1. The electromagnetic drive type MEMS micro-mirror comprises a base (1) and a micro-mirror (5), and is characterized in that a fixed column (2) is fixedly connected to the base (1), a fixed rod (3) is fixedly connected to the upper right side of the fixed column (2), a through hole (4) is formed in the fixed rod (3), the micro-mirror (5) is arranged in the through hole (4), the micro-mirror (5) penetrates through the through hole (4), a first spring (6) is fixedly connected to the position, located in the through hole (4), of the micro-mirror (5), the other side of the first spring (6) and the side wall of the through hole (4) are fixedly connected, a threaded hole (8) is formed in the right side of the fixed rod (3), a threaded rod (9) is sleeved in the threaded hole (8), the threaded rod (9) penetrates through the threaded hole (8), and a regulation and control groove is formed in the through hole (4), the adjustable rotary mirror is characterized in that a rotary block (7) is arranged in the adjusting and controlling groove in a rotary connection mode, the rotary block (7) penetrates through the adjusting and controlling groove and the micromirror (5) in a fixed connection mode, a movable plate (12) is arranged on the base (1), a clamping device of the movable plate (12) is arranged on the base (1), and a pressing device is arranged on the base (1).

2. The MEMS micro-mirror of claim 1, wherein the clipping device comprises a moving slot (10) disposed on the upper side of the base (1), the moving slot (10) is disposed on the right side of the fixed column (2), the moving slot (10) is disposed on the lower side of the moving plate (12), a moving block (11) is disposed in the moving slot (10), the moving block (11) penetrates through the moving slot (10) and the moving plate (12) and is fixedly connected to the moving plate, an annular slot (13) is disposed in the moving slot (10), an annular plate (14) is rotatably connected to the annular slot (13), the annular plate (14) penetrates through the annular slot (13), the moving block (11) penetrates through the annular plate (14) and is fixedly connected to the annular plate (14), and a contact plate (16) is disposed in the moving slot (10), the contact plate (16) is located on the lower side of the moving block (11), a second spring (15) is fixedly connected to the lower side of the contact plate (16), the other side of the second spring (15) is fixedly connected with the moving groove (10), a deep groove (32) is formed in the moving groove (10), a sliding block (33) is arranged in the deep groove (32) in a sliding connection mode, and the sliding block (33) penetrates through the deep groove (32) and the contact plate (16) in a fixed connection mode.

3. An electromagnetic actuated MEMS micro-mirror as claimed in claim 1, the pressing device comprises two pressing plates (18) symmetrically arranged on a base (1), the two pressing plates (18) are fixedly connected through a connecting rod (23), a rotating groove (19) is arranged on the right side of the two pressing plates (18), the two sides of the rotating groove (19) are arranged through, a rotating rod (20) is fixedly connected in the rotating groove (19), the rotating rod (20) is sleeved with an arc-shaped plate (21) in a sliding way, the arc-shaped plate (21) penetrates through the rotating groove (19), a third spring (22) is fixedly connected and arranged in the rotating groove (19) of the arc-shaped plate (21), the rotating rod (20) penetrates through the spring III (22), and the other side of the spring III (22) is fixedly connected with the rotating groove (19).

4. The electromagnetic drive type MEMS micro-mirror according to claim 3, wherein the fixed post (2) is provided with a control groove (17), the control groove (17) is internally and symmetrically provided with two limiting grooves (25), the two limiting grooves (25) are communicated with each other through a limiting plate (26), the limiting plate (26) is slidably connected with the two limiting grooves (25), the right side of the limiting plate (26) is fixedly connected with a contact rod (24), and the contact rod (24) penetrates through the side wall of the control groove (17) and is fixedly connected with the connecting rod (23).

5. The MEMS micro-mirror of claim 4, wherein a control plate (29) is disposed in the control groove (17), the control plate (29) is disposed through the control groove (17), the control plate (29) is symmetrically and fixedly connected to the left side of the control plate (29) and provided with two springs (30), two springs (30) are disposed on the other side of the springs and fixedly connected to the side wall of the control groove (17), a sliding groove (27) is disposed at the bottom of the control groove (17), a sliding rod (28) is slidably connected to the sliding groove (27), the sliding rod (28) is disposed through the sliding groove (27) and the control plate (29), and the limiting plate (26) is fixedly connected to the left side of the control plate (31) and provided with a plurality of protrusions (31) and a plurality of contact connection portions of the protrusions (31) and the control plate (29).

6. An electromagnetically actuated MEMS micro-mirror as claimed in claim 5, wherein said control plate (29) is fixed with a rubber cover.

7. An electromagnetic driven MEMS micro-mirror as claimed in claim 1, characterized in that said threaded rod (9) is threaded with a non-slip nut on the outside of the fixed rod (3).

Background

MEMS is an abbreviation of micro electro mechanical system, which is also called micro electro mechanical system, microsystem, micromachine, etc., and refers to a high-tech device with a size of several millimeters or less, and MEMS focuses on ultra-precision machining, and relates to many disciplines of microelectronics, materials, mechanics, chemistry, mechanics, and its discipline surface covers physical, chemical, and mechanical branches of force, electricity, light, magnetism, sound, surface, etc. under the microscale.

Disclosure of Invention

The invention aims to solve the defects in the prior art, such as: an object to be observed is directly placed on an observation platform without corresponding fixing devices, and when the object needs to be rotated for better observation, the operation is very inconvenient.

In order to achieve the purpose, the invention adopts the following technical scheme:

an electromagnetic drive type MEMS micro-mirror comprises a base and a micro-mirror, wherein a fixed column is fixedly connected on the base, a fixed rod is fixedly connected with the right side of the fixed column, a through hole is arranged on the fixed rod, a micro mirror is arranged in the through hole, the micro mirror penetrates through the through hole, a first spring is fixedly connected and arranged in the through hole, the other side of the first spring is fixedly connected with the side wall of the through hole, the right side of the fixed rod is provided with a threaded hole, a threaded rod is sleeved in the threaded hole, penetrates through the threaded hole and is provided with a regulating groove in the through hole, the regulating groove is provided with a rotating block in a rotating connection way, the rotating block penetrates through the regulating groove and is fixedly connected with the micromirror, the base is provided with a movable plate, the base is provided with a clamping device of the movable plate, and the base is provided with a pressing device.

Preferably, the blocking device comprises a moving groove arranged on the upper side of the base, the moving groove is arranged on the right side of the fixed column, the moving groove is arranged at the lower side of the moving plate, a moving block is arranged in the moving groove, the moving block penetrates through the moving groove and is fixedly connected with the moving plate, an annular groove is arranged in the movable groove, an annular plate is rotationally connected in the annular groove and penetrates through the annular groove, the moving block penetrates through the annular plate and is fixedly connected with the annular plate, a contact plate is arranged in the moving groove, the contact plate is arranged at the lower side of the moving block, a second spring is fixedly connected at the lower side of the contact plate, the other side of the second spring is fixedly connected with the moving groove, a deep groove is arranged in the moving groove, the deep groove is provided with a sliding block in sliding connection, and the sliding block penetrates through the deep groove and is fixedly connected with the contact plate.

Preferably, press device includes two clamp plates, two that the symmetry set up on the base the clamp plate passes through connecting rod fixed connection and sets up, two the clamp plate right side is equipped with the rotation groove, the penetrating setting in both sides in rotation groove, it is equipped with the dwang to rotate inslot fixed connection, sliding sleeve is equipped with the arc on the dwang, the arc runs through in rotating the groove setting, the arc is located to rotate inslot fixed connection and is equipped with spring three, the dwang runs through in three settings of spring, the opposite side and the rotation groove fixed connection setting of spring three.

Preferably, be equipped with the control groove on the fixed column, the symmetry is equipped with two spacing grooves in the control groove, two set up through the limiting plate intercommunication between the spacing groove, limiting plate and two spacing groove sliding connection set up, the right side fixed connection of limiting plate is equipped with the contact lever, the contact lever runs through in control groove lateral wall and connecting rod fixed connection setting.

Preferably, be equipped with the control panel in the control flume, the control panel runs through in the control flume setting, control panel left side symmetry fixed connection is equipped with two springs four, two the opposite side and the control flume lateral wall fixed connection setting of spring four, the bottom is equipped with the spout in the control flume, sliding connection is equipped with the slide bar in the spout, the slide bar runs through in spout and control panel fixed connection setting, limiting plate left side fixed connection is equipped with a plurality of archs, and is a plurality of arch and control panel contact connection set up.

Preferably, the control panel is fixedly sleeved with a rubber sleeve.

Preferably, the threaded rod is positioned on the outer side of the fixing rod and is sleeved with an anti-slip nut in a threaded manner.

Compared with the prior art, the invention has the beneficial effects that: through-hole and micro mirror's cooperation, under the effect of threaded rod and screw hole, carry out the regulation work about to the position of micro mirror, so that carry out better observation to the object, through special press device, the object clamp that utilizes two arcs will need to carry out the observation is on the movable plate, only need the mobile control board left, reciprocate the connecting rod can, high durability and convenient operation, adjust fast, through special screens device, carry out corresponding fixed stable operation to movable plate and movable block, cooperate with press device, rotate the object on the movable plate when needs, so that when carrying out better observation, press down the contact plate, rotating the movable plate can, the bulk operation is simple, therefore, the clothes hanger is strong in practicability.

Drawings

FIG. 1 is a schematic structural diagram of an electromagnetic driven MEMS micro-mirror according to the present invention;

FIG. 2 is a schematic top view of a fixing post of an electro-magnetically actuated MEMS micro-mirror according to the present invention;

FIG. 3 is a schematic top view of a pressing plate and an arc plate of an electro-magnetic MEMS micro-mirror according to the present invention;

fig. 4 is a left side cross-sectional view of a moving groove of an electromagnetically driven MEMS micro-mirror according to the present invention.

In the figure: the device comprises a base 1, fixed columns 2, fixed columns 3, through holes 4, micro mirrors 5, springs 6I, rotating blocks 7, threaded holes 8, threaded rods 9, moving grooves 10, moving blocks 11, moving plates 12, annular grooves 13, annular plates 14, springs 15 II, contact plates 16, control grooves 17, pressing plates 18, rotating grooves 19, rotating rods 20, arc plates 21, springs 22 III, connecting rods 23, contact rods 24, limiting grooves 25, limiting plates 26, sliding grooves 27, sliding rods 28, control plates 29, springs IV, bulges 31, deep grooves 32 and sliders 33.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Referring to fig. 1-4, an electromagnetic drive type MEMS micro-mirror comprises a base 1 and a micro-mirror 5, a fixed column 2 is fixedly connected to the base 1, a fixed rod 3 is fixedly connected to the right side of the fixed column 2, a through hole 4 is formed in the fixed rod 3, a micro-mirror 5 is arranged in the through hole 4, the micro-mirror 5 is arranged in the through hole 4 in a penetrating manner, a spring i 6 is fixedly connected to the other side of the spring i 6 and the side wall of the through hole 4 in a fixed manner, so that a good relative stabilizing effect is maintained between the micro-mirror 5 and the through hole 4, a threaded hole 8 is formed in the right side of the fixed rod 3, a threaded rod 9 is sleeved in the threaded hole 8, the threaded rod 9 is arranged in the threaded hole 8, a regulating groove is formed in the through hole 4, a rotating block 7 is rotatably connected to the regulating groove and fixedly connected to the micro-mirror 5, the threaded rod 9 is rotated, the micro mirror 5 is driven to move left and right in the through hole 4 under the action of the regulating groove and the rotating block 7 to perform better observation effect, the threaded rod 9 is positioned on the outer side of the fixed rod 3 and is sleeved with an anti-slip nut in a threaded manner to prevent the threaded rod 9 and the fixed rod 3 from sliding correspondingly, the base 1 is provided with the movable plate 12, the base 1 is provided with a clamping device of the movable plate 12, the clamping device comprises a movable groove 10 arranged on the upper side of the base 1, the movable groove 10 is positioned on the right side of the fixed column 2 and is provided with the movable groove 10 positioned on the lower side of the movable plate 12, the movable block 11 is arranged in the movable groove 10 and penetrates through the movable groove 10 and the movable plate 12 to be fixedly connected, the movable groove 10 is internally provided with an annular groove 13, the annular plate 14 is rotatably connected and arranged in the annular groove 13, and the movable block 11 penetrates through the annular plate 14 and the annular plate 14 to be fixedly connected and provided, the position of the moving block 11 is limited to a certain extent by the matching of the annular groove 13 and the annular plate 14, the moving block 10 is internally provided with a contact plate 16, the contact plate 16 is arranged at the lower side of the moving block 11, the lower side of the contact plate 16 is fixedly connected with a second spring 15, the other side of the second spring 15 is fixedly connected with the moving block 10, the moving block 11 is simply fixed by the action of the second compressed spring 15 on the contact plate 16, the moving block 10 is internally provided with a deep groove 32, the deep groove 32 is internally provided with a sliding block 33 in a sliding connection manner, the sliding block 33 penetrates through the deep groove 32 and the contact plate 16 to be fixedly connected, the motion trail of the contact plate 16 is determined, the base 1 is provided with a pressing device, the pressing device comprises two pressing plates 18 symmetrically arranged on the base 1, the two pressing plates 18 are fixedly connected through a connecting rod 23, the right sides of the two pressing plates 18 are provided with a rotating groove 19, and the two sides of the rotating groove 19 are arranged in a penetrating manner, a rotating rod 20 is fixedly connected in the rotating groove 19, an arc plate 21 is slidably sleeved on the rotating rod 20, the arc plate 21 penetrates through the rotating groove 19, a spring III 22 is fixedly connected and arranged in the rotating groove 19, the rotating rod 20 penetrates through the spring III 22, the other side of the spring III 22 is fixedly connected with the rotating groove 19, under the action of the spring III 22, the arc plate 21 is more closely connected with an object to be fixed, a control groove 17 is arranged on the fixed column 2, two limit grooves 25 are symmetrically arranged in the control groove 17, the two limit grooves 25 are communicated through a limit plate 26, the limit plate 26 is slidably connected with the two limit grooves 25, a contact rod 24 is fixedly connected on the right side of the limit plate 26, the contact rod 24 penetrates through the side wall of the control groove 17 and is fixedly connected with the connecting rod 23, and the limit plate 26 is matched with the limit plate 26, under the action of the contact rod 24, determining the movement tracks of the connecting rod 23 and the two pressing plates 18, arranging a control plate 29 in the control groove 17, arranging the control plate 29 to penetrate through the control groove 17, symmetrically and fixedly connecting the left side of the control plate 29 with two springs four 30, fixedly connecting the other sides of the two springs four 30 with the side wall of the control groove 17, arranging a sliding groove 27 at the bottom in the control groove 17, arranging a sliding rod 28 in the sliding groove 27 in a sliding connection manner, fixedly connecting the sliding rod 27 with the control plate 29 to determine the movement track of the control plate 29, fixedly connecting the left side of the limit plate 26 with a plurality of bulges 31, arranging the bulges 31 in a contact connection manner with the control plate 29, fixedly sleeving a rubber sleeve on the control plate 29, increasing the corresponding friction force under the double actions of the rubber sleeve and the bulges 31 by the control plate 29 and the limit plate 26, better fixing the limit plate 26, under the actions of the control, when the control panel 29 is in contact connection with the protrusion 31 on the limiting plate 26, the position of the limiting plate 26 is fixed under the action of the spring four 30, the fixing operation of the connecting rod 23 and the pressing plate 18 is further completed, the position of the arc-shaped plate 21 is finally determined, and when the control panel 29 is disconnected from the protrusion 31 on the limiting plate 26, the connecting rod 23 and the pressing plate 18 are moved up and down, so that the regulation and control work on the position of the arc-shaped plate 21 is completed.

In the invention, an object to be observed by using a micro mirror 5 is placed on a movable plate 12, a control plate 29 is moved leftwards, the control plate 29 compresses a fixedly connected spring IV 30, the control plate 29 is disconnected from a bulge 31, a connecting rod 23 is moved upwards and downwards, the connecting rod 23 drives a fixedly connected pressing plate 18 to move upwards and downwards, the pressing plate 18 drives an arc plate 21 to move upwards and downwards, the relative position of the arc plate 21 is positioned at the upper side of the object, the two arc plates 21 are rotated by taking a rotating rod 20 as a center, the object is pressed while the two arc plates 21 are contacted with the object, the connecting rod 23 drives a fixedly connected contact rod 24 to move upwards and downwards in the process of moving the connecting rod 23, the contact rod 24 drives a fixedly connected limiting plate 26 to move upwards and downwards, after the position of the arc plate 21 is adjusted, the control plate 29 is released, and the control plate 29 moves rightwards under the action of the spring IV 30, control panel 29 contacts with arch 31 on the limiting plate 26, compress tightly fixedly limiting plate 26, and then accomplish the fixed operation to arc plate 21, rotate threaded rod 9, threaded rod 9 drives the micro mirror 5 through changeing piece 7 and removes and remove, carry out corresponding observation work, when needing to rotate the object, press down contact plate 16, contact plate 16 compresses two 15 of fixedly connected spring, disconnection between contact plate 16 and the movable block 11, repeat foretell operation, with arc plate 21 rebound a little, make disconnection between arc plate 21 and the object, rotate movable plate 12, and then accomplish the rotational operation to the object, carry out corresponding observation work once more.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.