1. A calibration method for a radio frequency power supply control system is characterized in that a radio frequency power supply is applied to a semiconductor device, and the calibration method for the radio frequency power supply control system comprises the following steps:

acquiring a first initial value calibration value and a first full-scale calibration value of a collection value of a signal to be calibrated of the radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

acquiring a second initial value calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated;

calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

2. The calibration method of claim 1, wherein the obtaining the first initial calibration value and the first full-scale calibration value of the collected value of the signal to be calibrated of the rf power supply comprises:

setting an input signal of the signal to be calibrated of the radio frequency power supply to be zero;

taking the current acquisition value of the signal to be calibrated as the first initial value calibration value;

setting an input signal of the signal to be calibrated as a full-scale value of the signal to be calibrated;

and taking the current acquisition value of the signal to be calibrated as the first full-scale calibration value.

3. The calibration method of claim 1, wherein the obtaining a second initial calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated comprises:

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is zero;

taking the current feedback output value of the signal to be calibrated as the second initial value calibration value;

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is a full-scale value;

and taking the current feedback output value of the signal to be calibrated as the second full-scale calibration value.

4. The calibration method of claim 1, wherein the current acquisition value of the signal to be calibrated is calculated by the following formula:

wherein, P_FIs the actual acquisition value, P, of the signal to be calibrated_FSIs the current acquisition value, P, of the signal to be calibrated_Fa1For said first initial value of calibration value, P_Fa2For said first full scale calibration value, P_FmaxThe full scale value of the signal to be calibrated is obtained.

5. The calibration method of claim 1, wherein the current feedback output value of the signal to be calibrated is calculated by the following formula:

wherein, P_FbIs the actual feedback output value, P, of the signal to be calibrated_FIs the actual acquisition value, P, of the signal to be calibrated_Fba1For the second initial value of calibration, P_Fba2For said second full scale calibration value, P_FmaxThe full scale value of the signal to be calibrated is obtained.

6. A calibration device for a radio frequency power supply control system, comprising:

a collection value calibration module to:

acquiring a first initial value calibration value and a first full-scale calibration value of a collection value of a signal to be calibrated of the radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

a feedback output value calibration module to:

acquiring a second initial value calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated;

and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

7. The calibration device of claim 6, wherein the acquisition value calibration module and the feedback output value calibration module are implemented based on FPGA programs.

8. A radio frequency power supply control system comprising the radio frequency power supply control system calibration device of any one of claims 6 to 7.

9. The radio frequency power supply control system of claim 8, further comprising:

the forward power acquisition module is used for acquiring a forward power signal output by the radio frequency power supply;

the reflected power acquisition module is used for acquiring a reflected power signal output by the radio frequency power supply;

the control signal acquisition module is used for acquiring an input control signal of the radio frequency power supply;

the forward power feedback output module is used for outputting a forward power feedback signal of the radio frequency power supply;

the reflected power feedback output module is used for outputting a reflected power feedback signal of the radio frequency power supply;

and the control signal output module is used for outputting a control signal so as to control the radio frequency power supply to generate radio frequency power.

10. A semiconductor device comprising a radio frequency power supply and the radio frequency power supply control system according to claim 8 or 9 for calibrating a signal of the radio frequency power supply.

Background

The radio frequency power supply is one of key parts of equipment such as semiconductors, photovoltaics and LEDs, and has the main function of providing high-frequency plasma excitation for semiconductor plasma etching, CVD (physical vapor deposition), PVD (chemical vapor deposition), sputtering coating and the like. The most important point of the requirements of the semiconductor equipment on the radio frequency power supply is high accuracy and consistency of power output, so the control accuracy and consistency of the radio frequency power supply control system are one of the key factors for determining the performance indexes of the radio frequency power supply.

The radio frequency power supply control system needs to collect analog detection signals such as forward power, reflected power and the like output by radio frequency for system power detection, collect analog control signals for system control input, simultaneously output analog signals such as forward power, reflected power and the like for system feedback, and output the calculated analog control signals for system control, wherein the collection, output precision and consistency of the signals influence the control precision of the whole radio frequency power supply.

Because the detection signal, the input control signal and the output control signal are analog quantity signals, the control precision and the control consistency of the whole radio frequency power supply control system are poor due to the inevitable influence of various aspects such as component precision, component consistency, zero drift of an amplifier, reference power supply errors of A/D and D/A and the like in the signal conditioning, acquisition and conversion processes, and the control precision and the control consistency of the whole radio frequency power supply control system are improved by purely depending on hardware measures such as component precision improvement, zero drift control and the like.

According to the conventional calibration method for the output power of the radio frequency power supply, the nonlinearity of the radio frequency power supply is relieved and compensated by fitting a radio frequency power supply control input signal curve, and the control precision of semiconductor equipment in the application process of the radio frequency power supply is improved.

The specific implementation scheme of the method is as follows:

acquiring a plurality of preset output calibration powers ai of a radio frequency power supply, wherein i is 1, 2, …, n;

acquiring a plurality of actual powers B [ i ], i is 1, 2, …, n of a load, wherein the actual powers B [ i ] of the load correspond to preset output calibration powers A [ i ] one by one;

obtaining a functional relation B between the actual power B of the load and the preset output calibration power A of the radio frequency power supply according to the preset output calibration powers A [ i ] and the actual powers B [ i ] (< F (A));

taking a functional relation F between preset output calibration power A and actual power B as a functional relation between theoretical output power C of the radio frequency power supply and expected power P of the load: c ═ f (p).

According to the method, the accuracy of the output power calibration of the radio frequency power supply can be improved. The method belongs to the field of whole machine application of the radio frequency power supply, is suitable for application of the radio frequency power supply in semiconductor equipment, can compensate for the influence on the whole machine due to precision and nonlinearity in the application process of the radio frequency power supply to a certain extent, but has no improvement on the power output precision of the radio frequency power supply, depends on calibration of input signals of the radio frequency power supply in a mode of fitting a radio frequency power supply control input signal curve, has time difference, is difficult to ensure the real-time performance of the whole system, and is not suitable for application with higher real-time requirement.

Disclosure of Invention

The invention aims to provide a radio frequency power supply control system, a calibration method and a calibration device thereof, and semiconductor equipment, so that the control accuracy and the control consistency of the radio frequency power supply control system are improved, and the control instantaneity is ensured.

In a first aspect, the present invention provides a calibration method for a radio frequency power control system, where a radio frequency power is applied to a semiconductor device, the calibration method for the radio frequency power control system includes:

acquiring a first initial value calibration value and a first full-scale calibration value of a collection value of a signal to be calibrated of the radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

acquiring a second initial value calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated;

calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

Optionally, the obtaining a first initial value calibration value and a first full-scale calibration value of a collected value of a signal to be calibrated of the radio frequency power supply includes:

setting an input signal of the signal to be calibrated of the radio frequency power supply to be zero;

taking the current acquisition value of the signal to be calibrated as the first initial value calibration value;

setting an input signal of the signal to be calibrated as a full-scale value of the signal to be calibrated;

and taking the current acquisition value of the signal to be calibrated as the first full-scale calibration value.

Optionally, the obtaining a second initial value calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated includes:

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is zero;

taking the current feedback output value of the signal to be calibrated as the second initial value calibration value;

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is a full-scale value;

and taking the current feedback output value of the signal to be calibrated as the second full-scale calibration value.

Optionally, the current acquisition value of the signal to be calibrated is subjected to calibration calculation by the following formula:

wherein, P_FIs the actual acquisition value, P, of the signal to be calibrated_FsIs the current acquisition value, P, of the signal to be calibrated_Fa1For said first initial value of calibration value, P_Fa2For said first full scale calibration value, P_FmaxThe full scale value of the signal to be calibrated is obtained.

Optionally, the current feedback output value of the signal to be calibrated is calibrated and calculated through the following formula:

wherein, P_FbIs the actual feedback output value, P, of the signal to be calibrated_FIs the actual acquisition value, P, of the signal to be calibrated_Fba1For the second initial value of calibration, P_Fba2For said second full scale calibration value, P_FmaxThe full scale value of the signal to be calibrated is obtained.

In a second aspect, the present invention provides a calibration apparatus for a radio frequency power supply control system, including:

a collection value calibration module to:

acquiring a first initial value calibration value and a second full-scale calibration value of a collection value of a signal to be calibrated of the radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

a feedback output value calibration module to:

acquiring a second initial value calibration value and a second full-scale calibration value of the feedback output value of the signal to be calibrated;

and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

Optionally, the acquisition value calibration module and the feedback output value calibration module are implemented based on an FPGA program.

In a third aspect, the present invention provides a radio frequency power supply control system, including the calibration apparatus for a radio frequency power supply control system according to the second aspect.

Optionally, the method further comprises:

the forward power acquisition module is used for acquiring a forward power signal output by the radio frequency power supply;

the reflected power acquisition module is used for acquiring a reflected power signal output by the radio frequency power supply;

the control signal acquisition module is used for acquiring an input control signal of the radio frequency power supply;

the forward power feedback output module is used for outputting a forward power feedback signal of the radio frequency power supply;

the reflected power feedback output module is used for outputting a reflected power feedback signal of the radio frequency power supply;

and the control signal output module is used for outputting a control signal so as to control the radio frequency power supply to generate radio frequency power.

In a fourth aspect, the present invention further provides a semiconductor device, including a radio frequency power supply and the radio frequency power supply control system of the third aspect for calibrating and controlling a signal of the radio frequency power supply.

The invention has the beneficial effects that:

the calibration method of the radio frequency power supply control system comprises the steps of obtaining a first initial value calibration value, a first full-scale calibration value, a second initial value calibration value and a second full-scale calibration value of a signal to be calibrated acquisition value of a radio frequency power supply, calibrating the acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated to obtain an actual acquisition value of the signal to be calibrated, and calibrating the feedback output value of the signal to be calibrated according to the actual acquisition value, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated to obtain an actual feedback output value of the signal to be calibrated, so that forward power, reflected power and control signals, forward power feedback signals and forward power feedback signals acquired by the radio frequency power supply control system can be obtained, The reflected power feedback signal and the output control signal are calibrated in real time to obtain actual values of a plurality of signals to be calibrated, the radio frequency power supply control system can carry out radio frequency power supply power control based on the actual values of the signals, so that the radio frequency power supply power output precision can be effectively improved without depending on the improvement of the precision and the hardware performance of electronic components, the hardware cost is not increased, and meanwhile, the radio frequency power supply control system adopts the actual values of the signals to carry out the radio frequency power supply power control, so that the inaccuracy of signal acquisition values and feedback output values and the actual values of the signals caused by the component precision, the component consistency, the zero drift of an amplifier, the reference power supply errors of A/D and D/A and the like in the signal conditioning, acquisition and conversion processes of the control system can be effectively eliminated, and further the signal acquisition and control precision is low, The problem of poor consistency effectively improves the control precision and the control consistency of the radio frequency power supply control system.

Furthermore, the radio frequency power supply control method can be realized through software, can be used for carrying out independent calibration and adjustment when each radio frequency power supply device leaves a factory, can effectively avoid the problem of poor consistency of the output power control of the radio frequency power supply caused by the accumulated error of components and effectively improve the consistency of the output power control of the radio frequency power supply.

Furthermore, the acquisition value calibration module and the feedback output value calibration module in the calibration device of the radio frequency power supply control system are realized based on an FPGA program, the FPGA is used as a control core of the control system, after the calibration value is obtained, the control system calculates an effective power value according to the calibration value and the acquired power value, and the characteristic of parallel execution of the FPGA program can be utilized, a plurality of signals to be calibrated are automatically and independently calculated and processed in parallel, so that the real-time performance of the system is effectively ensured.

The apparatus of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings, in which like reference numerals generally represent like parts.

Fig. 1 is a flowchart illustrating a calibration method of a radio frequency power supply control system according to embodiment 1 of the present invention.

Fig. 2 is a diagram illustrating a step of calibrating a forward power collecting value in a calibration method of a radio frequency power supply control system according to embodiment 1 of the present invention.

Fig. 3 is a diagram illustrating a step of calibrating a forward power feedback value in a calibration method of a radio frequency power supply control system according to embodiment 1 of the present invention.

Fig. 4 shows an FPGA programming schematic diagram of a calibration apparatus of a radio frequency power supply control system according to embodiment 2 of the present invention.

Fig. 5 shows a functional block diagram of a radio frequency power control system according to an embodiment of the present invention.

Detailed Description

The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Example 1

Fig. 1 shows a step diagram of a calibration method of a radio frequency power supply control system according to the present invention.

As shown in fig. 1, a calibration method for a radio frequency power control system, in which a radio frequency power is applied to a semiconductor device, includes:

step S101: acquiring a first initial value calibration value and a first full-scale calibration value of a collection value of a signal to be calibrated of a radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

the method specifically comprises the following steps:

setting an input signal of a signal to be calibrated of a radio frequency power supply to be zero;

taking the current acquisition value of the signal to be calibrated as a first initial value calibration value;

setting an input signal of a signal to be calibrated as a full-scale value of the signal to be calibrated;

and taking the current acquisition value of the signal to be calibrated as a first full-scale calibration value.

Step S102: acquiring a second initial value calibration value and a second full-scale calibration value of a feedback output value of a signal to be calibrated;

the method specifically comprises the following steps:

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is zero;

taking the current feedback output value of the signal to be calibrated as a second initial value calibration value;

adjusting the feedback output value of the signal to be calibrated until the feedback output signal is a full-scale value;

and taking the current feedback output value of the signal to be calibrated as a second full-scale calibration value.

Step S103: calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

specifically, the current acquisition value of the signal to be calibrated is calibrated and calculated through the following formula:

wherein, P_FFor the actual acquisition value of the signal to be calibrated, P_FsIs the current acquisition value of the signal to be calibrated, P_Fa1Is a first initial value of calibration, P_Fa2For the first full-scale calibration value, P_FmaxIs the full scale value of the signal to be calibrated.

Step S104: and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

Specifically, the current feedback output value of the signal to be calibrated is calibrated and calculated through the following formula:

wherein, P_FbFor the actual feedback output value, P, of the signal to be calibrated_FFor the actual acquisition value of the signal to be calibrated, P_Fba1For a second initial calibration value, P_Fba2For the second full-scale calibration value, P_FmaxIs the full scale value of the signal to be calibrated.

The calibration method of the rf power control system according to the present invention is further described below by taking calibration of the collected forward power value and calibration of the feedback forward power value as an example.

As shown in fig. 2, the calibration method for the forward power collection value includes:

step S201: setting a forward power input signal of a radio frequency power supply to be zero;

step S202: the control system records the collected forward power value as a forward power initial value calibration value;

step S203: setting a forward power input signal of a radio frequency power supply as a full-scale range value of the power supply;

step S204: the control system records the collected forward power value as a forward power full-scale calibration value;

step S205: and when the system runs, calculating the actual forward power acquisition value according to the initial forward power value calibration value, the full-scale calibration value and the forward power acquisition value.

The calculation method of the actual value of the forward power is shown as formula (1):

wherein, P_FIs the actual value of forward power, P_FsFor forward power acquisition value, P_Fa1For initial calibration of the forward power value, P_Fa2For forward power full scale calibration values, P_FmaxIs the forward power full scale value.

The calibration method of the reflected power and the input control signal is the same as that of the forward power, and is not described herein again.

As shown in fig. 3, the forward power feedback value calibration method includes:

step S301: the control system changes the forward power feedback value until the feedback output signal is zero;

step S302: recording a current forward power feedback value as a forward power feedback initial value calibration value;

step S303: the control system changes the forward power feedback value to a full-scale value of the feedback output signal;

step S304: recording a current forward power feedback value as a forward power feedback full-scale calibration value;

step S305: when the system runs, the actual forward power feedback value is calculated according to the initial forward power value calibration value, the full-scale calibration value, the initial forward power feedback value calibration value, the full-scale forward power feedback value calibration value and the actual forward power acquisition value.

The calculation method of the forward power feedback value is shown as formula (2):

wherein, P_FFor actual production of forward powerSet value, P_FbFor actual feedback value of forward power, P_Fba1For the initial calibration value of forward power feedback, P_Fba2For forward power feedback full scale calibration values, P_FmaxIs the forward power full scale value.

Substituting into formula (1) the actual forward power collection value P_FThe calculation method for obtaining the actual feedback value of the forward power is shown in formula (3):

the calibration method of the reflected power feedback value and the output control signal is the same as that of the forward power feedback value, and is not described herein again.

Example 2

The embodiment of the present invention further provides a calibration apparatus for a radio frequency power supply control system, including:

a collection value calibration module to:

acquiring a first initial value calibration value and a second full-scale calibration value of a collection value of a signal to be calibrated of a radio frequency power supply, wherein the signal to be calibrated comprises at least one of a forward power signal, a reflected power signal and a control signal;

calibrating the current acquisition value of the signal to be calibrated according to the first initial value calibration value, the first full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual acquisition value of the signal to be calibrated;

a feedback output value calibration module to:

acquiring a second initial value calibration value and a second full-scale calibration value of a feedback output value of a signal to be calibrated;

and

and calibrating the current feedback output value of the signal to be calibrated according to the actual acquisition value of the signal to be calibrated, the second initial value calibration value, the second full-scale calibration value and the full-scale value of the signal to be calibrated so as to obtain the actual feedback output value of the signal to be calibrated.

Preferably, the acquisition value calibration module and the feedback output value calibration module are implemented based on FPGA programs.

Specifically, because the radio frequency power supply control system has higher requirements on the real-time performance and the rapidity of signal processing, the FPGA is adopted as the core of the control system, the characteristic of parallel execution of FPGA programs is utilized, and the correction method and the correction flow of the embodiment are realized through a hardware description language, so that the operation speed is improved, and the real-time performance and the rapidity of the radio frequency power supply control system are ensured.

The FPGA program implementation of the forward power calibration and the forward power feedback value calibration when the system is running is shown in fig. 4.

In fig. 4, the ForwardPower module is a forward power calibration module, and the forward power calibration operation is implemented according to the calculation method of formula 1; the ForwardPowerFeedBack module is a forward power feedback value calibration module, and the calibration operation of the forward power feedback value is realized according to the calculation method of the formula (3). Clock is the system Clock, P_fsFor forward power acquisition value, P_fa1For initial calibration of the forward power value, P_fa2For forward power full scale calibration values, P_fba1For the initial calibration value of forward power feedback, P_fba2For forward power feedback full scale calibration values, P_fmaxIs the forward power full scale value. P_fFor actual values of forward power, P_fbThe actual feedback output value of the forward power is obtained.

The radio frequency power supply control system is provided with a plurality of channels of signals to be calibrated simultaneously, and comprises a reflected power signal, an input control signal, a forward power feedback signal, a reflected power feedback signal, a control output signal and the like besides a forward power signal and a forward power feedback signal, and the calibration method is the same as the forward power signal and the forward power feedback signal.

In the embodiment, the FPGA is used as the core of the control system to realize the real-time automatic calculation of calibration, so that the real-time performance and the rapidity of the system are ensured. In other embodiments, other methods that can satisfy the real-time performance and the rapidity of the system, such as using a CPLD or a high-speed processor, may also be used instead of an FPGA to complete the calibration operation.

Example 3

As shown in fig. 5, a radio frequency power control system includes the calibration apparatus of the radio frequency power control system of embodiment 2.

Further comprising:

the forward power acquisition module is used for acquiring a forward power signal output by the radio frequency power supply;

the reflected power acquisition module is used for acquiring a reflected power signal output by the radio frequency power supply;

the control signal acquisition module is used for acquiring an input control signal of the radio frequency power supply;

the forward power feedback output module is used for outputting a forward power feedback signal of the radio frequency power supply;

the reflected power feedback output module is used for outputting a reflected power feedback signal of the radio frequency power supply;

and the control signal output module is used for outputting a control signal so as to control the radio frequency power supply driving circuit to generate radio frequency power.

Specifically, the radio frequency power supply control system collects a forward power signal, a reflected power signal and an input control signal, outputs a forward power feedback signal after operation, reflects the power feedback signal to the semiconductor equipment, and controls the radio frequency driving circuit to generate radio frequency power by controlling the output signal. The forward power acquisition module, the reflected power acquisition module, the control signal acquisition module, the forward power feedback output module and the control signal output module are all circuits.

Example 4

An embodiment of the present invention further provides a semiconductor device, including a radio frequency power supply and the radio frequency power supply control system of embodiment 3 that calibrates a signal of the radio frequency power supply.

In conclusion, the invention has the following advantages:

1) the control precision of the output power is high, the cost for improving the power output precision is low, the requirement of the semiconductor equipment on the control precision of the output power of the radio frequency power supply is very high, and the control precision of a radio frequency power supply control system is one of key factors influencing the output power precision of the radio frequency power supply. With the development of semiconductor equipment technology, the requirement on the radio frequency power supply control precision is continuously improved, the traditional mode of simply improving the precision of hardware devices cannot meet the requirement of equipment, the invention researches a software calibration method aiming at the problem, and the method can solve the problem of poor control system precision caused by factors such as component precision, component consistency, amplifier zero drift, A/D and D/A reference power supply errors and the like, does not depend on the improvement of the precision of electronic components and hardware performance any more, can effectively improve the radio frequency power supply power output precision, and does not increase the hardware cost.

2) The radio frequency power supply has high consistency in output power control, is applied to high-precision semiconductor equipment, and has high consistency in control requirements on different radio frequency power supply output powers. Although a traditional radio frequency power supply control system adopts high-precision electronic components, the signal processing circuit is complex, more components are adopted, and a circuit formed by a plurality of components has accumulated precision errors, so that the consistency of the radio frequency power supply control system cannot meet the requirement of high consistency. The invention adopts a software calibration method, and each power supply is independently calibrated and calibrated when leaving the factory, so that the problem of low consistency caused by accumulated errors of components can be effectively avoided, and the consistency of the radio frequency power supply is effectively improved.

3) The real-time performance is good, the FPGA is used as the control core of the control system, and after the calibration value is obtained, the control system calculates the effective power value according to the calibration value and the collected power value. By utilizing the parallel execution characteristic of the FPGA program, a plurality of signals to be calibrated are automatically and independently calculated and processed in parallel, and the real-time performance of the system is effectively ensured.

4) The radio frequency power supply controls automatic calculation and is simple to apply. The calibration method of the radio frequency power supply control system adopts an automatic calculation mode, does not need to manually acquire correction data by debugging the whole equipment, and is simple to apply.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments.