1. The temperature sensor based on the PEDOT-ZnO nano heterojunction is characterized in that the temperature sensor takes the nano heterojunction formed by the nano material of the PEDOT and the nano material of the ZnO as a temperature sensitive element.

2. The temperature sensor according to claim 1, wherein the PEDOT nanomaterial is a PEDOT nanotube or nanorod and the ZnO nanomaterial is a ZnO nanotube or nanorod.

3. The temperature sensor according to claim 1 or 2, wherein the temperature sensitive element is a point contact type P-N nano heterojunction composed of PEDOT nanotubes and ZnO nanorods.

4. The temperature sensor according to any one of claims 1 to 3, wherein the temperature sensor comprises a silicon-based substrate, interdigital electrodes are arranged on the silicon-based substrate, and the nano heterojunction is connected between adjacent interdigital electrodes.

5. The temperature sensor according to claim 4, wherein one end of the ZnO nanorod is fixed on one of the adjacent interdigital electrodes, the other end of the ZnO nanorod forms a point contact with one end of the PEDOT nanotube, and the other end of the PEDOT nanotube is fixed on the other adjacent interdigital electrode;

and a plurality of ZnO nanorods grow on the same interdigital electrode, and the plurality of ZnO nanorods and the same PEDOT nanotube form point contact.

6. The temperature sensor according to claim 3 or 4, wherein the PEDOT nanotubes have a length of 10 to 12 μm, an outer diameter of about 400 to 450nm, and an inner diameter of about 250 to 300 nm.

7. The temperature sensor according to claim 3 or 4, wherein the ZnO nanorods have a length of 3 to 3.5 μm and a diameter of about 100 to 150 nm.

8. The temperature sensor according to claim 1, wherein the silicon-based substrate comprises a silicon wafer and an insulating silicon oxide layer coated on the surface of the silicon wafer, and the interdigital electrode is disposed on the insulating silicon oxide layer.

9. The temperature sensor according to claim 1, wherein the manufacturing method comprises the steps of:

1) SiO deposited on P-type silicon wafer₂A thin film layer;

2) sputtering on the SiO₂Preparing an interdigital electrode and a pin layer on the surface of the thin film layer;

3) preparing a plurality of vertically arranged ZnO nanorods on the interdigital electrodes by photoetching sputtering and seed crystal growth;

4) the PEDOT nanotubes are arranged between adjacent electrodes by an alternating current dielectrophoresis technology and are connected with a plurality of ZnO nanorods to form a stable air bridge structure.

Background

The temperature sensor is a sensor for converting temperature change into electric signal change, and detects temperature by using the change of the electric signal reflected by the temperature change of the temperature sensitive element. The existing temperature sensor has wide application and a plurality of varieties. They can be roughly classified into the following categories: thermocouple temperature sensors, thermistor temperature sensors, RTD temperature sensors, PN junction temperature sensors, integrated temperature sensors, infrared temperature sensors, and the like. The thermocouple temperature sensor has low cost, wide temperature measuring range and poor sensitivity and stability; the thermistor temperature sensor has high sensitivity, quick response and narrow temperature measurement range; RTD temperature sensors are extremely high in accuracy and stability but expensive; the PN junction temperature sensor is a semiconductor sensitive device which has low precision and slow response speed, but is well compatible with semiconductor and integrated circuit processes. With the development and progress of semiconductor and integrated circuit technologies, a PN junction temperature sensor which is high in precision, fast in response speed and well compatible with modern high and new industries is in urgent need of invention.

Disclosure of Invention

The invention provides a temperature sensor based on a PEDOT-ZnO nano heterojunction.

The invention discovers that the prepared temperature sensor has higher accuracy, better sensitivity and wider temperature measurement range by taking the nano heterojunction formed by the PEDOT nanotube and the ZnO nanorod as a temperature sensitive element, can solve the problems of low precision, low response speed and the like of the conventional PN junction sensor, and is ideally applied to the semiconductor and integrated circuit process.

Preferably, the temperature sensitive element is a point contact type P-N nano heterojunction formed by a PEDOT nanotube and a ZnO nanorod.

Preferably, the temperature sensor comprises a silicon-based substrate, interdigital electrodes are arranged on the silicon-based substrate, and the nano heterojunction is connected between adjacent interdigital electrodes.

Preferably, one end of the ZnO nanorod is fixed on one of the adjacent interdigital electrodes, the other end of the ZnO nanorod forms point contact with one end of the PEDOT nanotube, and the other end of the PEDOT nanotube is fixed on the other adjacent interdigital electrode;

and a plurality of ZnO nanorods grow on the same interdigital electrode, and the plurality of ZnO nanorods and the same PEDOT nanotube form point contact.

Preferably, the PEDOT nanotube has a length of 10 to 12 μm, an outer diameter of about 400 to 450nm, and an inner diameter of about 250 to 300 nm.

Preferably, the ZnO nanorod has the length of 3-3.5 microns and the diameter of about 100-150 nm.

Preferably, the silicon-based substrate comprises a silicon wafer and a silicon oxide insulating layer coated on the surface of the silicon wafer, and the interdigital electrode is arranged on the silicon oxide insulating layer.

Preferably, the preparation method of the temperature sensor of the present invention comprises the following steps:

1) deposition of SiO on P-type silicon wafer₂A thin film layer;

2) sputtering on the SiO₂Preparing an interdigital electrode and a pin layer on the surface of the thin film layer;

3) preparing a plurality of vertically arranged ZnO nanorods on the interdigital electrodes by photoetching sputtering and seed crystal growth;

4) the PEDOT nanotubes are arranged between adjacent electrodes by an alternating current dielectrophoresis technology and are connected with a plurality of ZnO nanorods to form a stable air bridge structure.

As a preferred operation mode, the preparation of the ZnO nanorod comprises the following steps:

1) performing photoetching sputtering (the pressure is 0.8-1.2 pa, the power is 110-130W, the atmosphere is 14-16 sccm O₂And 28 to 32sccm N₂) Preparing a thin ZnO seed layer; after the lift-off process, the substrate with the patterned ZnO seed layer was placed in O₂Annealing for 15-25 minutes at 280-320 ℃ in the atmosphere;

2) putting the substrate into a stainless steel autoclave which is filled with precursor solution and lined with polytetrafluoroethylene in a direction that the seed crystal faces downwards; synthesizing the vertically arranged ZnO nano-rods at 90-100 ℃ for 1-3 hours.

As a preferred operation mode, the setting of the PEDOT nanotubes comprises the following steps:

dripping PEDOT dispersion liquid onto the interdigital electrode area; then, applying alternating current with the amplitude of 5-7V and the frequency of 1kHz to the tail end of the electrode for about 0.5-1.5 minutes by a signal generator (MHS-5200P, MingHe); under the action of an electric field force, the PEDOT nanotubes suspended in the dispersion liquid are connected with the ZnO nanorods to form a stable air bridge structure;

as a preferred mode of operation, the preparation of the temperature sensor of the present invention comprises the steps of:

1) deposition of 300nm SiO on P-type (100) silicon wafer₂A thin film layer;

2) preparing metal layers of 10nm Ti and 50nm Au by a sputtering method to be used as an electrode and a pin layer of the temperature sensor according to claim 1;

3) coating photoresist on the upper surface of the metal layer for first photoetching, and obtaining an interdigital electrode and a pin after etching and removing the photoresist;

4) then sputtering is carried out in the second photolithography (pressure is 1pa, power is 120W, atmosphere is 15sccm O₂And 30sccm N₂) Preparing a thin ZnO seed layer; after the lift-off process, the substrate with the patterned ZnO seed layer was placed in O₂Annealing at 300 ℃ for 20 minutes in an atmosphere;

5) putting the substrate into a stainless steel autoclave which is filled with precursor solution and lined with polytetrafluoroethylene in a direction that the seed crystal faces downwards; synthesizing ZnO nano-rods which are vertically arranged at 95 ℃ for 2 hours;

6) the substrate with the patterned ZnO nano-rods is fully washed by deionized water, dried in N2 atmosphere and finally placed in O₂Annealing at 450 ℃ for 30 minutes in an atmosphere;

7) PEDOT nanotubes were assembled horizontally between adjacent electrodes by ac dielectrophoresis technique: firstly, 2 mu L of PEDOT dispersed liquid is dripped on an interdigital electrode area; then, an alternating current having an amplitude of 6V and a frequency of 1kHz was applied to the electrode tip for about 1 minute by a signal generator (MHS-5200P, MingHe); under the action of an electric field force, the PEDOT nanotubes suspended in the dispersion liquid are connected with the ZnO nanorods to form a stable air bridge structure;

8) and annealing at 90 ℃ for 15 minutes to obtain the temperature sensor based on the PEDOT-ZnO nano heterojunction.

The invention has the following beneficial effects:

1) compared with the existing PN junction temperature sensor, the temperature sensor has the advantages of wide temperature measurement range, capability of measuring the temperature within the range of-60-90 ℃, higher sensitivity and accuracy, lower energy consumption and higher stability.

2) The temperature sensor disclosed by the invention is simple in structure and preparation method, and overcomes the contradiction between cost and temperature measurement range and sensitivity to a certain extent.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a preparation process of the present invention;

FIG. 3 is a graph of the test results of a temperature sensor based on a PEDOT-ZnO nano heterojunction;

FIG. 4 is a graph of the test results of a temperature sensor based on a PEDOT-ZnO nano heterojunction;

in fig. 1: the solar cell comprises a silicon-based substrate 1, a silicon dioxide insulating layer 2, a metal interdigital electrode 3, a 4ZnO nanorod and a 5PEDOT nanotube.

Detailed Description

The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

Example 1

The embodiment relates to a temperature sensor, the structure of which is as follows:

the temperature sensitive element is a point contact type p-n nano heterojunction composed of PEDOT nanotubes and ZnO nanorods

The temperature sensor comprises a silicon-based substrate 1, wherein a silicon dioxide insulating layer 2 and a metal interdigital electrode 3 are arranged on the silicon-based substrate, one end of a ZnO nanorod 4 is fixed on one of the adjacent interdigital electrodes, the other end of the ZnO nanorod 4 is in point contact with one end of a PEDOT nanotube 5, and the other end of the PEDOT nanotube is fixed on the other adjacent interdigital electrode (the schematic structural diagram is shown in figure 1).

Example 2

The embodiment relates to a preparation method of the temperature sensor in the embodiment 1, which comprises the following steps:

1) preparation of a silicon-based substrate: selecting a P-type doped silicon wafer with the crystal orientation (100) as a substrate, and then depositing a silicon dioxide film layer with the thickness of 300nm on the silicon wafer.

2) Preparing a metal interdigital electrode: depositing Ti with the thickness of 10nm and Au with the thickness of 50nm on the upper surface of the silicon substrate obtained in the step 1) by adopting a sputtering deposition technology in sequence, coating photoresist on the upper surface of the deposited metal layer for carrying out first photoetching, and forming an interdigital metal electrode and a pin thereof.

3) Growing the ZnO nano-rod: and performing second photoetching to form a ZnO seed crystal layer on the interdigital only on one side by using a Lift-off process. The ZnO seed crystal layer is obtained by a sputtering deposition process, wherein the sputtering pressure is 1Pa, the power is 120W, and the gas atmosphere is O₂ 15sccm、 N₂30 sccm. Then placing the substrate with the ZnO seed layer on one side interdigital on O with the temperature of 300 DEG C₂Annealing in atmosphere for 20 min. The substrate obtained above was placed with Zn (NO) in a direction in which the ZnO seed layer was oriented downward₃)₂And heating the inner container of the reaction kettle with the solution of + HMTA + PEI for 2 hours by a 95 ℃ hydrothermal method to grow the zinc oxide nano-rod. After the hydrothermal growth is finished, the device is cleaned in deionized water for 5min, then fully dried in N2, and then placed into an annealing furnace to be annealed for 30min in an O2 atmosphere at 450 ℃.

4) Assembling PEDOT nanotubes: alternating current dielectrophoresis techniques were used. Firstly, ultrasonically dispersing a prepared PEDOT solution in an ultrasonic cell crusher for 15min, and then dripping the PEDOT solution on an interdigital electrode. The dropping was repeated 2 times, 1. mu.L each. Then, an alternating current having an amplitude of 6V and a frequency of 1kHz was applied to both ends of the electrodes for about 1 minute by a signal generator (MHS-5200P, MingHe).

5) Annealing: and finally, annealing for 15min at 90 ℃ (the preparation flow chart is shown in figure 2).

Examples of the experiments

The temperature sensor described in example 1 was subjected to a performance test using a B1500A semiconductor device analyzer with a temperature control device. Because the temperature range of the test is wide, the test is selected to be carried out in a vacuum environment so as to prevent frost formation on the sensor when the temperature is too low.

The results of the tests are shown in fig. 3 and 4, and the tested temperature sensor is tested at a temperature range from 228K to 348K (i.e., -45 ℃ to 75 ℃), and a voltage which linearly increases with time from 0V to 1V is applied to the two ends of the sensor at each temperature point by taking 20K as a step (the test temperature range is-45 ℃ to 75 ℃, the temperature measurement range which can be realized by the sensor of the invention is-60 ℃ to 90 ℃ in the above description, and the two do not conflict with each other, because the temperature step of the test is 20 ℃, and the response is good in the tested range of-45 ℃ to 75 ℃, so that the good effect can be determined in the range of-60 ℃ to 90 ℃.

The curve of fig. 3 shows that the temperature sensor has a relatively sensitive response in a large temperature range, the current changes significantly with the change of temperature, and the change of the order of magnitude can be realized in the whole temperature measurement range, which shows that the temperature sensor of the present invention can realize higher sensitivity. As can be directly seen from fig. 4, as the temperature increases, the on-resistance of the sensor gradually decreases and the linearity is good as a whole, indicating that the temperature sensor can achieve higher accuracy. In addition, the temperature sensor has very low power consumption of about 2-3 microwatts, and can be used for a long time.

Although the invention has been described in detail hereinabove by way of general description, specific embodiments and experiments, it will be apparent to those skilled in the art that many modifications and improvements can be made thereto based on the invention. Accordingly, such modifications and improvements are intended to be within the scope of the invention as claimed.