.

The invention also aims to provide a monitoring method based on the integrated monitoring system of the peripheral equipment of the photoetching machine, so that the monitoring is effectively realized.

The technical scheme for realizing the purpose is as follows:

an integrated monitoring system for a lithography machine peripheral, comprising: a monitoring PLC (programmable logic controller), a network connecting device, a workshop air conditioning system, an air compressor, a UPS (uninterrupted power supply), a communication module, a touch screen and a remote terminal, wherein,

the monitoring PLC collects the operation parameters of the workshop air conditioning system, the air compressor and the UPS and monitors the operation state;

the monitoring PLC, the communication module and the touch screen are communicated through the network connecting device;

the remote terminal communicates with the communication module through the internet.

Preferably, the network connection device is a router or a switch;

the remote terminal is a computer or a mobile phone.

Preferably, the monitoring PLC sends various collected operation parameters to the remote terminal through the communication module for display, and sends alarm information to the remote terminal in case of emergency.

Preferably, the operation parameters of the plant air conditioning system include: the system comprises a factory temperature, a factory humidity, an air outlet pressure, an atmospheric temperature, compressed air, an air inlet and outlet pressure difference, an air outlet temperature, an air inlet temperature, a condensing fan state, a power supply state, a compressor working condition, an electric heating working condition and a circulating fan state;

the operation parameters of the air compressor comprise: compressed air pressure, air compressor state.

Preferably, the factory temperature signal and the factory humidity signal of the workshop air conditioning system are divided into two parts through an isolator, one part is continuously used by the workshop air conditioning system, and the other part is input into the analog quantity input module of the monitoring PLC;

when the monitoring PLC monitors the abnormal state of the power supply, the monitoring PLC outputs signals to cut off a front-section alternating current contactor of a hollow pressure regulating compressor and a fan of the workshop air conditioning system;

the monitoring PLC monitors the air inlet and outlet pressure difference, and when the air inlet and outlet pressure difference is greater than a preset value, an output signal cuts off an alternating current contactor of an electric heater and a compressor in the workshop air conditioning system;

when the atmospheric temperature is higher than the preset temperature, the monitoring PLC outputs a signal to control the sprayer to intermittently spray on a condenser in the workshop air conditioning system;

the monitoring PLC outputs a signal to control a sprayer to spray a condenser in the workshop air-conditioning system within a preset time before a compressor in the workshop air-conditioning system is started;

and a pressure transmitter is arranged at the air using end of the air compressor, and a current signal representing the pressure of the compressed air is input to an analog quantity input module of the monitoring PLC.

Preferably, the method further comprises the following steps: the system comprises an air conditioning PLC of a precision air conditioner special for the photoetching machine and a second air compressor which performs polling work together with the air compressor under the control of the monitoring PLC;

and the air conditioner PLC reads the operation data of the precision air conditioner and transmits the operation data to the monitoring PLC through the network connection device.

The monitoring method based on the integrated monitoring system of the peripheral equipment of the photoetching machine comprises the following steps:

step S1, setting up communication network, adjusting to positive half period every 0.5 seconds;

step S2, calling a workshop air conditioning program to monitor a workshop air conditioning system;

step S3, calling a precision air-conditioning program to monitor the air-conditioning PLC;

step S4, adjusting to negative half period every 0.5 seconds;

step S5, calling a UPS program to monitor the UPS;

step S6, calling an air compressor program and monitoring the air compressor;

step S7, checking whether the air compressor works, and accumulating the working times of the air compressor in the touch screen when the air compressor works;

and step S8, checking whether the alarm condition is met, and outputting sound and light alarm when the alarm condition is met.

Preferably, step S2 includes:

sequentially reading the temperature analog quantity of a central air conditioner, the temperature of an air inlet of a transmitter, the temperature of an air return inlet of the transmitter, the air pressure value of an air outlet, the pressure difference of an air outlet and an air inlet, the temperature of an outdoor environment, the running state of a digital quantity compressor, the running state of a digital quantity electric heating fan, the running state of a digital quantity condensing fan and the state of a digital quantity power supply detector in a workshop air conditioning system;

judging whether the temperature of the transmitter is normal or not and whether the read value is reasonable or not, and if not, setting an alarm flag bit to indicate that the temperature transmitter has errors; if yes, entering the next step;

judging whether the wind pressure of the transmitter is normal or not and whether the read value is reasonable or not, if not, setting an alarm flag bit to be wrong with the wind pressure transmitter, and if so, entering the next step;

judging whether the temperature of the transmitter is lower than a set value, if so, setting the temperature of an alarm flag bit to be low; if not, stopping the operation of the compressor;

judging whether the temperature of the transmitter is greater than a set value, if so, setting the temperature of an alarm flag bit to be high; if not, entering the next step;

judging whether the wind pressure of the transmitter is lower than a normal value by 90%, if so, setting an alarm flag bit, and displaying related information by a touch screen; if not, entering the next step;

judging whether the air pressure of the transmitter is lower than 80% of a normal value, if so, setting an alarm flag bit, stopping electric heating, and stopping the compressor; if not, entering the next step;

checking whether the power supply is normal, if not, setting a power supply alarm flag bit, and stopping the machine; if yes, entering the next step;

judging whether the outdoor temperature is greater than 30 ℃, if so, judging whether a condensing fan operates, and if so, opening an electromagnetic valve and continuously spraying by a condenser;

judging whether the outdoor temperature is higher than 35 ℃, if so, judging whether a condensing fan operates, if so, opening an electromagnetic valve, continuously spraying by a condenser, and if not, opening the electromagnetic valve, and intermittently spraying by the condenser;

step S3 includes:

reading the operation parameters of the precision air conditioner from the designated storage space;

converting the temperature corresponding value from double precision to real number, and converting the humidity corresponding value from double precision to real number;

judging whether the temperature exceeds an upper limit value, if so, setting an alarm flag bit, and if so, exceeding the upper limit value; if not, entering the next step;

judging whether the temperature exceeds a lower limit value, if so, setting an alarm flag bit, and exceeding the lower limit value; if not, ending;

step S6 includes:

reading the operating parameters of the second air compressor from the designated storage space;

inputting the digital quantity into a first air compressor to judge the running condition of the first air compressor;

reading analog quantity input to obtain a compressed air pressure value;

setting a starting marker bit when starting up for the first time;

judging whether the machine is started for the first time, if not, keeping the original working right; if so, setting the working right, and giving the working right to the first air compressor;

whether the first air compressor works for 1.5 hours or not, if not, the original working right is kept; if yes, switching the work right, stopping the first air compressor, and working the second air compressor;

when the first air compressor works for full 30 minutes and the pressure is lower than the lower limit, an alarm flag bit is set, and the current working right corresponds to insufficient work of the air compressor or a gas leakage point exists; the two air compressors work together;

preferably, step S7 includes:

checking whether the first air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the first air compressor;

judging whether the value in the corresponding memory of the first air compressor reaches the maximum value, if so, resetting the value in the corresponding memory of the first air compressor;

checking whether the second air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the second air compressor;

and judging whether the value in the corresponding storage of the second air compressor reaches the maximum value, and if so, resetting the value in the corresponding storage of the second air compressor.

The invention has the beneficial effects that: the invention effectively prevents the constant-temperature constant-humidity air conditioner in the workshop from malfunctioning through the collection and monitoring of the operation information, and solves the hidden trouble of the work. Meanwhile, the running state of the relevant photoetching machine peripheral equipment is displayed on the touch screen in real time, and an alarm can be given. The spraying to the condenser of air conditioner is realized, and two air compressors carry out polling work under the control of the monitoring PLC in addition. And the operation state is displayed on the remote terminal, so that the final-level target of obtaining the operation data and the alarm state when the remote terminal is not on site is realized. Meanwhile, effective monitoring is realized through a corresponding monitoring method.

Drawings

FIG. 1 is a block diagram of an integrated monitoring system for a lithography machine peripheral of the present invention;

FIG. 2 is a schematic diagram of monitoring PLC acquisition workshop air conditioning system and air compressor operation parameters in the present invention;

FIG. 3 is a schematic diagram of the connection of a monitoring PLC to an air compressor in accordance with the present invention;

FIG. 4 is a schematic diagram of the connection of a supervisory PLC to a plant air conditioning system in accordance with the present invention;

FIG. 5 is a flow chart of a monitoring method of the present invention;

FIG. 6 is a flow chart of a plant air conditioning program of the present invention;

FIG. 7 is a flowchart of a precision air conditioning program according to the present invention;

fig. 8 is a flowchart of an air compressor routine in the present invention;

fig. 9 is a flowchart of step S7 in the present invention.

Detailed Description

The invention will be further explained with reference to the drawings.

Referring to fig. 1-4, the integrated monitoring system for lithography peripherals of the present invention comprises: the system comprises a monitoring PLC1, a network connection device 2, a workshop air conditioning system 3, an air compressor 4, a UPS 5, a communication module 6, a touch screen 7, a remote terminal and an air conditioning PLC 8.

The monitoring PLC1 collects the operation parameters of the workshop air conditioning system 3, the air compressor 4 and the UPS 5, and monitors the operation state. The monitoring PLC1, the communication module 6 and the touch screen 7 communicate through the network connection device 2. The remote terminal 8 communicates with the communication module 6 through the internet.

The network connection device 2 is a router or a switch; the remote terminal 8 is a computer or a mobile phone.

The monitoring PLC1 sends the collected various operation parameters to a remote terminal for display through the communication module 6, and sends alarm information to the remote terminal in an emergency situation. The monitoring PLC1 also sends various operation parameters to the touch screen 7 for display.

On the whole, different intelligent elements are integrated to complete the operation parameter display, the dangerous operation prevention and the alarm of various different devices.

The operating parameters of the plant air conditioning system 3 include: the system comprises a factory temperature, a factory humidity, an air outlet pressure, an atmospheric temperature, compressed air, an air inlet and outlet pressure difference, an air outlet temperature, an air inlet temperature, a condensing fan state, a power supply state, a compressor working condition, an electric heating working condition and a circulating fan state. The operating parameters of the air compressor 4 include: compressed air pressure, air compressor state.

The factory temperature signal and the factory humidity signal of the workshop air conditioning system 3 are divided into two parts through an isolator, one part is continuously used by the workshop air conditioning system, and the other part is input into an analog quantity input module of the monitoring PLC 1. And detecting and comparing the two signals with each other, and alarming when a problem occurs.

When the monitoring PLC1 monitors the abnormal state of the power supply, the output signal cuts off the front section alternating current contactor of the air conditioning compressor and the fan in the workshop air conditioning system 3. The problem of unbalanced power supply caused by faults of components such as an air conditioner contactor and the like is solved, three-phase detection is added, and balanced three-phase power supply is ensured to be free of overvoltage, undervoltage and phase failure. When there is a problem, the module inputs digital quantity to PLC, so that the output is adopted to cut off the air conditioner compressor and the front end AC contactor of the fan.

The monitoring PLC1 monitors the air inlet and outlet pressure difference, and when the air inlet and outlet pressure difference is larger than a preset value, an output signal cuts off an alternating current contactor of an electric heater and a compressor in the workshop air conditioning system 3. The fire hazard that the fan rotates at a low speed, the electric heating works normally and the plastic support is molten is solved. Fan operation is a prerequisite for electrical heating and compressor operation. The low-frequency low-speed operation also can not take away heat or cold, which is the fire hazard and the ice blockage burning compressor hazard, and the air outlet and inlet and outlet pressure transmitters are added, and the analog input module reads in the PLC. The two pressure transmitters mutually detect each other, and when the wind pressure is lowered to a certain value, the PLC outputs and cuts off the AC contactor which executes the electric heating and the compressor, and simultaneously alarms. And the filter screen is cleaned or replaced according to the change of the wind pressure value and the prompt of the touch screen 7 in the running time.

When the atmospheric temperature is higher than the preset temperature, the monitoring PLC1 outputs a signal to control the sprayer to intermittently spray the condenser in the workshop air conditioning system 3; and (3) presetting time before the compressor in the workshop air-conditioning system 3 is started, and monitoring the output signal of the PLC1 to control the sprayer to spray the condenser in the workshop air-conditioning system 3. The energy-saving compressor not only is an energy-saving project, but also greatly improves the working environment of the air-conditioning compressor in extremely severe environment in summer, prolongs the service life and reduces the energy consumption. The intermittent purpose is to promote cooling of the external environment while conserving water resources.

A pressure transmitter is arranged at the gas end of the air compressor 4, and a current signal representing the pressure of the compressed air is input to an analog quantity input module of the monitoring PLC 1. Still include the second air compressor machine, carry out polling work together with air compressor machine 4 under control of monitoring PLC1 for the second air compressor machine.

For the working state of the air compressor 4, two phases of three phases are connected to the coil of the corresponding relay through the motor terminal of the air compressor 4 when the air compressor 4 works, and the normally-open point of the relay enters the input end of the monitoring PLC 1. That is, when the motor of the air compressor 4 works, the corresponding coil is electrified, the corresponding normally open contact is closed, and the input point sampling of the PLC1 is monitored. And the pressure transmitter is installed at the gas end, and the current signal is input to an analog quantity input module of the monitoring PLC 1. In this way, the operating state of the air compressor 4 and the associated pressure values are both acquired by the monitoring PLC 1. The second air compressor is provided with an RS485 communication port, and the operation state of the second air compressor is read in a communication mode similar to that of the UPS. The second is to perform polling control of the two air compressors in units of two hours, and perform polling control respectively, in which if the pressure value is found not to be in the normal range, or if the first has obtained the polling control right. And when the motor does not work correspondingly, the second air compressor which works normally can be automatically started, and meanwhile, the corresponding polling control right is obtained and an alarm is given. The working state of the air compressor is sampled, and the working state of the air compressor can be used as a timing. Maintenance is performed as an important parameter and displayed on the touch screen.

The air conditioner PLC 8 of the special precision air conditioner of the photoetching machine reads the running data of the precision air conditioner and transmits the running data to the monitoring PLC1 through the network connecting device 2. And reading the operation data of the precise air conditioner by using Ethernet communication, and setting the operation data in the same network segment. The air-conditioning PLC 8 of the precision air conditioner is used as a remote communication PLC, the monitoring PLC1 is used as a PLC for local communication, and the arrangement of the remote communication PLC and the monitoring PLC in the same network segment is realized in such a way that firstly, the address of the precision air-conditioning PLC 8 is kept unchanged, and the monitoring PLC1 and the monitoring PLC are set in the same network segment. After the relation between the physical quantity and the address corresponding to the manufacturer is obtained, a network reading instruction is adopted, and the Get reads the provided address simultaneously. Even if the PLC of the manufacturer is encrypted, the reading of the PLC1 on the equipment PLC is not influenced. And reading the operation parameters of the original equipment PLC to our local PLC.

The touch screen 7 presents operating parameters. The different devices can be divided into different pictures, for example in the plant air conditioning system 3, the pictures are animated, and there is a corresponding animation display in the compressor or electric heater and in the fan in the studio. For different air compressors, the rotation state of the air compressor is displayed in an animation mode under the condition that the air compressors work respectively, and the rotation state of the air compressor is displayed according to different graphs. This is displayed following the operating state of the air compressor. Also, related alarms may be made. As mentioned above, there are also text-based prompts, such as the characters for replacing the filter screen of the air conditioner and the need to maintain the air compressor.

The communication module 6 is an important component of the system for realizing remote monitoring. GRM530, to realize the module web page, mobile phone APP remote monitoring short message alarm, short message query, short message control and configuration software remote monitoring. The GRM530 module is configured by a computer through GRMDEV software, so that the IP of the computer and the IP of the GRM530 are required to be ensured to be in the same network segment, and the IP of the computer and the IP of the GRM530 are in the same network segment with a local PLC, a touch screen and an air conditioner PLC. The communication module is connected to the Internet in a mode 1 and is accessed to an external network through a WAN port. 2, connecting an external network configuration method through WIFI, and accessing the mobile phone card of each large communication operator in a 4G form.

The module remote configuration engineering method is characterized in that engineering information such as variables, short messages and the like configured in a GRMDEV software interface by the GRM530 can be downloaded by directly connecting a local computer with the GRM530 through a network cable, and can also be directly submitted to a GRMDEV configuration engineering through a webpage after the GRM530 module is connected with a cloud server (plug-in card, WIFI (wireless fidelity) and wired). In general, if the computer is connected to the internet through the router, the internet access of the computer and the module may be connected through the internet cable to configure the IP of the module (see 1.3GRM530 internet access configuration method), and then the internet access of the module is plugged into the router through the internet cable to allow the module to access the external network. After the module serial number is provided for a communication module manufacturer to open a webpage and a remote downloading function, the communication module manufacturer logs in the module serial number password through the official website, and then the engineering is directly downloaded through the webpage. Through 4G internet access, the module serial number can be provided for huge control to open a webpage and a remote downloading function, and then the engineering is more convenient to directly download through the webpage.

The editing software GRMDEV software of the communication module uses: the key is to use the variables: the variable can be used for reflecting the input and output states of the short message module, and can also be used for mapping the value of a register of external equipment (such as a PLC) connected with a serial port. The PLC and the communication module transmit the value of the PLC register to the communication module in an Ethernet mode. Variable type variables support the following three types: 1) integer variables are similar to signed long integer variables in c programming languages and are used for representing signed integer data, and the value range is (-2147483648) to (+ 2147483647). For example, the analog input module inputs data into the PLC to form an integer variable class. 2) The floating point type variable is similar to a floating point type variable in c language and is used for representing floating point (float) type data, the value range is +/-1E-37-1E +37, the significant digit is 7 bits, and the maximum is 6-bit decimal. For example, the air conditioner temperature is finally converted into a living 16.8 degrees to be a floating point number. 3) The switch variable has only two values of 0 and 1, and is used for representing two states of on (1) and off (0) or representing true (1) or false (0) of the expression. Both non-zero integer and floating point numbers are assigned to the switch variable, which will result in a 1. For example, the digital quantity of the input and output on the PLC body is the switching quantity. If the IO equipment does not select any equipment, the variable is an internal variable or can be related to digital input, output and analog quantity on the short message module. If the equipment is selected, the variable is an external variable and is associated with a PLC connected with the communication port or a register of the equipment. At this time, the address and type of the register are set according to the communication protocol of the device.

And (4) saving a value: and the checking shows that the variable has a power-off storage attribute, and a pre-power-off storage value is obtained from the power-off storage area as an initial value during starting. The system saves all the power-off saved variables with changing values every 5 minutes.

Initial value: for an unpowered save variable, the startup variable value is equal to this value. The system supports at most 200 power-off save variables.

Short message reading: after checking the option, the operator on duty can use the command of 'reading the variable by short message', send the short message to the GRM device, and inquire the value of the variable in the GRM device.

Short message writing: after checking the option, the operator on duty can use the command of 'short message writing variable' in the short message to modify the value of the variable in the GRM530 device through the short message of the mobile phone.

The expression is a C-language numerical expression, and the grammar conforms to the standard C-language specification and is a subset of the C expression. The expression may be a single variable name, a constant, or an operation expression of a variable and an operator. The invention supports conditional expressions, parameter expressions and valuation expressions. The conditional expression is as follows: the expression calculation result is not 0 and is used for the alarm triggering condition, the timing execution condition and the event triggering condition to indicate that the condition is satisfied. Parameter expression: the method is used for short message alarming and short message inquiry return information templates, and the calculation result is related to the type. Evaluating an expression: the method is used for short message write variables, short message control commands and event control.

There are engineering options in the editing software interface, there are basic options in the engineering options, the basic options are whether to use the short message function or not, whether to use the telephone function or not, etc., and the serial model of the product, the mode of connecting with the server, etc. The content defined by the global short message header of the short message function is formatted and then added to the header of the selected type information. If the selected content of the global short message header is repeatedly added to the template defined by a certain type of short message, the same content appears twice in the short message. And the character string of the head of the default alarm recovery short message is added to the head of the alarm information needing to send the alarm recovery information. When the alarm is confirmed and the alarm confirmation notification message needs to be sent, the system sends the message to related personnel.

And after the completion, compiling and project downloading are carried out, and the compiling can check whether the project has errors by clicking the compiling icon in the toolbar in the process of editing the project. And when error prompt occurs, recompilation is carried out after modification according to the prompt information. The project may be downloaded only after the "compile success" prompt occurs. And downloading the installation and the module of the engineering GRMDEV software.

Compiling clicking the compiling icon in the toolbar during the process of editing the project can check whether the project has errors. And when error prompt occurs, recompilation is carried out after modification according to the prompt information. The project may be downloaded only after the "compile success" prompt occurs. Downloading engineering please refer to GRMDEV software installation and online debugging of module configuration section content before opening the live viewer, it is necessary to ensure that the GRM530 internal engineering is consistent with the engineering opened by GRMDEV 3. During the operation of the GRM530, the GRM530 and the computer are connected using a network cable. The online debugging mode can be entered by running GRMDev3 and clicking an icon in a toolbar or pressing F8,

the online debugging has the following functions: 1) and checking the value of each variable in real time. 2) The variables are modified. Double clicking a variable, popping up a variable value modification dialog box, and clicking to confirm after modification. 3) And checking the alarm state. All alarm trigger states defined in the project can be viewed in a real-time viewer, regardless of whether a SIM card is inserted or not. [ high ]: indicating a high limit alarm trigger; [ Low ]: indicating a low limit alarm trigger; [ has ]: indicating a conditional alarm trigger; [ none ]: indicating that an alarm is not triggered. 4) And only simulating to send and receive short messages under the condition that the SIM card is not inserted. In the case of not inserting the SIM card, various short messages sent from the GRM530 can be browsed in the short message recorder. Under the condition that the SIM card is not inserted, clicking 'simulated short message sending', popping up a short message sending window, clicking 'confirmation' after filling in the short message content, and simulating to use a mobile phone to send the short message to the GRM 530.

The functions described using web monitoring are valid for the GRM530 family of 4G and internet functions, the GRM530 opening up the web monitoring functions. The GRM530 is internally provided with a WEB publishing function, so that the mobile phone webpage and a computer can be used for surfing the internet without any webpage manufacture or a webpage server, and all variables in the GRM530 can be read and written, thereby achieving the function of monitoring the PLC by the webpage. Before use, the network cable is inserted to allow the module to be accessed to an external network, or SIM card flow monthly service of the inserted module is opened, and hardware required by remote monitoring is completed: 1) GRM530 one (insert open 4G SIM card). 2) The GRM530 downloads the line and 24V power. 3) A computer or a smart phone capable of accessing the internet. Software required for completing remote monitoring: 1. when the computer is used for monitoring, any webpage browser can be used; 2. when the mobile phone is used for monitoring, any webpage browser can be used. The method for completing the remote monitoring comprises the following steps: 1. GRM530 engineering development and downloading are completed by using GRM530 engineering configuration software GRMDev3, such as variables needing remote monitoring and configuration, and corresponding PLC register addresses. And checking the read-write attribute of the network for variables needing to be monitored on the webpage, and configuring the WEB expansion attribute. And 2, after the GRM530 development and downloading are finished, inserting an SIM card to log in the cloud monitoring server. Wait for the nixie tube to display "one". 3. And providing a serial number for the huge control, and opening a module webpage function. 4. And opening the serial number and the password of the website input module monitored by the huge control cloud by using a mobile phone webpage browser or a computer webpage browser, and modifying and checking all variables in the GRM 530.

The timing history data can be stored in the module data dictionary at regular time by using the GRM530 and uploaded to the cloud server to form history data. Historical data can be inquired or derived from a webpage by using a historical data table and a historical graph (the historical data function of the GRM530 has an offline continuous transmission function, even if the GRM530 cannot be connected with a server due to network interruption or card arrearage during recording, the data recorded at regular time can be recorded into a cloud server after a module is online next time, and the historical data cannot be lost). In the file-project option menu of the GRMDEV configuration software, the history data recording interval and the variables to be recorded are configured by using the history data recording function 3, and it is noted that the history data recording configuration can be entered only by inputting the serial number of the module for the first time. Historical data authority can be clicked and refreshed, recording time can be calculated, the data record is checked, after the condition 4 configuration is completed, the data record is downloaded to the module, and the module is allowed to log in the server.

Referring to fig. 5-9, the monitoring method based on the integrated monitoring system for lithography peripherals of the present invention includes the following steps:

step S1, setting up communication network, adjusting to positive half period every 0.5 seconds;

and step S2, calling a workshop air conditioning program to monitor the workshop air conditioning system. The method comprises the following steps:

sequentially reading the temperature analog quantity of a central air conditioner, the temperature of an air inlet of a transmitter, the temperature of an air return inlet of the transmitter, the air pressure value of an air outlet, the pressure difference of an air outlet and an air inlet, the temperature of an outdoor environment, the running state of a digital quantity compressor, the running state of a digital quantity electric heating fan, the running state of a digital quantity condensing fan and the state of a digital quantity power supply detector in a workshop air conditioning system;

judging whether the temperature of the transmitter is normal or not and whether the read value is reasonable or not, and if not, setting an alarm flag bit to indicate that the temperature transmitter has errors; if yes, entering the next step;

judging whether the wind pressure of the transmitter is normal or not and whether the read value is reasonable or not, if not, setting an alarm flag bit to be wrong with the wind pressure transmitter, and if so, entering the next step;

judging whether the temperature of the transmitter is lower than a set value, if so, setting the temperature of an alarm flag bit to be low; if not, stopping the operation of the compressor;

judging whether the temperature of the transmitter is greater than a set value, if so, setting the temperature of an alarm flag bit to be high; if not, entering the next step;

judging whether the wind pressure of the transmitter is lower than a normal value by 90%, if so, setting an alarm flag bit, and displaying related information by a touch screen; if not, entering the next step;

judging whether the air pressure of the transmitter is lower than 80% of a normal value, if so, setting an alarm flag bit, stopping electric heating, and stopping the compressor; if not, entering the next step;

checking whether the power supply is normal, if not, setting a power supply alarm flag bit, and stopping the machine; if yes, entering the next step;

judging whether the outdoor temperature is greater than 30 ℃, if so, judging whether a condensing fan operates, and if so, opening an electromagnetic valve and continuously spraying by a condenser;

and judging whether the outdoor temperature is greater than 35 ℃, if so, judging whether a condensing fan operates, if so, opening an electromagnetic valve, continuously spraying by using a condenser, and if not, opening the electromagnetic valve, and intermittently spraying by using the condenser.

And step S3, calling a precision air conditioner program and monitoring the air conditioner PLC. The method comprises the following steps:

reading the operation parameters of the precision air conditioner from the designated storage space;

converting the temperature corresponding value from double precision to real number, and converting the humidity corresponding value from double precision to real number;

judging whether the temperature exceeds an upper limit value, if so, setting an alarm flag bit, and if so, exceeding the upper limit value; if not, entering the next step;

judging whether the temperature exceeds a lower limit value, if so, setting an alarm flag bit, and exceeding the lower limit value;

if not, ending.

Step S4, adjusting to negative half period every 0.5 seconds;

step S5, calling a UPS program to monitor the UPS;

and step S6, calling an air compressor program and monitoring the air compressor. The method comprises the following steps:

reading the operating parameters of the second air compressor from the designated storage space;

inputting the digital quantity into a first air compressor to judge the running condition of the first air compressor;

reading analog quantity input to obtain a compressed air pressure value;

setting a starting marker bit when starting up for the first time;

judging whether the machine is started for the first time, if not, keeping the original working right; if so, setting the working right, and giving the working right to the first air compressor;

whether the first air compressor works for 1.5 hours or not, if not, the original working right is kept; if yes, switching the work right, stopping the first air compressor, and working the second air compressor;

when the first air compressor works for full 30 minutes and the pressure is lower than the lower limit, an alarm flag bit is set, and the current working right corresponds to insufficient work of the air compressor or a gas leakage point exists; the two air compressors work together.

And step S7, checking whether the air compressor works or not, and accumulating the working times of the air compressor in the touch screen when the air compressor works. The method comprises the following steps:

checking whether the first air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the first air compressor;

judging whether the value in the corresponding memory of the first air compressor reaches the maximum value, if so, resetting the value in the corresponding memory of the first air compressor;

checking whether the second air compressor works, if so, accumulating 1 by the numerical value in the corresponding memory of the second air compressor;

judging whether the value in the corresponding memory of the second air compressor reaches the maximum value, if so, resetting the value in the corresponding memory of the second air compressor

And step S8, checking whether the alarm condition is met, and outputting sound and light alarm when the alarm condition is met.

By the method, the memory and the value in the PLC are edited and downloaded in options of engineering under a software interface in a variable mode according to different equipment attributive variable attributes. And finishing historical data recording in an official website of a communication module manufacturer. Therefore, the mobile phone computer monitoring and the short message telephone alarming can be conveniently completed. And historical data and Excel archives.

In summary, no matter the precise air conditioner, the air compressor and the UPS are independent devices in the market at present, the invention not only finishes the acquisition of the operation data of different devices, but also controls the dangerous operation of some devices with incomplete design, and avoids the dangerous operation result. The working environment of the equipment is improved by using the existing operation data and PLC control related elements; the running state of the relay control equipment is digitalized, and meanwhile, the relay control equipment is controlled in a round-robin mode. For the device with communication function to directly read in communication form, the hardware cost can be almost ignored. Meanwhile, a communication module is adopted to collect relevant operation parameters of the PLC, the relevant operation parameters are displayed on a mobile phone computer for monitoring, and the alarm is given by a short message telephone in time. And the statistical historical data and Excel archiving are facilitated. In short, the important feature of the invention is that it essentially organically integrates and integrates the present relatively advanced control concepts and devices.

The above embodiments are provided only for illustrating the present invention and not for limiting the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and therefore all equivalent technical solutions should also fall within the scope of the present invention, and should be defined by the claims.